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Connector for unit (Plug) 6 y t y t EX600-DXlB EX600-DYlB EX600-DXlCl q w q w e q w er e y t y t y t EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE EX600-DXlF EX600-DYlF EX600-DMlF Analog Unit q w e q w e No.

VM120-01-07 VM120-01-07S VM130-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Cross roller plunger Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM-30AR Red Push button (Mushroom) VM-30AB

Fittings & Tubing Air Cylinders Rotary Actuators View E GB F NN GC GA Mounting nut Mounting nut Relief port M5 x 0.8 Rod end nut MM NN F Cover surface Piping port 2 x M5 x 0.8 D LY LB LH LT LZ LX LT S + Stroke H NA A 4 x LC Mounting hole Y X X Y NB LS + Stroke Z + Stroke C B 0 0.3 B 0 0.3 Drawing of view E (mm) A 10 16 D 15 15 F 4 5 GA 8 8 GB 5 5 H 5 5 MM 28 28 NN M4 x 0.7 M5 x 0.8 C 15 18.3

-/22Double Foot Style (M) / CJ2M, CJ2M 10112122Rubber bumper View E GB F NN GC GA Mounting nut Mounting nut Relief port M5 x 0.8 Rod end nut MM NN F Cover surface Piping port 2 x M5 x 0.8 D LY LB LH LT LZ LX LT S + Stroke H NA A 4 x LC Mounting hole Y X X Y NB LS + Stroke Z + Stroke C B 0 0.3 B 0 0.3 Drawing of view (E) (mm) A 10 16 D 15 15 F 4 5 GA 8 8 GB 5 5 H 5 5 MM 28 28 NN M4 x 0.7 M5

Positioning pin hole Counterclockwise 5 Adjustment bolt A 5 (For counterclockwise rotation end adjustment) 9 22 CRB2 e B port .5 g Adjustment bolt B n ra (For clockwise rotation end adjustment) nt CRBU2 e m e st is w u dj k CRB1 c a e o is d cl w C A port B port n k er c lo o e l Clockwise C a nt c n dj k u o w 0 MSU o u ti is C st ta e 19 m ro ro ta e ti o d n n e nt e ra ng n 5 g e 9 ra

A B C D E F G H J 1.6 M5 2.3 3.2 For other special options, refer to page 462.

2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !

How to Order Rated pressure range ISE20B 0.1 to 1 MPa M For positive pressure ISE20B M5 X For vacuum/ compound pressure ZSE20B X M M5 q w e r t y u q Rated pressure range w Output specification e Unit specification ZSE20B 0 to 101 kPa ZSE20BF 100 to 100 kPa Symbol Description R NPN open collector 2 outputs + Analog voltage output*1 S NPN open collector 2 outputs + Analog current output*1

Positioning pinhole Counter-clockwise 5 Adjustment bolt A 5 (For counter-clockwise rotation end adjustment) 9 22 e B port g .5 n Adjustment bolt B ra (For clockwise rotation end adjustment) nt e e m is st w u k dj c lo a 0 -c e d C 19 s n i er a w lo A port B port e k dj c c nt o l Clockwise C k n e u u w o st ng o is ti C m e ta ra ro e ro ta nt ti o on n ra e d n n ti g e ta 5 9 ro m u

www.stevenengineering.com I FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT REQUEST CATALOG REFERENCE E136 7.22 INSTRUMENTATION ELECTRO-PNEUMATIC REGULATOR D I M E N S I O N S S E R I E S VY1D00-M5 D I M E N S I O N S S E R I E S VY1A0 0 1-M5 D I M E N S I O N S S E R I E S VY1B0 0 1M5 01 Courtesy of Steven Engineering, Inc. ! 230 Ryan Way, South San Francisco, CA 94080-6370 !

N.O. 3(R) (P)1 3(R) (P)1 e t q r e t q r (A) (A) 2 2 u u 3 (R) 1 (P) 3 (R) 1 (P) w w y y Component Parts Replacement Parts Note Zinc die-casted Part no.

