Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

.: 3.2 : 4 : 6 Thread size: M5 L n Formula L1 = 11.5n + 55.5 L2 = 11.5n + 73 n: Stations (Max. 24 stations) Dimensions 24 331.5 349 375 385.5 23 320 337.5 362.5 373 22 308.5 326 350 360.5 21 297 314.5 337.5 348 20 285.5 303 325 335.5 19 274 291.5 312.5 323 18 262.5 280 300 310.5 17 251 268.5 300 310.5 16 239.5 257 287.5 298 15 228 245.5 275 285.5 14 216.5 234 262.5 273 13 205 222.5 250 260.5

Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

218 218 241 241 277 334 AMH150 40 40 50 50 55 55 65 85 AMH250 AMH350 AMH450 AMH550 AMH650 4.6-19 Micro Mist Separator with Prefilter Series AMH Dimensions: AMH850 Accessory D: With auto drain (N.O.) for AMD850 Options T: With element service indicator HAl AT IDl AMG AFF AMl Related poroducts Model Port size (Nominal size B) A B C D E F G Dimensions with mounting bracket 460.5 AMH850 42 348

5 Port Air Operated Valve Series VFA3000 1

Not required Lubrication Mounting orientation Free Impact/Vibration resistance (m/s2) Note) 300/50 Note) Impact resistance: No malfunction from test using drop impact tester, to axis and right angle directions of main valve, each one time when pilot signal is ON and OFF .

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IDG60M, IDG100M are fitted with AMH micro mist separator with pre-filter. 1.77 3.53 5.29 Flow Flow Flow 10 25 50 100 200 300 500 600 750 1000 110 170 240 300 100 150 75 50 Single Type 76F (60C) Dew point Single Type 40F (40C) Dew point Single Type 4F (20C) Dew point 3.53 5.29 8.02 11.3 14.12 2.72 5.44 8.29 0.44 1.09 2.19 4.41 8.83 13.24 22.07 25.6 31.78 42.02 Model Inlet Model Inlet Model

Low Friction Cylinders Metal Seal Type

(MQQL/MQML) Series Variations Series MQQ Compact low friction cylinders designed for low pressure, low speed, uniform speed or low friction applications Series Bore size (mm) Stroke (mm) Operating pressure range (MPa) Actuation speed (mm/s) 10 20 30 40 50 60 75 100 10 16 20 25 30 40 MQQT Standard type 0.005 to 0.5 0.3 to 300 MQQL Lateral load resisting type (Built-in ball bushing) 0.005 to

Large Type Vacuum Unit Series ZR

/60Hz) L Lead wire length 0.3m D2 110VAC (50/60Hz) Plug connector type LO Without connector M Lead wire length 0.3m MO Without connector Series ZR How to Order Vacuum Pump Systems ZR100 M Z 5 K1 D1 25 Supply valve/Release valve combination Supply valve Symbol Release valve Double SOL.

AC Servo Motor Driver (MECHATROLINK-II type)

Note: The 24 VDC external power supply capacity must be 50 mA minimum. The DRIVERs input circuit uses bidirectional photocoupler. Select either the sink circuit or the source circuit according to the specifications required for each machine. Note: The connection example in 2.3 shows sink circuits.

IDX-OM-W020

1 . 8-1 8-2 . 8-1 9 R 9-1 . 9-1 9-2 . 9-1 9-3 . 9-1 10 S 10-1 . 10-1 10-2 . 10-1 11 T 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-3 12 V 12-1 . 12-1 12-2 . 12-1 12-3 . 12-2 13 13-1 . 13-1 IDFB Series 2 IDX-OM-W020 i i i 1 () OFF 3 ON OFF i 1 1 3 i-1 IDFB Series i 1 IDX-OM-W020 i i 2 5 i 2 1 i-2 IDFB Series i 2 IDX-OM-W020 i i 2 2 i 2 3 50

ø32, ø40, ø50, ø63 Series CVQM Compact Cylinder with Solenoid Valve/ Guide Rod Type

Compact Cylinder with Solenoid Valve/ Guide Rod Type 32, 40, 50, 63 Series CVQM How to Order CVQM 32 30 M9BW 5 M Port thread type 32 40 M5 x 0.8 Bore size 32 40 50 63 Nil 32 mm 40 mm 50 mm 63 mm Rc G NPT 50 63 F N Piping Nil P Standard Axial Cylinder stroke (mm) Refer to the next page for Standard Stroke and Intermediate Stroke.

