HAA

(mm) Voltage(V) 10% 15 2200 300 Single100 55/65 37 5700 350 X 2 3-phase200 132/170 X 2 1.44/1.4 11/2B union 55 22 3300 400 3-phase200 90/130 0.4/0.45 B union 36 Single200 38/46 3-phase200 50/60 Cooling fan (50/60Hz) Power consumption (W) Current (A) 0.46/0.52 0.23/0.26 Rp(PS) Socket 18 0.8/0.9 0.4/0.35 1B union 24 11 2 Port size Weight (kg) 3 4 Compact size and light weight Note 1) Based

3 Port Air Operated Valve Series SYJA300 1

Rc 1/8 Body ported 80 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 M5 x 0.8 130 (Without subplate 80) N.C. Base mounted (with sub-plate) SYJA724-01 SYJA724-02 N.O.

3 Port Air Operated Valve Series SYJA300 1

Rc 1/8 Body ported 80 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 M5 x 0.8 130 (Without subplate 80) N.C. Base mounted (with sub-plate) SYJA724-01 SYJA724-02 N.O.

Pin Cylinder, Double Acting, Sgl Rod. 130 lb.

Pin Cylinder, Double Acting, Sgl Rod. 130 lb. 371.

Pin Cylinder, Double Acting, Sgl Rod. 130 lb.

Size/Port: 5C [Plug-in Type, Port Size: ø8, Flow: 130 L/min (ANR)]

Size/Port: 5H [One-touch Fitting Type, Applicable Tube OD: ø8, Flow: 130 L/min (ANR)]

Size/Port: 53 [Male Thread Type, Port Size: R1/4, Flow: 130 L/min (ANR)]

Size/Port: 52 [Male Thread Type, Port Size: R1/8, Flow: 130 L/min (ANR)]

accuracy [mm] Note 5)Finger backlash/ both sides [mm] Note 6)Impact/Vibration resistance [m/s2] Note 7)Max. operating frequency [C.P.M]Operating temperature range [C]Operating humidity range [%RH]Weight [g]Motor sizeMotor typeEncoderRated voltage [V]Power consumption/ Standby power consumption when operating [W] Note 8)Max. instantaneous power consumption [W] Note 9)BasicCompactLEHZ322252 to 130

Deionized water, Hydrofluoric acid, Ammonia hydrogen peroxide solution, etc.PFA0 (atmospheric pressure) to 0.35 MPa1/2andquot; x 3/8andquot;50 to 95 F (10 to 35C) (no condensation)FEP, Stainless steel 304, Stainless steel 31673 psi (0.5 MPa)IN/OUT: FEP tube 3/8andquot; x 1/4andquot;1.3 to 2.6 gpm (5 to 10 L/min)Temperature: 50 to 95F (10 to 35C), Humidity: 35 to 80%RH (no condensation)W5.1 (130

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

JB BC BD BU CA CB F H Size Rotation 20 30 90, 180 90, 180 40 90, 180 16 16 5.2 10 12 15 8.3 32 30 32 36 6.5 8.5 8.6 2.5 3 3 63 (11) 50 14 34 69 (11) 68 14 39 14.5 16.5 49 30.4 34.7 4.7 4.9 7 8.1 25 30 11 14 14 M8 x 1.25 M10 x 1.5 M10 x 1.5 78 (13) 76 16 47 18.5 55 40.4 Size Rotation K Q S W Key dimensions TF (H9) TG (H9) TL JJ US TA TD G L UW TB TC M N b l 90 180 90 180 90 180 3 29 104 130

Positioning Driver Series LC6C

LED for power supply, LED for alarm 5 to 40C (41 to 104F) Dimensions (mm) 1in=25.4mm LC6C220AD Dedicated teaching box LC51T1 02 TEACH 42 97 POWER ALM PARA AL-RES JOG MON I/O TEST 38 130 STOP SMC LC5-1-T1 TEACHING BOX 96 35 RET ESC/ $MODE 50 21