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

0 F E 6H9 +0.030 depth 5.5 0 (mm) Model Z E F G H MXW16-75 270 83 112 71.5 45 MXW16-100 295 86 126 74 50 Note) Adjuster bolt (Y) shown in the section above is attached only on type B (with shock absorber). 8-7-14 15 Long Stroke Slide Table Series MXW Dimensions: MXW16 Stroke 125, 150, 175, 200 mm Operating port 2-M5 x 0.8 Width across flats 3 J 14 8 MX MTS MY Width across flats 10 6-M5 x

Ported 10 10 Series VQZ1000/2000/3000 Dimensions: VQZ1000 2 position double Grommet (G): VQZ1220 1-G-C3/C4/C6/M5 300 95 (Lead wire length) 47.5 5.5 (M5: 6) 5.5 (M5: 6) 22.2 mounting hole 0.8 4 8.6 10 SMC SMC 2 R2 Cover diameter 1.6 25.8 2-C3, C4, C6, M5 Cross section 0.34 mm2 60.3 C3: One-touch fitting for 3.2 Manual override C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5

B B Dimensions Dimensions (mm) (mm) D Y F A B C E A B C D E N F Model Model ZPR10F-0-B5 ZPR20F-0-B5 M5 x 0.8 1.5 39.5 12.5 10 12 10 23.4 20 22 ZPR13F-0-B5 ZPR20F-0-B8 M8 x 1.25 13 15 2 40 23.9 13 10.5 12.5 15.5 29.3 46.5 ZPR16F-0-B5 ZPR25F-0-B5 M5 x 0.8 16 18 25 28 ZPR25F-0-B8 M8 x 1.25 Dimensions by Tubing Diameter ZPR32F-0-B5 M5 x 0.8 (mm) 13 16 29.8 47 32 35 ZPR32F-0-B8 M8 x 1.25 Q: 4

x 0.8 2-4.3 8.5 mounting hole 21.6 17 P E PE 9.5 9.5 43 Max. 10 78 4-Rc 1/8 2-M5 x 0.8 (Pilot EXH) (Pilot EXH) 2-M5x0.8 2-M5 x 0.8 (Pilot EXH) 300 (Lead wire length) 300 (Lead wire length) 76 68.5 2-M5 x 0.8 (Pilot EXH) Stations n: Stations Formula L1 = 16n + 11 L2 = 16n + 22 2 43 54 3 59 70 4 75 86 5 91 102 6 107 118 7 123 134 8 139 150 9 155 166 10 171 182 Symbol L1 L2 4-15-8 9 3 Port

Q 8 3 5 Y Applicable tubing O.D.Q R R F F Hexagon width across flats 12 Hexagon width across flats 10 Hexagon width across flats 2 E Hexagon width across flats 3 E D C D C 2 2 A A B B Dimensions A Dimensions A (mm) B (mm) B C D E F Y C D E F N Model Model ZPR10F-0-B5 ZPR20F-0-B5 10 12 10 12.5 23.4 39.5 1.5 M5 x 0.8 20 22 ZPR13F-0-B5 ZPR20F-0-B8 13 15 M8 x 1.25 23.9 12.5 15.5 29.3 46.5 10.5

Proximity switch (optional) depth 5 10 7.5 15 pin plug 5H9 +0.030 0 E-M5 x 0.8 thread depth10 Home position switch (optional) 6 Refer to page 100 for connection cables. 76 46 38 2-M2.5 x 0.45 thread depth 4 5H9 +0.030 0 10 3 depth5 J 27 J x K 25 8 Motor unit Refer to "Applicable Motor List" below for dimensions. (This drawing shows a Tamagawa Seiki, Co., Ltd. motor.)

E-MY25 LEM25 LEM32 LEM series E-MY series How to Order 25 LEMB 300 T S q w e r t y !