New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Connections AK3 AK4 4T 1/4 inch compression 4BR Rc 1/4 4BRN R 1/4 4 NPT 1/4 female 4N NPT 1/4 male 6T 3/8 inch compression Material Code Body material S 316 SS 6BR Rc 3/8 6BRN R 3/8 6 NPT 3/8 female 6N NPT 3/8 male Ports Code Ports 2P 2 ports Note) Only available with same type ttings inlet and outlet.

lVFl 10

Wl00-3-2 (s-sta.) Mounting screws: MT624-26 fincluded with manitold bar) Blank station kit: WFl00-02 Hol'VTO ORDER NVV3F1-30OO1 -01T-F ---T---_ T _ T I loptions | -None To order assembled manifold and valves: Ex.

Large Bore Compact Cylinder Series CQ2

Reed switch Relay, PLC 24V 2 wire Z80 No 5V, 12V 100V or less IC circuit Y59A Y69A 3 wire (NPN) IC circuit 5V, 12V P.10 Y7P Y7PV 3 wire (PNP) IC circuit Y59B Y69B 2 wire 12V Relay, PLC Solid state switch Y7NW 3 wire (NPN) Y7NWV Grommet Yes 24V Diagnostic indication (2 color indicator) 5V, 12V IC circuit P.11 Y7PW 3 wire (PNP) Y7PWV Y7BW Y7BWV 12V 2 wire Water resistant (2 color indicator

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

Front mounting Side mounting Series Variations Bearing type Bore size (mm) Standard stroke (mm) Model Slide bearing MGTM 63 80 25, 50, 75, 100, 125, 150, 175, 200 Ball bushing bearing MGTL 100 8-24-2 3 Cylinder with Turntable Series MGT 63, 80 100 How to Order MX MTS M 63 50 11 Y59A S S A93 MGT MY Table unit/ Number of auto switches CY Table unit/ Auto switch S 1 pc.

BP1000

Other than above: 3%F.S.

Series H, DL, L, LL Self-align Fittings

L-04 L-06 N-04 N-06 LL-04 LL-06 S-04 S-06 4 6 L-08 8 L-10 10 L-12 12 4 6 N-08 8 N-10 10 N-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 4 6 S-08 8 S-10 10 S-12 12 0.7 1.1 1.4 1.7 2.0 Precautions Be sure to read before handling. Refer to Air Fittings & Tubing Precautions for other details. Installation Caution Cut the tube to the required length.

PFxx-OMJ0005CN

09 L / 1 L 0.1 L/Pulse 0.1 L/Pulse 0.1 L/Pulse 1 L/Pulse -2 L/minCFM10 310 -1 Lft 4 1F.S.() 3%F.S 5F.S.(0.35 MPa ) 2F.S.(1535 ) 5F.S.(015 3550 ) -70750 kPa 1 MPa NPN PNP 80 mA DC28 V(NPN ) NPN 1 V (80 mA )PNP 1.5 V (80 mA ) 1 s(50 ms0.5 s2 s) 1.5 s 15 V 1 k 420 mA 600 DC24 V 50 5F.S. -54No.PF-OMJ0005CN-I PFM710 PFM725 PFM750 PFM711 ()30 ms 3F.S.() LED 3 7 2 (/) OUT1ON

CEx-OMQ0010

j k L 2. 7. 8. 1. 9. 2. 10. 11. ()70% ()35% 1. 15% 1. 2. 3 3. () 1. 0.1~1.0MPa 0.3~0.5MPa 0~60 ()35% 2. ) 1. 1. 2. 2. 3. 1. 1. ( 2. 6 ) 3. 2. 50% 4. (6 ) 3. 5. 4. () 0.5 5. 1 2 3. F.G. 1. 4. 1 ISO VG32 1. 2. 1. 2. 3. 1. 2 1. 2. 2. 14.5mT CE2 1.5~2 15,000 18cm 3. 4. IP65 5.

