High-Precision Digital Pressure Switch

Piping Applicable fluid Series Output type Enclosure Copy function 1/4 (R, NPT, G) (URJ*1/TSJ*2) M5 female thread 1/8 (R, NPT) ZSE20(F)/ ISE20 1 output IP40 U U p. 7 ZSE20A(F)/ ISE20A 2 outputs New New Analog output (Voltage/Current) IP40 U U Air p. 9 ZSE20B(F)/ ISE20B 2 outputs New New Analog output (Voltage/Current) IP65 U U U p. 11 ZSE20C(F)/ ISE20C(H) 2 outputs General fluids New

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

2 ZY Dimensions: 10 mm Stroke A B (mm) J H F D C E A B I Model ZQ ZPR10F10-0-A10 10 12.5 39.5 10 12 23.4 50.5 84.5 With a stroke of 10 mm ZPR13F10-0-A10 13 15 23 ZF 10.5 13 40 23.9 51 85 ZPR16F10-0-A10 16 18 ZP S (mm) M14 x 1 ZCU Q: 4 Q: 6 Y Model R S R S Hexagon width across flats 19 AMJ ZPR10F10-0-A10 1.5 I 5 ZPR13F10-0-A10 10.4 20.6 12.8 21.6 Misc. 2 ZPR16F10-0-A10 Additional Dimensions

Air Cylinder CP Series Cylinder Positioner Assembly

28 {58) 1961 8.35 1212\ 2.05 ts2) 11.2\ 2.AO (66) 803 8 6 6 :220\ 4.O2 (l 02) 307 t7B) 0 9 3 (25) 2.05 (s2) 0.55 (14) 0.83 t 2 1 l n 1 2 t 1 7 a 1.43 i.B9 M2211.51.46 137) c 7 9 (201t 1 r 6 l 1 . 1 0 (24) 1 24 :8;li' 3 r . 5 : l i i I 2.80 (71) 9.25 (235) 1 0 0 9 (25s) 2.56 (65) 0.49 r 2 5 ) 3 . 1 5 (80) 9 6 1 1244\ t0.39 :264\ 1 5 7 t 1 1 6 ) 3 6 2 t92l 0 9 8 (30) 2.05 (52) 0.83 i21l n 1

Modular/F.R.L. Units Series AC

THREAD W M R C G J Q P K N 2 A Bowl Detail U (AF20) H L E IN OUT D Bracket (Optional) Note: Sight glass not applicable to AF20.

2/3 Port Valve

2 i P2: Pilot EXH port P1: Pilot SUP port !0 e e u u r !1 i r t !1 !0 P Port A Port P Port A Port t q q o o w VX y w VN VQ B Port <3 port valve> <2 port valve> Component Parts Operation principles No.

High Vacuum Angle Valve, XL Series

XLFV/With solenoid valve J M N Port P (pressure port) K L R P (mm) Port R (exhaust port) M 3 3 3 4 4 4 L 8.5 8.5 8.5 12 12 12 K 13 14 23 23 29 39 J 16.5 16.5 17.5 28 29 29 N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 3 3 3 2 2 2 Other dimensions are the same as XLF. 15 Series XLG, XLGV Double Acting/O-ring Seal Air Operated Type How to Order XLG 16 F9N High vacuum angle valve

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

1 TMH r r !2 ASD !2 q q AS y !3 w y t AS-FE w i t KE o AS-FG AS-FG i !0 u AS-FP !0 o e AS-FM !4 u Meter-in type Meter-out type AS-D e Seal method: Face seal For G thread AS-T Meter-in type Meter-out type ASP !1 ASN r !2 AQ q w ASV y t AK i VCHC o ASR ASQ !0 u !5 e Meter-out type Meter-in type Component Parts No.

Electric Actuator

Step 1 Step 2 Check the cycle time.

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HRS PF001 W075 H Table 2 Symbol Accessory Nil None H With handle u Table 1 Symbol Nominal filtration accuracy (m) Replacement element part no. for L125 (individual part) Nil Without element W005 5 EJ202S-005X11 W075 75 EJ202S-075X11 y e 204 R1/2 r i NPT1/2 NPT1/2 NPT1/2 t Mounting view Rc1/2 w q Parts List No.

NVZseies

22tn-f,g 85PSl VAC -55PSl R A 0.034 0.034 Note IncaseofNV1l20 supplyarlo R porl.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

2 !2 !3 !3 !4 !4 !5 !5 M5 port M5 port y y u u !7 !7 q w e r t q w e r t o o !0 !0 !1 !1 i i !4 !4 !2 !2 !3 !3 !6 !6 Component Parts Description Material Description Material No.

3 Port Solenoid Valve

Refer to back page 2.)

IDX-OM-W093

ADH-E400 1.6MPa 0.051.6MPa 3/h 0.024m 0.7MPa IDF60/70/80/90 Series 10-1 IDX-OM-W093 L 10.3 Rc1/225 30 5 IDF60 2722IDF70IDF80IDF90 22 IDF60 (IDF70/80/90) 1) 2830Nm 2) 10.4 1 1 IDF60/70/80/90 Series 10-2 IDX-OM-W093 R 11 R R (GFCI) 11.1 11.2 IDF60-20-R IDF70-20-R IDF80-20-R IDF90-20-R (A) 10 15 20 30 (mA) 30 IDF60-30-R IDF70-30-R IDF80-30 IDF90-30 (A) 10 15 20 (mA) 30

Stainless Steel 316

Note 2) Figures shown when using FEP tubing 2 Applicable tubing: Metric size/Connection thread: M, R Series KQG Stainless Steel 316 One-touch Fittings Dimensions Union Elbow: KQGL 2 x Applicable tubing Effective area Note 2) (mm2) N M Q2 Q1 A L Note 1) Applicable tubing O.D.

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2 @1 @2 w r Description Replaceable kits list Component parts No.

Electric Actuators

3 q u r y o !4 Nickel plated 8 Bearing stopper Motor plate Guide ring Bearing Bushing Soft wiper Anodized Size 10 only 9 10 11 12 13 !2 e w i !1 t !

KS/KX

(mm) 8 6 4 Model 10 12 Connection thread Male connector KSH KXH M5 x 0.8 M6 x 1 1 8 R K R 1 4 M R 3 8 H R 1 2 Male elbow KSL KXL D M5 x 0.8 M6 x 1 MS R 1 8 T R 1 4 VMG R 3 8 R 1 2 Precautions Be sure to read before handling.

CKZ2N

2 y i w r !1 Replaceable Kits List !2 !1 !0 o i u y t r e w Switch actuator q Contents Kit no.

53

Applicable model Minimum operating flow rate [L/min] HRS-BP005 HRSH090-ll-l 20 r t r e q To circulating fluid outlet r t w r Parts List No.

Electric Rotary Table

2 2 2 Note 2) Home position (Stroke end) 90 90 L 0 E 1 R 3 1 / 0 180 L 0 E T 2 R 3 3 / a 0 0 5 , bl 1) e e ot o N p er e g at n in ra g The figures show the origin position for each actuator.