Body Size: 2 (M5), Socket, Plug Type: S (Socket), Port Size: M5 (M5 X 0.8), Connection: F (Female Thread)

Body Size: 10, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: M5 (M5 x 0.8), Mounting: None, Semi-Standard, Body Size 10: 2 (Metal Bowl), Semi-Standard, Body Size 20: 3 (Drain Cock), Semi-Standard, Body Size 30, 40, 50 & 60: Z (Name Plate, Caution Plate for Bowl in Imperial Units: psi, °F)

Body Size: 10, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: M5 (M5 x 0.8), Mounting: None, Semi-Standard, Body Size 10: 2 (Metal Bowl), Semi-Standard, Body Size 20: Z (Name Plate, Caution Plate for Bowl in Imperial Units: psi, °F), Semi-Standard, Body Size 30, 40, 50 & 60: Standard

Body Size: 10, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: M5 (M5 x 0.8), Mounting: None, Semi-Standard, Body Size 10: 3 (Drain Cock), Semi-Standard, Body Size 20: 6 (Nylon Bowl), Semi-Standard, Body Size 30, 40, 50 & 60: Z (Name Plate, Caution Plate for Bowl in Imperial Units: psi, °F)

Body Size: 10, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: M5 (M5 x 0.8), Mounting: None, Semi-Standard, Body Size 10: 3 (Drain Cock), Semi-Standard, Body Size 20: Z (Name Plate, Caution Plate for Bowl in Imperial Units: psi, °F), Semi-Standard, Body Size 30, 40, 50 & 60: Standard

Body Size: 10, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: M5 (M5 x 0.8), Mounting: None, Semi-Standard, Body Size 10: R (Flow Direction: Right to Left), Semi-Standard, Body Size 20: Z (Name Plate, Caution Plate for Bowl in Imperial Units: psi, °F), Semi-Standard, Body Size 30, 40, 50 & 60: Standard

Body Size: 10, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: M5 (M5 x 0.8), Mounting: None, Semi-Standard, Body Size 10: Z (Name Plate, Caution Plate for Bowl in Imperial Units: psi, °F), Semi-Standard, Body Size 20: Standard, Semi-Standard, Body Size 30, 40, 50 & 60: Standard

Body Size: 10, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: M5 (M5 x 0.8), Mounting: None, Semi-Standard, Body Size 10: 3 (Drain Cock), Semi-Standard, Body Size 20: R (Flow Direction: Right to Left), Semi-Standard, Body Size 30, 40, 50 & 60: Z (Name Plate, Caution Plate for Bowl in Imperial Units: psi, °F)

Speed controller with one-touch fittings , Body sizes: M3, M5, 1/8, 1/4, 3/8, 1/2 , Maximum operating pressure 1MPa, Meter in or meter out control , Port sizes: M3, M5, U10/32, 01, 02, 03, 04 , Various tube O.D. in both metric and inch, FLOW CONTROL, AIRLINE EQUIPMENT, FLOW CONTROL W/FITTING, AB, AS***F M5 STANDARD (PT), .56830 lb

Model Selection 1

M5, 1/8, 1/4 1, 1.6, 2.3, 3.2 2, 3, 4 0 to 0.9 (1) 17-2-68 VV2DW1/2/3 N.C. Manifold M5, 1/8, 1/4, (3/8) Solenoid valve 17-3-17 VX21/22/23 N.C./N.O. Single unit 2, 3, 4.5, 6, 8, 10 1/8 to 1/2 0 to 3 (1) 17-3-25 VVX21/22/23 N.C./N.O.

Body Size: 10, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: M5 (M5 x 0.8), Mounting: None, Semi-Standard, Body Size 10: 6 (Nylon Bowl), Semi-Standard, Body Size 20: Z (Name Plate, Caution Plate for Bowl in Imperial Units: psi, °F), Semi-Standard, Body Size 30, 40, 50 & 60: Standard

High Pressure Coolant Valve

Rc G NPT NPTF Nil F N T None With bracket Nil B Valve type 1 3 N.C./3.5 MPa N.C./7.0 MPa Electrical entry/With light/surge voltage suppressor D DIN terminal Seal material DZ DIN terminal with light/surge voltage suppressor A B NBR seals FKM seals Rated voltage Valve size Port size 3 2 1 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 10A 15A 20A 25A 1 2 3 4 3 8 1 2 3 4

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

No indication is necessary for Rc; however, indicate N for NPT, and F for G. * Separate spacers are required for modular units.

Manifold Regulator Modular Type ARM2500/3000 Series

Note Outlet pressure (MPa) 136413 ARM2500 ARM3000 Hexagon socket head cap screw (M5 x 70) 4 With flat washer 136313 IRV Hexagon socket head cap screw (M6 x 85) 4 With flat washer VEX SRH Option/Bracket Assembly SRP Individual IN type can be used as a single unit regulator.

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

F F Fn n n n (KF) () Heater (option) Auto switch H H H H J J J J G G G G B B B B A A A A A A A A Model A B C D E Fn G H J K XLC-25 50 120 48 1 12 40 26 39 27.5 8 XLC-40 65 171 66 2 11 55 41 63 36 9 8 XL-OMO0001-A 5 Guaranteed period and range The warranty period is 2 million cycles (under SMC endurance test conditions), 18 months after delivery or 12 months in service, whichever comes first

Series 10-MGF Guide table ø40, ø63, ø100

M12 x 1.75 M10 x 1.5 M8 x 1.25 M Bore size Standard stroke (mm) 170 140 10 10 38 38 36.5 E B F KC GB D A 11 11 8.7 120 X T V M6 M6 M5 18.5 KA KB 46 46 38 PP 70 50 M12 x 1.75 M10 x 1.5 M8 x 1.25 N H GA C 1/4 1/4 1/8 40 P 100 63 30, 50,75, 100 40 78 73 58 66.5 61.5 48.5 4 4 3.5 8 100 90 120 160 1/8 1/8 1/8 7.5 200 160 20 20 11.5 11.5 9.5 96 Guide table10-MGF Air cylinder Rotary actuator Air

Exhaust Cleaner for Clean Rooms AMP Series

Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3

Parallel Type Air Gripper Series MHZ

compatible width) Narrow type (MHQ2 compatible width) Using tapped holes Using end boss Using tapped holes Using through holes Body options Finger options Basic type End boss type Side ported Side ported With One-touch fitting for coaxial tube Side tapped Basic type (tapped in open/close direction) Flat type fingers Through holes in open/close direction With M3 port With One-touch fitting With M5

Sine Rodless Cylinder Series REA

Stop 5 Series REA Sine Rodless Cylinder Dimensions (mm) REA 25, 32, 40 1in = 25.4mm Effective thread depth J L 0 0.1 NN G 4-MM H G B 2Port size I X D NB NB T N K W N S + Stroke F NA F R ZZ + Stroke MM x J B D F G H I K L N NA NB NN Model Port size REA25 REA32 REA40 Rc(PT) 1/8 46 27.8 13 8 20.5 34 10 70 M5 x 0.8 x 8 15 30 13 M26 x 1.5 Rc(PT) 1/8 60 35 16 9 22 40 15 80 M6 x 1.0 x 8 17 36 15

ZSE20B(F)-L is UL/CSA, CE and RoHS compliant, with an IP65 enclosure rating.