Free-Mounting Cylinder with Air Cushion Series CU

Mounting clearance (mm) Bore size (mm) 40 20 46 25 56 32 Clearance 6 Series CU Auto Switch Specifications Auto Switch Common Specifications Type Reed switch Solid state switch Leakage current None 3-wire: 100A or less; 2-wire: 0.8mA or less Operating time 1.2ms 1ms or less Impact resistance 300m/s 50M or more at 500VDC (between lead wire and case) 1000m/s Insulation resistance 1500VAC for

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

Note 6) : For thread type: NPT only 1075 A 1021-AR-B Regulator 1021-ARK-B Regulator with Backflow Function Standard Specifications 10-/21-AR20(K)-B 10-/21-AR25(K)-B 10-/21-AR30(K)-B 10-/21-AR40(K)-B 10-/21-AR40(K)-06-B 10-/21-AR50(K)-B 10-/21-AR60(K)-B Model Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 Pressure gauge port size 1/8 Air Preparation Equipment Pressure Control

Mini Free-Mount Cylinder Series CUJ: ø4, ø6, ø8, ø10

3.5 M2.5 x 0.45 effective depth 5 Element 3 Width across flats 8 Width across flats 3.5 9 10 7 4 9h9 19 7 2.5 2-3.3 through 2-3.3 through 19 + Stroke 13 + Stroke 6.5 + Stroke 3 13 7 Single acting 3 3 Built-in magnet/CDUJB6 [5.3] [Auto switch] Element [Approx. 24] 24 + Stroke 18 + Stroke 11.5 + Stroke 3 Single acting Rod end male threads M3 x 0.5 Width across flats 5.5 Width across flats

•

~:;:--l' VAC Vacuum load lock chamber Digital pressure switch Digital Pressure Switch Series ZSE6/ISE6 (For vacuum) (For positive pressure) Model 1~SV(S % F ,S, ) ".

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

In-line 3-wire (Equiv.

Compact Electric Actuator Series LG1

Servo malfunction indicator PL For power supply switching A surge killer should be attached to the electromagnetic contactor and relay. 5Ry Power supply OFF 1MC ON SUP 1MC 5Ry SGDE servomotor Motor 1 1MC SGDE servo pack R U V 2 M 1MC T 3 W 4 1CN 150 PULS 1 2 3 4 5 6 Be certain to ground.

Multistage Ejector (N)ZL Series

4 5 6 7 8 9 10 11 12 1 2 3 4 5 6 Time to reach vacuum [S] Time to reach vacuum [S] Viewing the graphs The graphics indicate the time required to reach a vacuum pressure determined by adsorption conditions for work pieces, etc., starting from atmospheric pressure in a 1l sealed tank.

Size: 1/2, Thread: M Thread, Rc(PT), Port Size: 3/8, Accessory: Float Type Auto Drain, N.O., Attachment: Pressure Switch, Option 1: Lubricator w/Drain Cock, Option 2: -, Option 3: -

Size: 3/8, Thread: F [G(PF)], Port Size: 3/8, Accessory: None, Attachment: Pressure Switch, Option 1: Lubricator w/Drain Cock, Option 2: -, Option 3: -

Size: 1/2, Thread: M Thread, Rc(PT), Port Size: 3/4, Accessory: Float Type Auto Drain, N.O., Attachment: Pressure Switch, Option 1: Lubricator w/Drain Cock, Option 2: -, Option 3: -

Size: 1/2, Thread: M Thread, Rc(PT), Port Size: 3/4, Accessory: D+G, Attachment: Pressure Switch, Option 1: Lubricator w/Drain Cock, Option 2: -, Option 3: -

Size: 3/8, Thread: M Thread, Rc(PT), Port Size: 3/8, Accessory: D+G, Attachment: Pressure Switch, Option 1: Lubricator w/Drain Cock, Option 2: -, Option 3: -