Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

How to Order JSXZ 3 1 C N 02 R 5 G D B w y e r t u o !

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<)Gf S flats 1 " ,1 1 5 ' C ~ ~! ~ ;C !_8_ (mm) , A , 8 ' .. ---.t! R at type Flat with rib , I Mqde~ . > Il. 9, Y .C Rat type (mm) y . H :M6)$1 . ..Ii:M8'Xl . i ,8 0 MOOsl M E F I . , 1 .F!a, >C I E F I G. r '.e G lit"'" lb.

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ro 40mm cn y q c k r l o B e .

Fluoropolymer Piping Equipment

TD TID TH TIH Dimensions Space saving union elbow reducing: LQ1E-SS-R M2 B side B (L2) H2 M1 C A side SMC 6 (E) H1 C L1 1 25 Class 6 Class 2 to 5 Metric Size Inch Size A side B side Model A side B side B C E H1 H2 L1 L2 M1 M2 Min. port size B C E H1 H2 L1 L2 M1 M2 Min. port size Applicable tubing O.D. Applicable tubing O.D.

TABLE OF CONTENTS

Body Brass Body Hydrolic Oil Non-Flammable NR NR NR NR Standard R R R R Hydrochloric Acid NR NR NR NR Hydrogen R R R R # Inert Gases R R R R JP4 JET Fuel V V V V JP5 JET Fuel V V V V Kerosene R R R R Ketones PP NR PP NR Lacquer PP PP PP PP Linseed Oil R R R R Lubrication R R R R Mercury R*** NR R*** NR Natural Gas R R R R Nitric Acid PP NR PP NR Nitrogen R R R R Oxalic Acid NR NR NR NR Oxygen

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

16.2 20.2 36.2 44.2 56.2 64.2 1.5 1.5 1.5 1.55 1.55 2.05 2.55 2.55 0.7 0.7 0.9 1.15 1.15 1.15 1.35 1.35 0.030 0.060 Type C 5 for axis 0.030 0.060 Type C 8 for axis 0.040 0.076 Type C 10 for axis 0.040 0.076 Type C 10 for axis 0.040 0.076 Type C 14 for axis 0.050 0.093 Type C 18 for axis 0.050 0.093 Type C 22 for axis 0.065 0.117 7-6-20 21 Accessory Bracket Series CQ2 Simple Joint: 32 to

Modular F.R.L. Unit

Note 3) Bowl assembly for AL30 to AL60 comes with a bowl guard (steel band material). 52 AL10 to 60 Dimensions AL10 AL20 L D Bracket (option) G F Port size K M A Port size C B R C J H OUT OUT IN OUT OUT IN B R P Min. clearance for maintenance Min. clearance for maintenance A AL50, 60 AL30, 40 L D D L Port size Bracket (option) Bracket (option) G F G F Port size M K M K E J C B R C B R H J

SYJ3000/5000/7000

R P R port P Base mounted P port Type 32P Individual EXH spacer assembly R port A, B port R2 R1 -+ -+ R port R P A, B port Mixed mounting of 3 port valves and 4, 5 port valves P port 3 port valve 4, 5 port valve Interface regulator -+ -+ A B R port R P A, B port P port -+ -+ A B R P -+ -+ A B B R port R P For detailed specifications about SYJ3000, refer to page 1-5-17.

LEC-OM07605CN

PC_ _ ]) PC01 ERZ 0 [rev] PC02 MBR 0 [ms] PC03 *ENRS 0h PC04 **COP1 C-1 0h PC05 **COP2 C-2 0h PC06 *COP3 C-3 0h PC07 ZSP 50 [r/min] PC08 OSL 0 [r/min] PC09 MOD1 1 0h PC10 MOD2 2 0001h PC11 MO1 1 0 [mV] PC12 MO2 2 0 [mV] PC13 MOSDL 0 [pulse] PC14 MOSDH 0 [10pulses ] PC15 0 PC16 0h PC17 **COP4 C-4 0h PC18 *COP5 C-5 0h PC19 0h PC20 *COP7 C-7 0h 5 5 5.

2/3 Port Valve

VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 A J Q B T K R C U S D V E W F X H Y N.O.

