Type: 3 [Standard, 100 â„“/min (ANR)], Port Size: 2N (NPT1/4), Digital Flow Switch: P5 [NPN Open Collector,1 Output+Analog Output (4 to 20mA)], Regulator: R1 (w/Regulator+Pressure Outlet Port Assembly), ON/OFF Valve: V1 (With Air Operated Flow Adjuster), Restrictor: S (With Restrictor), Filter: F1 (With Filter w/Differential Pressure Indicator)

Style: HT (Double Axis Type), Size: 32, Motor Mounting Position: L (Symmetric, Top Mounting), Stroke: 250, Motor Option: w/o Option, Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 1 (1.5m), Controller Type - LEC, JXC: 2N [LECP2, Programless Type (w/Stroke Study), NPN], I/O Cable Length for LEC: 1 (1.5m)

Style: HT (Double Axis Type), Size: 32, Motor Mounting Position: L (Symmetric, Top Mounting), Stroke: 150, Motor Option: w/o Option, Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 1 (1.5m), Controller Type - LEC, JXC: 2N [LECP2, Programless Type (w/Stroke Study), NPN], I/O Cable Length for LEC: 1 (1.5m)

Style: HT (Double Axis Type), Size: 32, Motor Mounting Position: Top Mounting, Stroke: 100, Motor Option: w/o Option, Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 1 (1.5m), Controller Type - LEC, JXC: 2N [LECP2, Programless Type (w/Stroke Study), NPN], I/O Cable Length for LEC: 1 (1.5m)

Style: HT (Double Axis Type), Size: 32, Motor Mounting Position: L (Symmetric, Top Mounting), Stroke: 100, Motor Option: w/o Option, Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 1 (1.5m), Controller Type - LEC, JXC: 2N [LECP2, Programless Type (w/Stroke Study), NPN], I/O Cable Length for LEC: 1 (1.5m)

Style: HT (Double Axis Type), Size: 32, Motor Mounting Position: Top Mounting, Stroke: 250, Motor Option: w/o Option, Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 1 (1.5m), Controller Type - LEC, JXC: 2N [LECP2, Programless Type (w/Stroke Study), NPN], I/O Cable Length for LEC: 1 (1.5m)

Type: 3 [Standard, 100 â„“/min (ANR)], Port Size: 2N (NPT1/4), Digital Flow Switch: P2 [PNP Open Collector,1 Output+Analog Output (1 to 5V)], Regulator: R (With Regulator), ON/OFF Valve: V (With Air Operated), Restrictor: Without Restrictor, Filter: F (With Filter)

VV5Q* NO SIZE RATING. 1.45794 lb. 2N.

SS5Q1 NO SIZE RATING. 2N.

VV3Q*. .40785 lb. 2N.

NEW SY3000 MFLD,NO SIZE RATING. 1.63515 lb. 2N.

NEW SY3000 MFLD,NO SIZE RATING. 1.63515 lb. 2N.

NEW SY3000 MFLD,NO SIZE RATING. 1.59722 lb. 2N.

NEW SY3000 MFLD,NO SIZE RATING. 1.59722 lb. 2N.

NEW SY3000 MFLD,NO SIZE RATING. 1.38733 lb. 2N.

NEW SY3000 MFLD,NO SIZE RATING. 1.63515 lb. 2N.

VV3Q*. .75460 lb. 2N.

SS5Q1 NO SIZE RATING. 1.76369 lb. 2N.

1

Supply pressure normal Supply pressure drop Supply pressure increase Normal filled pressure Insufficient filled pressure Excessive filled pressure P1 n1 n2 Vacuum Set value n1 n2 P1 Set value P2 n1 n2 P1 P2 P2 Time Normal mode Operating normally Operating normally Operating normally ON Time Reverse mode ON OFF Time OFF Time AUTO-SHIFT terminal When the Auto Shift Function is used.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Seal material and its changed part Seal material Part numbers indicating changed seal material and leakage Leakage Pa m3/s or less Note 1) Compound No. 1349-80 Symbol Nil N1 Seal material FKM EPDM BARREL PERFLUORO Changed part Note 2) Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 2101-80 2, 3 2 3 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x