3 Way Direct Acting NVKF 300 Series

Vacuum) 1 Torr"100 PSI (-100 KPa-0.7 MPa) NVKF333W ilow wattaoe + Vacuuml 2 position srngre solenoid (for maniiold) 0r5 NVKF334 0 ' 1 0 0 P S I (0-0.7 MPa) o.25 n 1 < 1/8 NPTF u.zt ir5 0.271 lbs (120 sf) NVKF334Y lLow waltaoe: 2WDC) NVKF334V lVacuum) '1 Torr-100 PSI (-100 KPa-0.7 [,lPa) NVKF334W ilow waltaoe + Vacuuml Basg mounted 1 1 0V 50/60 HZ, 220v 51 er,t1z, 1 00v 50/6o HZ, 2o0v 59 @lz 130

Air Pilot Operated Series NVSA

NXT 333-17-5 B D lt J K tl 5.12 {130) 1.95 (4e.5) 1.99 (50.s) '|.52 (38.5) 1.44 (37.5) 1 . 1 0 (2Bl 1.06 l27l 0,63 (16) 1.42 (36) 0,91 (23) 0.61 irs.5) 1.26 (32) 13 Gasket Subplate Buna N AxT 33$ 12.2 l 4 Cushion . "8" End AXT 334.5 Millltute.s in Parenlheos r0 DIRECTIONAL AIR VALVE DIMENSIONS PARTS LIST nrr.*.t.*,. SERIES NVSA 4&14 DETAIL REF, OESCBIPTION TMTERIAL PAFT NO. Body Alum.

3 Way,3 Port Solenoid Valve NVZ Series

A A , $TJ-b SZI;TF P R P B Model '.6NPTF 0.26 (130) 0 4 8 .,6. ].;NPTF with 0.26 (1 Air and inert 20-100 PSI (15/cm'1 pressure vAc-1 l0Torr External pilot pressure 20-'100PSl(15 "7ks{/cm'?) Max. 120"F (50'C) 20ms or less (7OPS|) 600 cpm Nonlocking push type, (std-) Slotted locking type, Knob type (opt.)

Compact Cylinder with Air Cushion Series RQ

Mounting bolt Model C Mounting bolt M5 x 65l x 70l x 75l x 85l x 95l x 120l x 145l M6 x 85l x 95l x 105l x 130l x 155l Model C Mounting bolt M5 x 50l x 55l x 60l x 65l x 75l x 85l M5 x 55l x 60l x 65l x 70l x 80l x 90l M5 x 60l x 65l x 70l x 80l x 90l x 115l x 140l D 65 70 75 85 95 120 145 85 95 105 130 155 D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 R(D)QB20-15 -20 -25 -

Stopper Cylinder Adjustable Mounting Height Type Series RSG

RSG-R Bore size: 40, 50 Direction of work piece conveyance (51 + Stroke) M45 x 1.5 24 Stroke 60 25 A 4-9 through Stroke 130 + 2 Strokes 67 + Stroke Approx. B Integrated One-touch fitting type QB Piping tube O.D. QA Stroke Approx. QV mm Note 1) Body dimensions when not equipped with auto switches are the same as in the drawings above.

Vacuum Regulator Series IRV

15.4 x 5.4 Approx. 106 Approx. 50.6 18 Approx. 79 Atmosphere Atmosphere 45.5 13 SET VAC SET G SET G 30 SET VAC 43 Pad side Vacuum pump side Pad side Vacuum pump side Approx. 43 35 2-Rc 1/8 Connection port 2-Rc 1/8 Vacuum gauge port 2-Rc 1/4 Connection port Approx. 60 50 2-Rc 1/8 Vacuum gauge port IRV3000 IRV3000 54 70 50 66 SMC P K U C S O H L 10.5 x 8.5 2-Rc 1/8 Vacuum gauge port Approx. 130