MY1

Data MY1B16 to 100 MY1M16 to 63 MY1C16 to 63 MY1H16 to 40 L L R L L L L R R R R R L R R L Note 2) Note 2) R R L L O-ring L R Slide table operating direction Piping tube Note 2) For bottom piping, refer to the figure above.

Vacuum System Peripherals:

C1 Model (Stock item) Pressure range Note) Model Unit Connecting Note (kPa) GZ46-K-01 to 02 100 to 0 1 8 1 8 1 4 kPa R , kPa With covering assembly GZ46-K-01 to 02-C, C1 100 to 0 R ,1 4 1 8 1 4 kPa GZ46-K-01 to 02M 100 to 0 GZ46-K2K-01 to 02 100 to 200 R , M5 (Female thread) kPa GZ46E-K-01 to 02M 100 to 0 1 8 1 4 R , M5 (Female thread) R , 1 8 1 4 kPa Note) Do not apply pressure that exceeds

Shock Absorbers and Rate Controls

(SMAII BORE} UFM10 x t ) UF r/220 uF s/16 18 + UF I-72 [ ' Dtr_ C l' I j rIl l l T F I r H o .L 8 a.22 & _l -! g.3t g 1 R r I -1 .2( 20 F G (otolog llo.

LJ1H

F R L T B 1 R Axial entry Right entry 200/230VAC (50/60Hz) 2 Y 0 Without motor Bottom entry Specifications Intermediate strokes 100 5.1 200 5.9 300 6.7 400 7.4 500 8.2 5 to 40 (with no condensation) 10 225 400 mm kg C kg N mm/s mm Standard stroke Strokes other than the standard strokes on the left are available by special order. Consult SMC.

VFS

(Values at the initial period) Note 4) Based on JIS C 0920. Note 5) Based on JIS C 4003.

Table of Contents

1/8 23.4 27.4 39.8 45.8 17.6 14 R 1/4 25.4 31.4 39.8 45.8 17.6 12 R 1/8 26.7 30.7 45.3 52.8 24 14 R 1/4 28.7 34.7 45.3 52.8 24 17 R 3/8 30.4 36.7 45.3 52.8 24 17 R 1/4 33.8 39.8 49.6 55.6 30 17 R 3/8 35.5 41.8 49.6 55.6 30 22 R 1/2 37.6 45.8 49.6 55.6 30 Dimension with cover Reference dimension of R thread after installation.

7

3 VXS r !3 IN(P1) r OUT(P2) VXB B A OUT(P2) A B VXE IN(P1) C C IN(P1) e e q w VXP q w VXD2A VXD2B VXR !4 i VXH !4 u u !0 VXF A B !1 i VX3 !2 !0 !2 VXA o !1 t !3 o OUT (P2) w IN(P1) !3 B r OUT(P2) A r IN (P1) e C e IN(P1) C q w q VXD2E, 2F, 2G VXD2C, 2D Component Parts Operation When coil !

CQ2

Both ends tapped(mm) Standard (Through-hole)/CQ2WB, CDQ2WB Bore (mm) O1 R Both ends tapped: CQ2WA 32 40 50 M6 X 1.0 10 O1 thread R R M6 X 1.0 10 M8 X 1.25 14 2-H thread effective depth C (Opposite side, too) 2-P (Port size) U 4-N through Q Q 8-O counter bore 1 2 width across flats K 11 Lead wire minimum bending radius 10 D D 22 Z M E Auto switch K M L B L+ stroke D-A7, A8 E J S A+stroke

Rotary Actuator

R R ot ot of e g k n e ra at at y w n io io CRQ2 a io y n n at A 1 n ra gl ra ot 8 e A a A 0 n n R dj n n g gl g gl u e st e e e in a a of of dj dj g MSQ k k u u di st st e e r y y in in e w w ct g g Angle adjusting screw a a io di di y y MSZ n r r 9 9 e e 0 0 c c ti ti o o CRQ2X MSQX n n MRQ Angle adjusting screw Angle adjusting screw The rotation range under the adjustment of an angle

HEC_W-E

Sensor (Ex. : -0.07 C) Function : Sets the fine adjusting value to calibrate the internal temp. sensor. If -0.07 C is set in this item, the reading of temp. sensor is higher by 0.07 C and actually, the temp. is controlled to lower one by 0.07 C. F i n e C o n t r o l o f E x t e r n a l S e n s o r M O D E < 0 . 0 5 C 2.