VVX31/32/33

AC, DC C.O. 7.5 55 6 45 50 42 18 60 37 12 AC Cv converted Av x 10 6 (m 2 ) VX32 AC (Full wave rectification) 50/60 10 8.5 60 1 3 5 0.08 1.5 1.0 0.6 220 1.9 VX311 -00 DC 8.5 60 11 60 9.5 50 1 3 5 0.16 0.5 0.3 220 3.8 VX312 -00 50 55 22 60 47 18 AC 0.6 370 VX3225-00 2.2 0.19 4.6 VX33 1.0 530 VX3325-00 AC (Full wave rectification) 50/60 14 11.5 60 1 3 5 0.24 DC 11.5 60 0.3 0.2 5.8 220 1.0

SFOD-OMT0005CN

Movement Speed Position Acceleration Deceleration Area 1 Area 2 In pos force Force speed force 2 2 mode mm/s mm mm/s mm/s mm mm mm Value mm/s 0 1 Absolute 100 100.00 1000 1000 50 40 10 100 0 0 5 2 Absolute 50 50.00 1000 1000 0 0 0 100 0 0 0.1 () (1)No.

JXCx-OMT0061CN

(OUT05)OFF 11INPOFF ... 12BUSY ON 0mm 50mm 60mm 100mm 5 13DRIVEOFF 14No.2 ON (OUT1ON) 15INPON 16BUSYOFF 10mm 57 - 13.2 100mm/s 100mm (No.1 ) 100mm ,10mm/s 50% 5mm (INPON )50mm/s 50mm (No.2 ) No. 1 2 2 2 mm/s mm mm/s mm/s mm mm mm mm/s 0 1 ABS 100 100.00 1000 1000 50 40 10 100 0 0 5 2 ABS 50 50.00 1000 1000 0 0 0 100 0 0 0.1 () 1No.1(IN0ON) / 2DRIVEON (2)(5)(10)(13) No.1

For Water, Oil, Steam, Air

N.O. 1/4 to 2 32 A to 50 A 10 to 50 N.C. N.O. 1/4 to 1 32 A to 50 A 10 to 50 Series VXA21/22, VXA31/32 Series VNC For Air, Vacuum, Water, Oil Air Operated 2/3 Port Valve Cutting Oil, Coolant for Machine Tool, etc. Coolant Valve Valve type Port size Body Seal Cast iron NBR N.C. N.O. C.O. Valve type Model Port size Body Seal N.C.

VCC

(C) Ambient temperature 5 to 50 Lubrication Not possible (Initial lubricant: White vaseline is used.)

PFxx-OMP0001CN

1 [ L] L/min [Uni] [oU1] OUT1 [HYS] [1ot] OUT1 [1_P] [ 250] 250 L/min(PFMB7501) [P_1] OUT1 [ 500] 500 L/min(PFMB7102) [F 1][oU1] [1000] 1000 L/min(PFMB7202) 28 [ 25] 25 L/min(PFMB7501) [H_1] OUT1 [ 50] 50 L/min(PFMB7102) [100] 100 L/min(PFMB7202) [CoL] OUT1 [SoG] ONOFF [oU2] OUT2 2 [HYS] [2ot] OUT2 2 [2_P] [ 250] 250 L/min(PFMB7501) 2 [P_2] OUT2 [ 500] 500 L/min(PFMB7102) [F 2][oU2]

MHS

6 8 8 12 16 g 66 110 154 300 390 590 1,095 1) 1625 L=20mm 3263 L=30mm 0.5MPa 4 MHSJ3 MHSJ316D MHSJ320D MHSJ325D MHSJ332D MHSJ340D MHSJ350D MHSJ363D MHSJ380D mm 16 20 25 32 40 50 63 80 MPa 0.20.6 0.10.6 -1060 mm 0.01 c.p.m. 120 60 30 9 21 36 62 97 155 280 400 1 N 16 28 47 82 130 204 359 525 mm 4 4 6 8 8 12 16 20 g 95 150 230 440 620 1,050 1,800 3,200 1) 1625 =20mm 3263 =30mm 80 =50mm

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25 Bore sizes (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Shock absorber (optional

IDX-OM-W023

R T 600mm 1 10% () ( 60cm 1 ) 10% 3 IDU Series 5-1 5 1 IDX-OM-W023 5 () 60cm 1 2 INOUT INOUT () IDU Series 5-1 5 2 IDX-OM-W023 6 6-1 IDU8E-10/20 IDU11E-10/20 IDU15E1-10/20 50Hz 1.1 1.5 2.6 3/min (ANR)1 m 60Hz 1.2 1.7 2.8 0.7MPa 55 32 10 580 0.151.0MPa 240 (85%) AC100V 50/60Hz AC100/100110V10%(4) AC200V 50/60Hz AC200/200220V 10%(4) AC100V 50/60Hz 3.4/3.5 5.7/6.0 4.6

Direct Solenoid

T|lULTI'PURPOSE APPLICATIONS FOF USE AS: PORT'A' PORT "P" PORT "E'' Opg.ltng PrEsluEr 28" vacuum to 300 PSIG. (2oKgtcflf) 2-Way Normally Closed O!

