m (95% filtered particle size)Max. 0.1 mg/m3 (ANR) (Before saturated with oil: 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm) (2)PolycarbonateStandard450.44
m (95% filtered particle size)Max. 0.1 mg/m3 (ANR) (Before saturated with oil: 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm) (2)PolycarbonateStandard450.44
m (95% filtered particle size)Max. 0.1 mg/m3 (ANR) (Before saturated with oil: 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm) (2)PolycarbonateStandard250.22
m (95% filtered particle size)Max. 0.1 mg/m3 (ANR) (Before saturated with oil: 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm) (2)PolycarbonateStandard250.22
10%6046Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)275UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)
m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateStandard250.22
m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateStandard450.44
m (95% filtered particle size)Max. 0.1 mg/m3 (ANR) (Before saturated with oil: 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm) (2)PolycarbonateStandard450.44
m (95% filtered particle size)Max. 0.1 mg/m3 (ANR) (Before saturated with oil: 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm) (2)PolycarbonateStandard250.22
m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateOption80.18
m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateOption80.18
m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateOption80.18
m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateStandard250.22
m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateStandard250.22
m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateStandard450.44
m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateStandard450.44
m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateStandard450.44
m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateStandard450.44
m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateStandard450.44
m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateStandard450.49