Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 40, Motor Mounting Position: L (Left Side Parallel), Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 600mm, Motor Option: B (w/Lock), Auto Switch Mounting Bracket: C (w/1 pc, Included), Grease Application: N (w/o, Roller Specification), Positioning Pin Hole: K (Body

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 40, Motor Mounting Position: R (Right Side Parallel), Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 600mm, Motor Option: B (w/Lock), Auto Switch Mounting Bracket: C (w/1 pc, Included), Grease Application: N (w/o, Roller Specification), Positioning Pin Hole: K (

Series: LEFS (Ball Screw Drive), Accuracy: H (High Precision Type), Size: 40, Motor Mounting Position: R (Right Side Parallel), Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 150mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: C (w/1 pc, Included), Grease Application: N (w/o, Roller Specification), Positioning Pin

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 40, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 150mm, Motor Option: B (w/Lock), Auto Switch Mounting Bracket: C (w/1 pc, Included), Grease Application: N (w/o, Roller Specification), Positioning Pin Hole: K (Body Bottom, 2 Locations

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 40, Motor Mounting Position: R (Right Side Parallel), Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 600mm, Motor Option: B (w/Lock), Auto Switch Mounting Bracket: C (w/1 pc, Included), Grease Application: N (w/o, Roller Specification), Positioning Pin Hole: K (

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 40, Motor Mounting Position: R (Right Side Parallel), Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 600mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: C (w/1 pc, Included), Grease Application: N (w/o, Roller Specification), Positioning Pin Hole: K (Body

40: 1/4), Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: ZA (Digital Pressure Switch w/Unit Selection Function), D: D

40: 1/4), Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: ZA (Digital Pressure Switch w/Unit Selection Function), D: D

40: 1/4), Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: ZA (Digital Pressure Switch w/Unit Selection Function), D: D

,,: ,.

L M a l e E l b o w . . . . . . L__ Plug-in Elbow .. ... L Union Elbow . . . . . . LF Female Elbow . K 45" Male Elbow . . . KF 45' Female Elbow Y M a l e R u n T e e . . . . . T Male Branch Tee . , T Union Tee , . . . . . . , TF Female Branch Tee E Bulkhead Connector E Bulkhead Union . . , U Male Branch 'Y" . . . U Union "Y" . . . . . . . .

Body Size: 40, Back Flow: K (w/Backflow), Thread: N (NPT), Port Size: 06 (3/4), Options: B (w/Bracket), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: 2 (Metal Bowl), Bowl Guard: None, Drain Port: J (Body Size 20: 1/8; Body Size 30 & 40: 1/4), Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Z [Product: psi,

Body Size: 40, Back Flow: K (w/Backflow), Thread: N (NPT), Port Size: 04 (1/2), Options: E1 (NPN Output, Wiring Bottom Entry), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: Polycarbonate Bowl, Bowl Guard: None, Drain Port: J (Body Size 20: 1/8; Body Size 30 & 40: 1/4), Exhaust Mechanism: N (Non-relieving), Flow Direction: R (Flow Direction: Right to Left), Drain Cock w/Barb Fitting: None,

Body Size: 40, Back Flow: K (w/Backflow), Thread: N (NPT), Port Size: 04 (1/2), Options: E1 (NPN Output, Wiring Bottom Entry), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: Polycarbonate Bowl, Bowl Guard: None, Drain Port: J (Body Size 20: 1/8; Body Size 30 & 40: 1/4), Exhaust Mechanism: N (Non-relieving), Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure

Body Size: 40, Thread: N (NPT), Port Size: 02 (1/4), Option: G (for Sizes 20, 25, 30, 40 Round Type Pressure Gauge w/Limit Indicator; for Size10: Round Type Pressure Gauge w/o Limit Indicator), Attachment: KSTV (K + S + T + V), Semi-Standard 1: 3 (Lubricator w/Drain Cock, Exhaust Port), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 40, Back Flow: K (w/Backflow), Thread: F (G), Port Size: 04 (1/2), Options: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: Polycarbonate Bowl, Bowl Guard: None, Drain Port: J (Body Size 20: 1/8; Body Size 30 & 40: 1/4), Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Product:

3 Port Air Operated Valve Series SYJA300 1

Change of fluid passage Flow Characteristics Flow characteristics 1 2 (P A) C [dm 3/(sbar)] 27 38 Port size 2 3 (A R) C [dm 3/(sbar)] 27 40 2 1 (A P) C [dm 3/(sbar)] 25 40 3 2 (R A) C [dm 3/(sbar)] 26 38 b 0.38 0.30 b 0.37 0.32 b 0.36 0.22 b 0.37 0.20 Cv 7.0 9.8 Cv 7.4 9.8 Cv 7.3 9.8 Cv 6.8 9.6 1/2 3/4 N.C. N.O.

VXA21/22

Temperature conditions Water (Standard) Air (Standard) Oil (Standard) Vacuum (3) (V, M) Maximum Minimum 40 1 60 5(1) 40 5 40 40 5 5(2) Pilot port Note 1) Dew point: 5C or less Note 2) 500 cSt or less Note 3) V, M in parentheses are option symbols.

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).

Precision Clean Regulator

0 q 9 Valve seat PTFE IRV 10 O-ring Fluororubber u w 11 Diaphragm Fluororubber VEX 12 Gasket Fluororubber SRH 13 Pressure regulator spring Steel wire Pressure regulator screw assembly 14 SRP SRP SRF ITV Dimensions IC ITVH 30.5 Bracket ITVX PVQ 40 A B SMC P K U C S O H L 36 VY1 51 31 30 Panel mounting hole VBA VBAT 40 AP100 8.5 28 20 72.5 (when set = 75.5) Bleed exhaust hole 6.5 28 1.6 Port

Fluoropolymer Piping Equipment

Body Needle V seal Lock nut Adjustment handle Insert bushing Nut Collar A 1 2 3 4 5 6 7 8 PFA PCTFE PTFE PVDF PVDF PFA PFA PFA Body class 2 y u y u B Dimensions A (B) (max.S) D H Port A 2 x G SMC (J) SMC C E F K Port B E A B C D E F G H J K S Model 48 60 72 LVN20 LVN30 LVN40 24 30 36 12 18 22 88 110 124 34.5 43 52 6 9 11 4 5 6 14 25 25 20 26 33 18 24 30 2.4 7.5 8.0 940 LQ1/LQ3/LVN/LQHB Series