Air Cooled Aftercooler Series HAA 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2 to 50 Indoor Three phases 200 VAC (50/60 Hz) Three phases 200 VAC (50/60 Hz) Single phase 100 VAC (50/60 Hz) Single phase 200 VAC (50/60 Hz) Single phase 100 VAC (50/60 Hz) Three phases 200 VAC (50/60 Hz) Power source 90 130 0.4 0.45 1.44 1.4 50 60

180 ° Angular Type Air Gripper Rack & Pinion Type MHW2 Series ø 20, ø 25, ø 32, ø 40, ø 50

180 Angular Type Air Gripper Rack & Pinion Type MHW2 Series 20, 25, 32, 40, 50 How to Order M9BW 20 MHW2 D 1 Made to Order Refer to page 712 for details. 2 fingers Number of fingers 2 Number of auto switches Bore size 20 25 32 40 50 Nil 2 pcs. 20 mm 25 mm 32 mm 40 mm 50 mm S 1 pc. n n pc.

IDX-OM-W038

D 5 3-4 IDH Series 52 5. 1 IDX-OM-W038 . 6 6.1 IDH4-10 IDH4-20 IDHA4-23 IDH6-10 IDH6-20 IDHA6-23 1),2) 100500L/min (ANR) 200800L/min (ANR) 540 0.31.0MPa 1535 (85%) 1530 0.150.85MPa 0.15MPa 400L/min (ANR) 600L/min (ANR) 0.7MPa 35 30 30 3) 10 4) 0.1 0.5 () 5) AC100V AC200V AC230V AC100V AC200V AC230V 50/60Hz 50/60Hz 50/60Hz 50/60Hz 50/60Hz 50/60Hz 4.2A 2.1A 2.1A 9.4A 4.8A

10

Refer to back page 50 for Safety Instructions and pages 3 to 12 for Common Precautions. Mounting Warning Caution 1. Before performing installation, removal, or stroke adjustment, make sure to cut the power supply to the equipment and verify that the equipment has stopped. 2.

0.01

Specifications ISA2-G1 ISA2-G5 ISA2-H1 ISA2-H5 Model Detection distance Fluid Operating pressure range Recommended detection nozzle 0.01 to 0.25 mm 0.03 to 0.50 mm Dry air (filtered to 5 m) 30 to 200 kPa 1.5 5 or less 8 or less 12 or less 50 to 200 kPa 2.0 10 or less 15 or less 22 or less 50 kPa 100 kPa 200 kPa Supply pressure Consumption flow rate L/min (ANR) 12 to 24 VDC 10%, Ripple (p-p

VT325

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Surge voltage suppressor Nil V Standard For vacuum Electrical entry Rated voltage VT Nil None 1 2 3 Option 100 VAC, 50/60 Hz G Grommet, Lead wire length 300 mm C Conduit D DIN terminal With surge voltage suppressor VP 200 VAC, 50/60 Hz Port size 110

Digital Gap Checker

Function number Function name Default setting Page F 0 (Unit) Unit selection [ PA] kPa Page 49 ISA3-F: [ 20] ISA3-G: [ 50] ISA3-H: [ 50] Switch point ISA3-F: [ 3] ISA3-G: [ 20] ISA3-H: [ 20] F 1 (oUt1) OUT1 setting Page 50 Hysteresis Display colour [ SoG] Green when ON, Orange when OFF out2: [ Ewin] Output mode OUT port side pressure detection Window comparator mode Reversed output 2ot:

IDUS/IDFS

5 Dew Point Conversion Chart 60 50 40 30 Pressure dew point C 20 10 1.5MPa 1.3MPa 1.1MPa 0.9MPa 0.7MPa 0.5MPa 0.3MPa 0.1MPa Atmospheric pressure 0 -40 -30 -20 -10 -60 -50 -60 -50 -40 -30 -20 -10 0 10 20 30 Atmospheric pressure dew point C 14-18-10 11 Series IDUS/IDFS Specific Product Precautions 1 Be sure to read before handling.

ITVH

75 100 0 25 50 75 100 Input signal [% F.S.]

Stainless Steel Heat

5 Dew point conversion chart 60 50 40 30 Pressure dew point C 20 10 1.5MPa 1.3MPa 1.1MPa 0.9MPa 0.7MPa 0.5MPa 0.3MPa 0.1MPa Atmospheric pressure 0 -40 -30 -20 -10 -60 -50 -60 -50 -40 -30 -20 -10 0 10 20 30 Atmospheric pressure dew point C 8 Series IDUS/IDFS Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.