Multistage Ejector Series ZL112/212 1

Time to reach vacuum (S) The graphics indicate the time required to reach a vacuum pressure determined by adsorption conditions for workpieces, etc., starting from atmospheric pressure in a 1 sealed tank.

Multistage Ejector (N)ZL Series

Note 2) Since surge voltage is prevented by a rectifier in the case of AC, there is no "S" type.

Model: 50 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Wiring Specification: S (All Single Wiring), Valve Stations: 6 Stations, P,E Port Location: D Side, A,B Port Size: M5, Thread: Rc (or No Selection in the Case of M5 or One-touch Fittings), Mounting: D0 (DIN Rail Mounting w/o DIN Rail)

Stations: 2 Stations, Port Size: M5 (M5 Thread), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 0 (w/o Cable 25 Pin), Option 1: None, Option 2: D (DIN Rail Mounting), Option 3: None, Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust)

Stations: 3 Stations, Port Size: M5 (M5 Thread), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: S (Side), Cable Length: 2 (3.0m Cable 25 Pin), Option 1: None, Option 2: D (DIN Rail Mounting)

Stations: 6 Stations, Port Size: M5 (M5 Thread), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 1 (1.5m Cable 25 Pin), Option 1: None, Option 2: D (DIN Rail Mounting), Option 3: N (Name Plate), Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust)

Stations: 2 Stations, Port Size: M5 (M5 Thread), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 2 (3.0m Cable 25 Pin), Option 1: None, Option 2: D (DIN Rail Mounting), Option 3: None, Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust)

Stations: 6 Stations, Port Size: M5 (M5 Thread), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 3 (5.0m Cable 25 Pin), Option 1: None, Option 2: D (DIN Rail Mounting), Option 3: None, Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust)

Stations: 3 Stations, Port Size: M5 (M5 Thread), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 2 (3.0m Cable 25 Pin), Option 1: None, Option 2: D (DIN Rail Mounting), Option 3: None, Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust), CE Compliant: Q (CE Compliant)

Stations: 8 Stations, Port Size: M5 (M5 Thread), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 0 (w/o Cable 25 Pin), Option 1: None, Option 2: D (DIN Rail Mounting), Option 3: N (Name Plate), Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust)

Stations: 2 Stations, Port Size: M5 (M5 Thread), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: S (Side), Cable Length: 3 (5.0m Cable 25 Pin), Option 1: None, Option 2: D (DIN Rail Mounting)

Stations: 4 Stations, Port Size: M5 (M5 Thread), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: S (Side), Cable Length: 3 (5.0m Cable 25 Pin), Option 1: None, Option 2: D (DIN Rail Mounting)

Stations: 4 Stations, Port Size: M5 (M5 Thread), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 2 (3.0m Cable 25 Pin), Option 1: None, Option 2: D (DIN Rail Mounting), Option 3: N (Name Plate), Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust)

Stations: 4 Stations, Port Size: M5 (M5 Thread), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 2 (3.0m Cable 25 Pin), Option 1: None, Option 2: D (DIN Rail Mounting), Option 3: None, Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust)

Stations: 5 Stations, Port Size: M5 (M5 Thread), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: S (Side), Cable Length: 0 (w/o Cable 25 Pin), Option 1: None, Option 2: D (DIN Rail Mounting)

Stations: 10 Stations, Port Size: M5 (M5 Thread), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: S (Side), Cable Length: 0 (w/o Cable 25 Pin), Option 1: None, Option 2: D (DIN Rail Mounting)

MHx-OMY0005

MHF2-8D1 MHF2-8D2 GR-S-010(10g) MHF8-PS MHF8-PS MHF8-PS-2 122021 GR-L-005(5g) 122021 P.13 16 3-4. /2 MHF2-12D20D 1 12: 16 2 1620: 3 17 4 12:R 18 5 1620:C 6 19 7 20 NBR 8 A 21 NBR 9 B 22 NBR 10 C 11 12 13 14 15 MHF2-12D MHF2-12D1 MHF2-12D2 MHF12-PS MHF12-PS MHF12-PS 202122 MHF2-D,D1(12,16,20)GR-S-010(10g) () MHF2-D2(12) GR-L-005(5g) () GR-S-010(10g) () MHF2-D2(16,20

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

VNH

E F G H I 3 Port 3-Rc 3-Rc 3 8 3 8 Rc 1 8 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B 60 80 100 115 235.5 265 300 319.5 60 77 96 113 46 60 76 85 34 40 50 60 24 36 41 50 135 164.5 200 219 50 60 79 90 77 95.5 111 119 1 2 3-Rc 3 4 3-Rc1 Rc1 4 Rc1 4 Rc1 8 1 2 2-Rc 3 4 2-Rc1 Model J K L M N O P Q R S T U V VNH1 -10A A B VNH2 -15A A B VNH3 -20A A B VNH4 -25A A B M5 x 0.8 depth 5.5

Model: 50 (Side Ported), Connector Type: P (Flat Ribbon Cable, 26 Pins), Connector Entry Direction: 1 (Upward), Wiring Specification: S (All Single Wiring), Valve Stations: 12 Stations, P,E Port Location: B (Both Sides), A,B Port Size: M5, Thread: Rc (or No Selection in the Case of M5 or One-touch Fittings), Mounting: D (DIN Rail Mounting w/DIN Rail)