Auto Switch Guide

M5 x 0.8 x 16 l 1.

Auto Switch Guide

M5 x 0.8 x 16 l 1.

I

Pod NVF3000 NVF5000 Supply SUP Cylindet cYL.1, CYL.2 A , B Exhaust EXH.1, EXH.2 Rl, R2 Symbol (SirEle solenoid) l c 1 : c Y L . 1 l IC2:CYL.2 lEl :EXH.r I {E2:EXH.2] Lubricant 1.

RLQ

m l L t Dt H B -X 20Material: Carbon steel (mm) Material: Rolled steel (mm) Data Part No.

mlu

Clevis pin and knuckle pin Rod end nut 30 d Dd9 d D C l m m t t L H B (mm) (mm) Part no. Size 25 32 40 50 l 18.2 22.2 26.2 32.2 d 7.6 9.6 9.6 13.4 L 23 27 31 38 D 16.5 18 21 26 d M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 Dd9 C 19.6 21.9 25.4 31.2 B 17 19 22 27 H 6 7 8 11 Size 25 32 40 50 Part no.

Compact Vacuum Ejector Series ZA

Y Nil B Non-locking push type Locking type L N Latching positive common Latching negative common AMJ AMV Rated coil voltage Electrical entry 1 2 3 4 5 6 100 VAC 200 VAC 110 VAC 220 VAC 24 VDC 12 VDC AEP L L plug connector, with 0.3 m lead wire HEP L plug connector, without connector, with light/surge voltage suppressor Lead wire length LO Related Nil 6 10 20 30 300 mm 600 mm 1000 mm 2000

Thermo-chiller/Rack Mount Type

or less Ionic state silica (SiO2) [mg/L] 50 or less Iron (Fe) [mg/L] 1.0 or less Copper (Cu) [mg/L] 0.3 or less Sulfide ion (S2) [mg/L] Should not be detected Ammonium ion (NH4+) [mg/L] 1.0 or less Residual chlorine (Cl) [mg/L] 0.3 or less Free carbon (CO2) [mg/L] 4.0 or less Reference item 6.

MLU

MLU Clevis pin and knuckle pin Rod end nut ML1C D30 d Dd9 -X d 20D C l m m t t L H B Data (mm) (mm) Part no. Size 25 32 40 50 l 18.2 22.2 26.2 32.2 d 7.6 9.6 9.6 13.4 L 23 27 31 38 d M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 D 16.5 18 21 26 Dd9 C 19.6 21.9 25.4 31.2 B 17 19 22 27 H 6 7 8 11 Size 25 32 40 50 Part no.

CYP_EN

Recommended speed controlling restrictor/ dual speed controller for CYP cylinder Model Series Restrictor CYP15 CYP32 Elbow type 10-AS1200-M5-X216 10-AS2200-01-X214 Metal body piping type In-line type 10-AS1000-M5-X214 10-AS2000-01-X209 10-AS1201F-M5-04-X214 10-AS2201F-01-04-X214 Elbow type 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 (Restrictor) 10-AS2201F-01-06-X214 10-AS1301F-M5-04-X214

51

D-H7W D-H7NF D-H7BA D-C7/C8 D-H7 D-H7C D-H7W D-H7BA D-H7NF D-G5/K5 D-G5W D-K59W D-B5/B6 D-B59W D-G5NT D-G59F D-H7C D-G5BA D-M9V D-M9WV D-M9AV D-A9V D-C7/C8 D-C73C D-C80C D-M9(V) D-M9W(V) D-M9A(V) D-C73C D-C80C D-B5 D-B6 D-B59W D-A9(V) A B A B A B A B A B A A B B 28.5 29 30.5 31 42.5 42.5 Hs 25.5 28 31.5 36 41.5 48.5 Hs 24.5 27 30.5 35 40.5 47.5 Hs 27 29.5 33 37.5 43 50 Hs 27.5 30

ZQ

B S Manifold Pilot exhaust port location Number of stations Note) 01 02 1 station 2 station B Both sides ZX ... ... 08 8 station Note) Number of stations varies according to nozzle nominal size during simultaneous operation.

