High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

2-M3 x 0.5 depth 4 8.45 20 Piping port M5 x 0.8 depth 5 6.4 Piping port R, NPT 1/4 18.35 3.5 12.4 7 7.8 25.1 2.5 10.7 2.6 8.45 10.1 12.4 30 15.2 14.5 22 Piping port G 1/4 Piping port G 7 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 Dimensions Bracket A A 30 20 20 45 55 4.5 11.5 40 15 4.5 6.5 1.6 20 41.5 ZS-24-A Bracket A View A Bracket D A 30 20 20 45 55

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Compact Cylinder with Air Cushion Series RQ

Knuckle Pin (common with double clevis pin) Rod End Nut d d Dd9 C m l L t m t H B Material: Carbon steel mm Material: Rolled steel mm Part no. Applicable bore size (mm) 20 25 32, 40 50 Applicable bore size (mm) Snap ring l Part no.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

1 t i With auto switch (Built-in magnet) 20, 25 12, 16 t y e !2 !0 q r !3 !1 w t !1 !2 !0 o q r !3 w y e Component Parts No.

Mechanical Valves Series NVM, NVFM, NVZNI

4 1 l b s ( 6 k g ) P T 20" O T 30' T T 50' P T 20" O T 30' T T 50" 'Length from center to center of r o i l e r : 1 5 I n ( 3 8 l m m ) 'Length lrom cenler to end ol vane = 5 56 in (141 2mm) A B c D E F G H 0.57 14,6) 2.64 (621 1.86 ',47.2)1.45 136.8) 1 3 0 (33) 0.59 (1 5) 1.03 (26.2\ 1 0 0 r25.4', Millimeters in Parentheses A B c D E F G H 5.56 141.2 0.57 14.61 0.25 (6.4) 2 . 1 5 '54.7

IIIIIII

4 1 l b s ( 6 k g ) P T 20" O T 30' T T 50' P T 20" O T 30' T T 50" 'Length from center to center of r o i l e r : 1 5 I n ( 3 8 l m m ) 'Length lrom cenler to end ol vane = 5 56 in (141 2mm) A B c D E F G H 0.57 14,6) 2.64 (621 1.86 ',47.2)1.45 136.8) 1 3 0 (33) 0.59 (1 5) 1.03 (26.2\ 1 0 0 r25.4', Millimeters in Parentheses A B c D E F G H 5.56 141.2 0.57 14.61 0.25 (6.4) 2 . 1 5 '54.7)

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

KP Series (with resin thread) 1) Winding of sealant tape Wrap the pipe tape 2 to 3 times around the threads, leaving 1.5 to 2 thread ridges exposed at the end of the threads. 2) Tightening After tightening by hand, tighten an additional 2 to 3 turns using a tightening tool. 2.

Magnetic Separator FHM Series

10 0 1 5 10 50 100 100 90 80 100 90 80 70 60 50 40 30 20 10 0 100 200 300 400 500 100 200 300 400 500 100 200 300 400 500 Elimination ratio (%) Elimination ratio (%) Elimination ratio (%) 75 70 60 50 40 30 20 10 0 1 5 10 50 30 100 1 5 10 50 100 Flow-back count Flow-back count Flow-back count Explanation of graph Explanation of graph Example: Elimination ratio and concentration after using

NCA1

1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24, 28 Example: NCDA1B150-0200R+0300-XC11 will stroke 2" then an additional 3" for a total stroke of 5".

NCA1

, 14, 16, 18, 20, 24, 28 Example: NCDA1B150-0200R+0300-XC11 will stroke 2" then an additional 3" for a total stroke of 5".

Vacuum Pad: Ball Joint Type

ZP3 Rotating J K 10 to 16 20 to 50 Non-rotating 10 10 mm ZP3E 20 20 mm 30 30 mm ZP2 40 40 mm 50 50 mm ZP2V ZP Note) Pads are exclusively ball joint type and are not interchangeable with other pads.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

60 90 75 40 60 Suction flow 45 20 30 15 0 0 20 40 60 80 100 0 0 0.1 0.2 0.3 0.4 0.5 0.6 Suction flow [L/min(ANR)] Supply pressure [MPa] 256 Vacuum Pad with Ejector ZHP Series Construction A-A Component Parts t !

C76

9 @0 q w e r t y u i o !

C76

9 @0 q w e r t y u i o !

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

Inches (6) Stroke Hundredths of an inch (i.e. 06 = 0.06") Action Double acting Single acting, Spring return Single acting, Spring extend Nil S T Cushion Without rubber bumper Rubber bumper Nil C(7) Note 1) Not available with block mount (R). Note 2) Not available with spring extend (T), double rod (W), block mount (R), rod boot, or 2".

C95Series

20 11 22 14 60 60 129 MB-SIO . 100 11 4 \20 90 15 158 132 \84 26 13.5 24 17 75 100 '29 25 +008001 (mm) [~ "r.

Cylinder

, , 17 8 M4XO.7. ,M12x,.o 12 2D . ~17 : gl ' 1, 5. . 13 t 8 20 \ 7 6.5 , 8 1 5 +0. ~ 0;" '" ~ 065 18.5 15 12 14 , 20 24.5 15.5 6 M5 XO.8 M14 X1.0 6 8 1 0 6 "'2 . 24 \ 9 8 22 8.~ I --Series CJP Trunnion Mount: CJPTi Without Auto Switch u ex ~ lrllnl'l'O(1 Mount T Bore size S I z r zz ~ (mm) 5" 1081 15" 20 91 3pst !

LG1H

10 20 20 20 20 LG1H20 LG1H21 LG1H21 Without coupling 148 Standard motor High rigidity direct acting guide LG1H 10 20 10 20 Horizontal With coupling 158 Non-standard motor 10 20 10 20 With coupling 168 Options Page 178 Construction 179 Mounting 181 Non-standard Motor Mounting 182 Deflection Data 183 Part Number Designations F 2 G X10 1 P A 100 LG1 21 H Frame material Aluminium alloy