IC

Input Minimum pulse width: 50 msec wInput method: 4 point input with keys (Interval time can be set by programming.)

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

SQ2000 20 ms or less Cylinder Speed Chart Pressure: 0.5 MPa/Load factor: 50% Flow Characteristics Note) Series CJ2 6 10 16 20 25 32 40 Series CM2 Bore size (mm) Base mounted Average speed (mm/s) Metal seal Rubber seal C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 800 700 600 500 400 300 200 100 0 Perpendicular, Upward actuation Horizontal actuation SQ1000 0.63 0.11 0.14 0.80 0.20 0.19 800 700

Thomas oil-less linear diaphragm compressor / vacuum pump, 230/50/1 Flow Rate: 12.5 LPM , 12.5 LPM, Max Pressure: 4.35 PSIG / 121 in H20 / 300 mbar , 4.35 PSIG / 121 in H20 / 300 mbar, Max Vacuum: 10.3 in HgV / -350 mbar , 10.3 in HgV / -350 mbar, Voltage (50 Hz): 230, Frequency (Hz): 50, Phase: 1-phase, Item Dimensions: Length: 4.21 in / 107 mm Width

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Made to Order (Refer to page 549 for details.) 548 Series AS-FG Speed Controller with One-touch Fitting Stainless Steel Series In-line Type How to Order AS 200 1 F G 06 Lock nut option Nil J Hexagon lock nut Round lock nut Body size 100 200 205 300 400 AS M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard Made to Order (Refer to the below for details.)

Low torque Metal seal type Rotary joint

.: If adjacent ports are connected to positive vacuum pressure of -0.1 MPa and 0.1 MPa in MQR12, then differential pressure is 0.2 MPa, and leakage is 300 (cm3/min). 1000 (300) 0 0 0 . 1 0 . 2 0 . 3 0 . 4 0 . 5 0 . 6 0 . 7 0 . 8 0 . 9 1 Differential pressure [MPa] Change in rotational torque with rotation speed Temperature rise with rotation speed 0.4 30 MQR4 MQR2 MQR1 Temperature rise [C

Scale Cylinder & Counter Series CE

DATA OUT 1 2 3 SET 1 2 SET MONOSASHI-KUN AC100V OUT1 COM OUT2 COM COM OUT3 Series Guide Series CE1 Bore size (mm) Available stroke range Standard stroke (mm) Series CEP1 Standard stroke (mm) Bore size (mm) 12 equiv. 250 400 500 300 175 200 150 125 100 75 50 100 25 75 50 25 12 25 to 150 20 equiv. 20 25 to 300 32 25 to 400 40 25 to 600 50 25 to 600 63 25 to 600 CEU1 CEU5 Output transistor system

Mechanical Valves Series NVM, NVFM, NVZNI

Cycle Rate 300 cPM Weight (Valve Body Only) oz. (o) 5.1 (144.6) 10.3 (292) Materials Patented Spool and Sleeve Design High Flow vs.

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

283 13.5 13 14 15 16 360.5 350 331 14.5 373 362.5 347 13 323 312.5 299 12 348 337.5 315 16.5 50

AC Servo Motor Driver (MECHATROLINK-III type)

Note: The 24 VDC external power supply capacity must be 50 mA minimum. The DRIVERs input circuit uses bidirectional photocoupler. Select either the sink circuit or the source circuit according to the specifications required for each machine. Note: The connection example in 2.3 shows sink circuits.

ZB-OM00301

A-C ON OFF 10msec ON 10 A B OFF 50 A B 10 1 50 3 3 24 - No.ZB-OM00301 ZB / / Assy /HNBR Assy //HNBR 25 - No.ZB-OM00301 2 ()() 5kPa () ZFAZFBZFC ON ZB1-VQ110U N.C (0.3 0.4 0.5 0.6) ZB1-VQ110L (0.30.4) ZB1-VQ120U N.C ZB1-VQ110N.C.

Bore sizes: 25, 32 40, 50, 63 mm; Stroke lengths: 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 mm; Maximum stroke length: 1300 mm (25, 32, 40, 50 & 63 bore); Minimum operating pressure: 0.18 MPa (26 psi); Speed: 50 ~ 300 mm/sec.