LEC-OM02704CN

0 H RX0F RX00 1 1 FROM E 1 H RX 1 F RX 1 0 M15 M10 M5 M0 E 2 H E 2 H R X F R X 0 0 0 0 0 0 0 0 0 0 0 0 0 0 1 1 RX 2 F R X 2 0 2 E 3 H 2 E 3 H RX 3 F RX 3 0 2 E4 H RX4F RX40 E5 H 3 RX5F RX50 M31 M26 M21 M16 15E H RX1F RX10 1 0 RX 7E F RX 7E 0 64 15F H RX 7F F RX 7F 0 . 1 Ready bit0 1 (1) M0(RD) M1(INP) M2(CPO) M3(ZP) M4(TLC) M5 M6(MBR) M7(PUS) M8 (MOF) M9 (COF) M10(

Vacuum System Peripherals:

e w q Nil None With vacuum switch t r e w q Number of ejector/valve stations E Alignment (for special specifications) U side D side 13-14-40 40 e Valve Model Fill in the blanks below with symbols of necessary specifications.

Rotary Actuator/Vane Type

Single vane Double vane 90, 100D 270S 180S 90S 1) e ot e g 1 n N 8 a 0 4 e g r + 2 n 7 a 4 n + 0 r + o n 0 5 0 4 N 0 ti o 0 9 ot a N ti 0 e t a e ot 0 1) o g t 1 e n e o R ) a 1 0 ot R r ) N 1 n o e 4 ti 0 + a g 0 t o n 9 R ra e n g n io ra (90) (90) at n io Chamfer ot Plate Plate Plate at R ot R Plate (45) Chamfer Chamfer Note 2) Chamfer (45) B port A port B port A port B port A port

Vacuum Unit

Pressure switch for vacuum assembly (With 2 mounting screws) ZK2 ZS A E A G M r Wiring t Other specifications Construction !

PSxx-OMV0008CN

*-L2-* ISE77G-*-L2-* ISE78G-*-L2-* 0x0135(309) 0x0140(320) 0x0141(321) 0x0142(322) 0x09 0x0A R Device ID 0x0B 0x016A(362) -67No.PS-OMV0008CN-E ISDU 1 (10 ) 0x0002 (2) 0 W (68 ) 0x000C (12) 0 R/W 0x0 (69 ) 0x0010 (16) 0 R SMC Corporation 0x0011 (17) 0 R www.smcworld.com 0x0012 (18) 0 R ISE70G-02-L2 0x0013 (19) 0 R ID ISE70G-02-L2 0x0014 (20) 0 R Pressure sensor 8 0x0015 (21)

ZP

Construction Series ZPT Series ZPR Series ZPY r Buffer r Buffer y Adaptor e Adaptor e Adaptor r Buffer t Adaptor Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com w Lock ring w Lock ring w Lock ring q Pad q Pad q Pad q Pad With buffer With buffer With buffer Component

JIS Standard Hydraulic Cylinder

2 @2 @4 t e !0 CH2G Series !3 @3 r @5 !

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

(E) shows the approximate dimension of the inserted tubing from the end of the nut. LVA Connection threads R/NPT Model L1 L2 H G F M N E B Applicable tubing O.D.

HEC_W-E

Temp. upper/lower 4 Fig.9-3 limit alarm occurrence 9-1 Alarm 9.2 Alarm indication Blink E R R 1 4 T h e r m o s t a t A l a r m M O D E < S h u t o f f Fig.9-1 Alarm indication in the event ERR14 arises Blink E R R 1 4 P B R a n g e M O D E < 2 . 0 C Fig.9-2 Alarm indication in the event ERR14 arises during PB range setting input Light W R N P V < 2 6 . 6 C # 1 S V 2 5 . 0 C M O D E N

Fieldbus System

r t No.

High Purity Fluoropolymer

SET POS. e Insert bushing G The tubing r may slip if there is oil or dust, etc., on the holder assembly y. Remove the contamination using alcohol or another suitable cleaner. Press the insert bushing e into the tubing r by turning the lever q.

