CHKD/CHKG

(mm) Rod end male threads Water resistant type (mm) a b c e f g h Bore size (mm) B C N S g h A Bore size (mm) 20 20 12.5 15 M10 x 1.25 6 10 23 66 61 43 18 26.5 6 33 76 25 25 15.5 18 M12 x 1.25 6 12 26 71 63 45 18 30 6 36 81 32 32 22 25 M16 x 1.5 7 14 35 86 71 51 20 38 7 45 96 40 40 27 30 M20 x 1.5 7 19 40 95 75 55 20 45 7 50 105 50 50 32 35 M24 x 1.5 8 24 46 106 81 60 21 55 7 56 116 63 63

High Power Cylinder Series RHC

REC CY CX Lateral load MQ Relief valve adjusting screw Relief valve adjusting screw RHC RZQ D-X Individual -X 6 turns at most (20, 25, 32, 40, 50) 10 turns at most (63, 80, 100) 6 turns at most (20, 25, 32, 40, 50) 10 turns at most (63, 80, 100) 1215

17

+ L2 x 0.0016) [mm] 6 Series MGP High Precision Ball Bushing/MGPA Plate Displacement Amount (Reference Values) Load from lateral direction Displacement MGPA12 0.4 MGPA32/40 0.8 Plate displacement amount (mm) Plate displacement amount (mm) MGPA12-250 MGPA -400 32 40 0.35 0.7 0.3 0.6 MGPA -300 32 40 MGPA12-150 MGPA12-100 MGPA12-75 0.25 0.5 MGPA -200 32 40 MGPA -150 32 40 MGPA -100 32 40 0.2

Compact Rotary Actuator Series CRQ2

32 Selection Caution 1.

HRX-OM-X084

Option . 6-1 6.1 Option DMElectric conductivity control function , DI water (pure water) piping . 6-1 6.1.1 Option DMElectric conductivity control function , DI water (pure water) piping . 6-1 HRR Series HRX-OM-X084 Contents 6.2 Option MDI water (Pure water) piping . 6-2 6.2.1 Option MDI water (Pure water) piping . 6-2 6.3 Option T1Inverter pump . 6-2 6.3.1 Option T1Inverter pump . 6-2 6.4

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

CY3RG25 CY3RG32 CY3RG40 16 Series CY3R Auto Switch Proper Mounting Position for Stroke End Detection Auto Switch Operation Range (Reference dimension) Bore size (mm) Auto switch model 15 20 25 32 40 D-A9 8 6 D-F9, D-F9W 5 4 D-Z7, Z80 9 9 11 A B D-Y59, Y7P D-Y7W 6 6 6 Switches cannot be mounted in some cases.

SY

No. 0 1 2 3 4 5 6 7 8 9 10 98 110.5 123 135.5 148 160.5 173 185.5 198 210.5 223 Dimension L Dimensions No. 11 12 13 14 15 16 17 18 19 20 21 235.5 248 260.5 273 285.5 298 310.5 323 335.5 348 360.5 Applicable fitting size d 4 Dimension L Model A L D No. 22 23 24 25 26 27 28 29 30 31 32 373 385.5 398 410.5 423 435.5 448 460.5 473 485.5 498 KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

B 0(0) 0(0) 0.5(0) 5.5 A 6(4) 6(4) 7(5) 12 B 5(3) 5(3) 6(4) 11 B A B 1.5(0) 1.5(0) A 7(5) 7(5) 8(6) 13 B 6(4) 6(4) 7(5) 12 A 4(2) 4(2) 5(3) 10 B 3(1) 3(1) 4(2) 9 A 0.5(0) 0.5(0) 1.5(0) 6.5 A Hs 22.5 25 28.5 32.5 Hs 25 27.5 31 35 Hs 60 62.5 66 70 Hs 69.5 72 75.5 79.5 Bore (mm) 20 25 32 40 4.5(2.5) 3.5(1.5) 2.5(0.5) 4.5(2.5) 3.5(1.5) 2.5(0.5) MGQ 5.5(3.5) 10.5 4.5(2.5) 9.5 3.5(1.5) 8.5 2.5(

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

byte/32 byte each I/O size of port 2 to 4: 2 byte/2 byte for each 32/2/2/2 byte direct Data order is not swapped.

