LEF-OM006xx

40 50 60 70 80 90 100 [mm] [mm] c 180[mm] 290[mm] AREAON 100[mm]-0.5[mm] = 99.5[mm] INPON 2[mm] j 1[mm] j 100 b 0 [mm/s] AREA ON OFF ON [mm] k INP INP OFF 100.5 99.5 0 10 20 30 40 50 60 70 80 90 100 [mm] -23- (2 INC a b c d e f g h i j k ABS()/ / INC()// )30[mm] No.0 No.0INC No. 1 2 mm/s mm mm/s2 mm/s2 % % mm/s % mm mm mm 0 INC 100 10.00 3000 3000 0 0 0 100 10.00 20.00 0.50 1

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Movement MOD Speed Position Acceleration Deceleration Pushing force Trigger LV Pushing speed Moving force Area 1 Area 2 In position 0 1: Absolute 100 10 3000 3000 0 0 0 100 0 0 0.50 1 1: Absolute 100 100 3000 3000 0 0 0 100 0 0 0.50 2 1: Absolute 100 200 3000 3000 0 0 0 100 0 0 0.50 Note) The step data input range changes depending on the actuator model.

SFOD-OMT0009CN

100 120 120 [mm/s] 5 5 5 5 5 5 () [mm/s] 8 8 8 9 9 9 () 110 No.SFOD-OMT0009CN-B LEHF10 LEHF20 LEHF32 LEHF40 K [mm] 40/15 50/15 70/16 70/16 (2.667) (3.333) (4.375) (4.375) [mm/s] 80 100 100 100 [mm/s] 5 5 5 5 () [mm/s] 7 8 8 8 () LEHS10 LEHS20 LEHS32 LEHS40 K [mm] 255/76 235/56 235/40 235/40 (3.355) (4.196) (5.875) (5.875) [mm/s] 70 80 100 120 [mm/s] 5 5 5 5 () [mm/s] 8 8 9 9 () 111

Auto Switch Guide Reed Switches/Solid State Switches For Rotary Actuators (Air Grippers) 1

Detecting point dispersion Within 100 mm (= 1000 mm/sec. x 0.1 sec.) Take PLC response time into consideration when using.

Turntable Cylinder Series MGT

l (mm) l 300 200 300 MGTL80 P = 0.5MPa m 200 MGTM80 100 P = 0.5MPa Load weight m(kg) Load weight m(kg) 40 50 100 Larger than 75st 50st 25st Larger than 50st 30 20 50 40 25, 50st 10 30 5 4 3 2 20 10 20 30 40 50 100 200 300 1 1 2 3 4 5 10 20 304050 100 200300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) MGTL100 300 200 300 MGTM100 200 P = 0.5MPa 100 P = 0.5MPa Larger than

Compact and Lightweight

100 100 100 100 100 Vacuum pressure Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] 80 80 80 80 80 80 Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure Air consumption 60 60 60 60 60 60 Suction flow rate Air consumption 40 40 40 40 40 40 Suction flow rate 20 20

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

] 100 L/min type 100 L/min type Error display function When an error or abnormality arises, the location and contents are displayed.

Nozzle Type Ionizer

8 mm, I.D. 5 mm, Length 100 mm to 500 mm O.D. 8 mm, I.D. 5 mm, Length 100 mm to 500 mm Supply pressure [MPa] 0.25 Flow meter 6 Union tee fitting 0.20 O.D. 6 mm, I.D. 4 mm, Length 500 mm O.D. 6 mm, I.D. 4 mm, Length 500 mm O.D. 6 mm, I.D. 4 mm tube (Length 10 mm) 0.15 0.10 O.D. 6 mm, I.D. 4 mm, Length 100 mm O.D. 6 mm, I.D. 4 mm, Length 100 mm 0.05 Ionizer 0.00 0 300 100 200 Flow rate [L/min

LEH_C

100% 10 , 16 20 , 25 540 40% 100% 2150 80% 100% 1120 60% 100% 10L , 16L 510 50% 100% 3150 70% 100% 20L , 25L 520 40% 100% 2130 50% 100% [mm/sec] () 2130 50% 100% 520 40% 100% [mm/sec] () 4150 50% 100% 540 40% 100% 3150 80% 100% 1130 60% 100% 510 40% 100% 22 - 150% LEHZJ 1) (SVON ) 2)CN1 EMG() a)SVRE SETONON SVRE OFF SETON ON b) SVREON SVREON c) SVREON

Fluoropolymer Tubing Variations

C Note) 100 m roll is available with translucent (color indication: N) only.

33

*Power supply 100 V type: 35C Power supply 200/230 V type: 40C 2.

SL5200

0 700 -8 Delivery pressure (Hg abs) 600 -21 Delivery pressure (kPa) 500 -35 400 -48 300 -61 200 -75 100 -88 -101 0 Hastelloy is a registered trademark of Haynes International.

Tube One Touch Fitting FMW-4200-100-FM-OT1 100 PSI, Flush Mount, 1/8" O.D. Tube One Touch Fitting FMW-4200-2-FM-OT2 2 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-60-FM-OT2 60 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-100-FM-OT2 100 PSI, Flush Mount, 5/32" O.D.

Tube One Touch Fitting FMW-4200-100-FM-OT1 100 PSI, Flush Mount, 1/8" O.D. Tube One Touch Fitting FMW-4200-2-FM-OT2 2 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-60-FM-OT2 60 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-100-FM-OT2 100 PSI, Flush Mount, 5/32" O.D.

Tube One Touch Fitting FMW-4200-100-FM-OT1 100 PSI, Flush Mount, 1/8" O.D. Tube One Touch Fitting FMW-4200-2-FM-OT2 2 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-60-FM-OT2 60 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-100-FM-OT2 100 PSI, Flush Mount, 5/32" O.D.

Tube One Touch Fitting FMW-4200-100-FM-OT1 100 PSI, Flush Mount, 1/8" O.D. Tube One Touch Fitting FMW-4200-2-FM-OT2 2 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-60-FM-OT2 60 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-100-FM-OT2 100 PSI, Flush Mount, 5/32" O.D.

Tube One Touch Fitting FMW-4200-100-FM-OT1 100 PSI, Flush Mount, 1/8" O.D. Tube One Touch Fitting FMW-4200-2-FM-OT2 2 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-60-FM-OT2 60 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-100-FM-OT2 100 PSI, Flush Mount, 5/32" O.D.

Tube One Touch Fitting FMW-4200-100-FM-OT1 100 PSI, Flush Mount, 1/8" O.D. Tube One Touch Fitting FMW-4200-2-FM-OT2 2 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-60-FM-OT2 60 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-100-FM-OT2 100 PSI, Flush Mount, 5/32" O.D.

Tube One Touch Fitting FMW-4200-100-FM-OT1 100 PSI, Flush Mount, 1/8" O.D. Tube One Touch Fitting FMW-4200-2-FM-OT2 2 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-60-FM-OT2 60 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-100-FM-OT2 100 PSI, Flush Mount, 5/32" O.D.

Tube One Touch Fitting FMW-4200-100-FM-OT1 100 PSI, Flush Mount, 1/8" O.D. Tube One Touch Fitting FMW-4200-2-FM-OT2 2 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-60-FM-OT2 60 PSI, Flush Mount, 5/32" O.D. Tube One Touch Fitting FMW-4200-100-FM-OT2 100 PSI, Flush Mount, 5/32" O.D.