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

o trtvzgzto "' J 9 4l|_\lb, 4l/_t_\lF FrpFr-*--lF, Base mounted type I Nvz33m N\a23340 FF ^.1T2-hn* ""rrr-h--w @ l / n r r n r \ 1 s @ 1 / t , , , 1 , \ t E E -FjFF--"lFt\Nzy2l Nvz3440 ".rnun n "^rriiTrnv t r E { / , l l , l t . \ t E \ r E l h t 1 , l , \ 1 r u . . . i F n : _ * w wz352o r.rvzgslT qTniin-Th^ qrzrti\-nv ?

ZP

Applicable pad 04U/06U/08U Applicable pad 10U/16U Applicable pad 25U/32U Applicable pad 40U/50U 4.9 30 R 30 R R 25 30 R R R R 10.5 9.5 2 8 9 25 R 2 0.5 6 7 7 8 R R R R R R 45 45 45 2.7 1 R R 2.5 4.5 5 6.6 R 2.5 3.8 4.9 3.5 5 6 7.9 R 4.5 8 9 11.7 11.7 Note) R part has to be smooth with no corners.

o

r r tr t: t; :r:'r : Tspe 41 Manifold: Side Ported,/ NVV5J3-41'E!sE@-M5,B3T inch (mm) Grommet(G). (H) ' ?

o

r r tr t: t; :r:'r : Tspe 41 Manifold: Side Ported,/ NVV5J3-41'E!sE@-M5,B3T inch (mm) Grommet(G). (H) ' ?

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

r r tr t: t; :r:'r : Tspe 41 Manifold: Side Ported,/ NVV5J3-41'E!sE@-M5,B3T inch (mm) Grommet(G). (H) ' ?

Title not found

o trtvzgzto "' J 9 4l|_\lb, 4l/_t_\lF FrpFr-*--lF, Base mounted type I Nvz33m N\a23340 FF ^.1T2-hn* ""rrr-h--w @ l / n r r n r \ 1 s @ 1 / t , , , 1 , \ t E E -FjFF--"lFt\Nzy2l Nvz3440 ".rnun n "^rriiTrnv t r E { / , l l , l t . \ t E \ r E l h t 1 , l , \ 1 r u . . . i F n : _ * w wz352o r.rvzgslT qTniin-Th^ qrzrti\-nv ?

Direct Solenoid

&tlct 02 = NVSa024 I 0S=rr0/l2OV6C}{r 03 = NvS403a | 10-26n40v&tu 04 = NVSi044,NVS{05a I r' = 460/130 v 6OHz I 5r r? \bh D.c' Numhr.rlEftl. 52 2. \e{ D C. 0d onel'grr 5.r 1 rr3 lbn o ( e-loTl -I Pilor Ahrs are a toubreshoorinq a'd and aG conneded In p3r4&l wirh rh sorenoid coi 3oihey riqhr when rhe sorenod ooirreads aG L:r.aa-ro'.-"ra.lr.

Air Pilot Operated Series NVSA

>Aiv EJ E) =:-:H8 I 10 l 1 I : i/b.a $n a ltfllon!. @nl6l t dory. DITENSIONS A B c D E F o H J t( T N o P B s r u 3.43 (87) 2.

-fl Seies

i,e, l 4s -s 1t^:!!-% , , ",",""" 1l-,:e!"6 ,tL--!9!!",qL+r |L-.!.S!"jqt+r , _^99!j,, r , .-i9!3r r-) tL--sq:L,d r+ ,_!t, r I 5.d"." 1l^:eqBi5, , lL--9s!L,. r+l ,.i9!4rr t I L_l-g!!",o r+l .-^AAr r L.^t9!3, , , ,..' ".' lt+e!',' L , .sL-.1f.:q%,1 , tL jq!"s L+, tLl9!"s L+l ,-;e!j., /..js!i2'L r . , , , , " " , 1 1 + n " , , r 6 * , . " , 1 f 4 : e ! 3 q , , t l ! g ! !