New

C 110 VAC J 6 one-touch fitting 1/8 3 D 200 VAC K L 13/64 5 Resin E 230 VAC 5/64 2 M N 8 one-touch fitting 1/8 3 F 24 VDC 13/64 5 G DIN terminal 24 VDC With surge voltage suppressor A B D E H 5/32 4 H 100 VAC 1/4 9/32 7 J 110 VAC Aluminum 5/32 4 3/8 K 200 VAC Single 9/32 7 2 Size 2 Unit L 230 VAC 5/32 4 N.C. 8 one-touch fitting J L 9/32 7 M Conduit terminal 24 VDC Resin With surge voltage

Floating Joint

32, 40 40 32, 40 50 50, 63 80 100 100 125 160 13 17 17 22 22 22 27 27 32 41 41 41 55 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 6.6 6.6 6.6 9 9 9 9 9 11 11 11 18 22 6 6 6 9 9 9 12 12 16 19 19 21 29 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 40 40 52 52 52 45 45 55 65 65 72 100 48 52 52 70 70 70 19 25 25 32 32 32 65 65 75 90 90 100 150 0.08 0.12 0.12 0.28 0.28 0.28 0.63 0.63 1.15 2.07 2.07

LX

(A contact) 1 2 1 pc. 2 pcs. 6 6 pcs.

JXCx-OMT0023

1 6.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

4) 6(4) 7(5) 12 B A B 1.5(0) 1.5(0) B 0(0) 0(0) 1(0) 6 B 5(3) 5(3) 6(4) 11 A 7(5) 7(5) 8(6) 13 A B 6(4) 6(4) 7(5) 12 A 4(2) 4(2) 5(3) 10 B 3(1) 3(1) 4(2) 9 A 0.5(0) 0.5(0) 1.5(0) 6.5 Hs 22.5 25 28.5 32.5 Hs 25 27.5 31 35 Hs 60 62.5 66 70 Hs 69.5 72 75.5 79.5 Bore (mm) 20 25 32 40 4.5(2.5) 3.5(1.5) 2.5(0.5) 4.5(2.5) 3.5(1.5) 2.5(0.5) MGF 2.5(0.5) 7.5 5.5(3.5) 10.5 4.5(2.5) 9.5 3.5(1.5) 8.5

Guide Cylinder Series MGG

MGZ D-A93 D-M9 D-M9W Less than 50 strokes MGT Less than 55 strokes Operating Range (mm) Auto switch model Auto switch model Bore size (mm) Bore size (mm) 20 7 25 6 32 8 40 8 50 8 63 9 80 100 20 25 32 40 50 63 80 100 D-A9 D-M9/M9W D-H7/H7W D-H7BAL/H7NF D-H7C D-G5/K59 D-G5W/K59W D-G5NTL/G5BAL D-G59F D-G5NBL 4 4 4.5 5 6 6.5 5 5.5 5 5.5 6.5 7 D-B7/B80 D-B73C/B80C 7 8.5 9 10 9.5 10.5 8 10 9

MLGP

80 100 Operating range Operating range l (mm) 5 5 6 6 6 6 6 6.5 Note) This is a standard including hysteresis, and is not guaranteed.

MLGP

80 100 Operating range Operating range l (mm) 5 5 6 6 6 6 6 6.5 Note) This is a standard including hysteresis, and is not guaranteed.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

machine 20 95.9 Inserter 21 108.0 Mounter Bonder 22 121.7 23 137.1 24 154.4 25 173.9 26 195.9 27 220.6 28 248.5 29 279.9 30 315.3 31 355.1 32 High 400.0 6 7 6.

0.4

KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-01 KQ2P-03 KQ2P-07 KQ2P-09 3.2 4 6 8 16 16 18 20.5 31.5 32 35 39 1/8" 5/32" 1/4" 5/16" 16 16 18 20.5 31.5 32 35 39 3.2 6 8 10 5 6 8.5 10 Port plug VVQ0-58A The plug is used to block the cylinder port.

0.

Blanking plug KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 L Dimensions (mm) A Applicable fitting size d Model A L D KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 3.2 6 8 10 12 31.5 32 35 39 43 3.2 4 6 8 10 16 16 18 20.5 22 D L DIN rail AXT100-DR-l 7.5 As for l, enter the number from the DIN rail dimensions table.