Air Cylinder

50 to 500 mm/s 1 Stroke length tolerance +2.0 0 Cushion Non-adjustable air cushion + rubber bumper Port size (Rc, NPT, G) 1/8 1/4 3/8 Mounting Basic Depending on the system configuration selected, the specified speed may not be satisfied. 1 Maximum operating pressure and piston speed are different from the current product (MB series).

Electronic Pressure Switch Series (Separate Type)

.S. or less (0 to 50C: based on 25C) 2% F .S. or less (0 to 50C: based on 25C) 5% F.S. or less (0 to 60C) ZSE30: 0.2 F.S. 2 digits or less ISE30: 0.2 F.S. 1 digit or less Repeatability 1% F .S. or less 0.2% F.S. 1 digit or less 0.5% F.S. 0.2% F.S. 1 digit or less Hysteresis mode: Variable Window comparator mode: Variable Hysteresis mode: Variable Window comparator mode: Variable Variable

Multistage Ejector Series ZL112/212 1

kPa 13.3 kPa 10 10 0 0 1 2 3 4 5 6 7 8 9 10 11 12 1 2 3 4 5 6 Time to reach vacuum (S) Time to reach vacuum (S) The graphics indicate the time required to reach a vacuum pressure determined by adsorption conditions for workpieces, etc., starting from atmospheric pressure in a 1 sealed tank.

Controller setting Software (ACT Controller)

The AREA 1 and AREA 2 in the setting items define this output range. The input condition is that the AREA 1 and AREA 2 should be both in the actuators operating range, and AREA 1 < AREA 2. < [B] In position> This is the condition that turns on the [INP] (in position) output signal.

CQM

1 !2 !3 !4 !5 !6 !

VVX31/32/33

cm3/min or less 0.1 cm 3/min or less (1) 10 6 Pam 3/s or less VX33 Note 1) Differs depending on the operating conditions such as pressure, etc.

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~:;:--l' VAC Vacuum load lock chamber Digital pressure switch Digital Pressure Switch Series ZSE6/ISE6 (For vacuum) (For positive pressure) Model 1~SV(S % F ,S, ) ".

ZISE10.eng

Display to show the standard product Names of individual parts 1 s Output (OUT1) display (Green) Output (OUT2) display (Red) Display to show the unit specification button (SET) 1 s Connector LED display ZSE10(F)/ISE10 Display to show the product Pin No. of the Connector button (UP) Socket Housing DC(+) Brown 5 Pin No. 1 s button (DOWN) Display to show the pressure range OUT1 Black 4 OUT2

Compact and

Description Material Note 1 Body PBT Caution 1. Quality of supply air 2 Diffuser PBT Type S: White, Type L: Black 3 Cap POM Use clean compressed air as fluid. (Air quality class 2 : 4 : 3, 2 : 5 : 3, or 2 : 6 : 3 as specified in ISO 8573-1: 2010 is recommended.)

LEJ-OM004xx

They are all important notes for safety and must be followed in addition to International Standards (ISO /IEC), Japan Industrial Standards (JIS)*1) and other safety regulations*2). *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part

-- NCM seies

S 1 p c . n n p c s . L Long leads uountng B Front Nose Mount C -Rear Pivot E -Double End K -Non-Rotating Rod R -Block Mount W-Double Rod Auto.Switch 853. D-853 Gsg D-G59 B54. D-854 K59 D-K59 864 .

Electric Actuators

1 0 50W Ground ball screw 0.02 High rigidity direct acting 600 50W Rolled ball screw 0.05 guide Standard motor 100W 1 5 0.1 500 [Tamagawa Slide screw Seiki Co., Ltd.] 200W 20 0.1 300 Slider guide Without Non-standard motor brake 100W Ground ball screw 0.02 Matsushita Electric Industrial Co., Ltd.

Slide Unit/Double Rod Type Series CX2 Slide Bearing: ø10, ø15, ø25

Table (1) Air-hydro/Piston Speed Plate mounting Housing mounting Model CX2H15 CX2H25 Refer to the below. Note 1) 5 to 50 mm/s 5 to 40 mm/s 5 to 100 mm/s Note 1) Consult with SMC when the air-hydro type is mounted on a plate.

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PRODUCT SPECIFICATIONS S E R I E S I P 5 0 0 0 / I P 5 1 0 0 IP5000 (Linear) IP5100 (Rotary) SERIES 20 100 psi SUPPLY PRESSURE STROKE SENSITIVITY LINEARITY HYSTERESIS 0.4" 3.4" 60 100 degrees WITHIN 0.1% F.S. WITHIN 0.5% F.S. WITHIN 1% F.S. WITHIN 0.75% F.S. WITHIN 1% F.S. WITHIN 2% F.S. WITHIN 0.5% F.S.

Turntable Cylinder Series MGT

63, 80, 100 Series MGT Turntable Cylinder How to Order M 63 50 11 Y59A S S A93 MGT Table unit switch quantity Cylinder with turntable Table unit auto switch type S 1 pc.

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Available in 1/8 ~ 1 Tube Diameters, For All Body Series Class 100 Cleaning & Packaging Series LVQ HowT o Order LVQ 2 0 S 07 Body Class Space Saving Option Symbol 2 3 4 5 6 Body Class 2 3 4 5 6 Orifice Dia. 4 8 10 16 22 S Space saving connection Pilot Connection Nil M N LQ LQ Thread type 1/8 diameter 5/32 (4mm) NPT1/8 Diff. Dia.

KJ

Red 1 4 1 8 3 16 3 8 1 2 07 1 4 1 4 3 8 Nil VMG 09 5 16 11 3 8 1 2 13 1 2 Same dia. rod Same dia. tubing 1 8 tubing tubing 5 32 tubing 3 16 tubing 1 4 tubing 5 16 tubing 3 8 tubing 1 2 Model Male connector Straight Different dia. straight H Hexagon socket head male connector S F Female union Male elbow Elbow Plug-in elbow Reducer elbow 45 male elbow L K V VS VF LF VD VT Z ZD ZT W Universal

Tamper Proof and Flat Head Screw

SMC Pneumatics, Inc. 4 Series ASIII1F-T How to Order AS 2 2 1 1 F 01 06 S T Tamper proof type Body size Note) A special tool necessary for flow rate adjustment should be ordered separately. (Part no.: AS-T-1) 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard With sealant Note) Sealant is not provided for ports with M5 and 1032UNF threads.

E-P HYREG

Refer to Specific Product Precautions on page 1006. 990 E-P HYREG VY1 Series R Standard Specifications 0 1 0 1 0 1 VY110 01 02 0 1 0 1 VY140 0 1 VY150 0 1 VY170 0 1 20 VY190 0 1 VY1D00 M5 VY1A0 VY1B0 M5 VY120 01 02 VY130 02 03 Model 10 12 10 04 02 03 04 04 06 14 M5 01 Port 1(P) 11 2 Port size 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 1 M5 M5 2 2 M5 2(A) 1 4 3(R) Weight

3 Port Air Operated Valve Series SYJA300 1

Rc 1/8 Body ported 80 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 M5 x 0.8 130 (Without subplate 80) N.C. Base mounted (with sub-plate) SYJA724-01 SYJA724-02 N.O.