Compact Vacuum Ejector Series ZQ

B S Manifold Pilot exhaust port location Number of stations Note) 01 02 1 station 2 station B Both sides ... ... 08 8 station Note) Number of stations varies according to nozzle nominal size during simultaneous operation.

Auto Switch Guide

switch mounting screw M5 x 0.8 x 16 l 1.

LFE-OMY0008

X1.2 9 ( ) 24V10% 63 No.LFE*-OMY0008 LFE1 LFE2 LFE3 1 1 1 5S/cm () 10 0.520 L/min 2.5100 L/min 5200 L/min 0.424.0 L/min 2.0120.0 L/min 4240 L/min 0.424.0 L/min 2.0120.0 L/min 4240 L/min 2 0.4 L/min 2.0 L/min 4 L/min 0.1 L/min 0.5 L/min 1 L/min (50 ms) 0.1 L/pulse 0.5 L/pulse 1 L/pulse 3 085 () L/minL 2F.S. 21.5F.S. 5F.S.(25) 5F.S.(25) 3 01 MPa 3 2 MPa 4 9.9 L 9 L 0.1L 1L

Clean Regulator

L/min Flow rate L/min (ANR) Flow rate L/min (ANR) SRH4100-03 SRH4110-03 SRH4100-03 0.5 0.20 0.20 0.4 Outlet pressure MPa Outlet pressure MPa Outlet pressure MPa 0.15 0.15 0.3 0.10 0.10 0.2 0.05 0.05 0.1 1000 500 10 5 0 15 20 25 500 1000 1500 0 0 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min 858 Clean Regulator SRH Series Pressure Characteristics (Representative Value) Fluid:

Digital Flow Switch (Remote type monitor unit)

Dry air, N2, Ar 0.2 to 10.5 L/min 1 0.5 to 26.3 L/min 1 to 52.5 L/min 2 to 105 L/min 2 Display flow range Instantaneous CO2 0.2 to 5.2 L/min 0.5 to 13.1 L/min 1 to 26.2 L/min 2 to 52 L/min flow Dry air, N2, Ar 0 to 10.5 L/min 1 0 to 26.3 L/min 0 to 52.5 L/min 0 to 105 L/min 2 Set flow range CO2 0 to 5.2 L/min 0 to 13.1 L/min 0 to 26.2 L/min 0 to 52 L/min Min. setting/display unit 0.01 L/

Compact Cylinder with Air Cushion and Lock Series RLQ

L D d m t d H B C C type 10 for shaft 41.6 50.6 9.6 13.4 36.2 44.2 1.55 2.05 1.15 1.15 M14 x 1.5 M18 x 1.5 8 11 22 27 25.4 31.2 IY-G04 IY-G05 C type 14 for shaft 10 14 -0.040 -0.076 -0.050 -0.093 14 Series RLQ Simple Joint/32 to 63 A type mounting bracket 2-D T1 T2 M W V U F B E (mm) Joint and mounting bracket (A type, B type) part no.

Speed Controller: Standard Type Series AS In-line Type 1

min (ANR) Effective area (mm2) Flow rate l/min (ANR) Flow rate l/min (ANR) Number of needle rotations Number of needle rotations Number of needle rotations Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Effective area (mm2) Flow rate l/min (ANR) Effective area (mm2) Flow rate l/min (ANR) Effective area (mm2) Flow rate l/min (ANR) AS Number of needle rotations Number

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Number of needle rotations Number of needle rotations Number of needle rotations Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (L/min (ANR)) Number of needle rotations Number of needle rotations Caution Be sure

Modular Type Lubricator Series AL

Note 3) Bowl assembly for AL30 to AL60 comes with a bowl guard (steel band material). 52 AL10 to 60 Dimensions AL10 AL20 L D Bracket (option) G F Port size K M A Port size C B R C J H OUT OUT IN OUT OUT IN B R P Min. clearance for maintenance Min. clearance for maintenance A AL50, 60 AL30, 40 L D D L Port size Bracket (option) Bracket (option) G F G F Port size M K M K E J C B R C B R H