Series: SS5Y3 (SY3000 Manifold), Model: 10S6 (Side-Ported, Serial Interface, EX600), SI Unit: 0 (w/o SI Unit), SI Unit Common, End Plate: w/o SI Unit, I/O Unit Stations: None, Valve Stations: 14 Stations, P,E Port, SUP/EXH Assembly: B (Port Location Both Sides, Internal Pilot), A,B Port Size: BN7 (ø1/4" One-touch Fitting), Downward Elbow, Mounting: D (DIN Rail Mounting w/o Name Plate), DIN

Series: SS5Y3 (SY3000 Manifold), Model: 10S6 (Side-Ported, Serial Interface, EX600), SI Unit: Q (DeviceNetâ„¢), SI Unit Common, End Plate: 4 (Negative Common, M12 Connector), I/O Unit Stations: 2 Stations, Valve Stations: 14 Stations, P,E Port, SUP/EXH Assembly: B (Port Location Both Sides, Internal Pilot), A,B Port Size: N7 (ø1/4" One-touch Fitting)

Series: SS5Y3 (SY3000 Manifold), Model: 10S6 (Side-Ported, Serial Interface, EX600), SI Unit: 0 (w/o SI Unit), SI Unit Common, End Plate: w/o SI Unit, I/O Unit Stations: None, Valve Stations: 14 Stations, P,E Port, SUP/EXH Assembly: B (Port Location Both Sides, Internal Pilot), A,B Port Size: C6 (ø6 One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate), DIN Rail Option: 0 (w/

Series: SS5Y3 (SY3000 Manifold), Model: 10S6 (Side-Ported, Serial Interface, EX600), SI Unit: 0 (w/o SI Unit), SI Unit Common, End Plate: w/o SI Unit, I/O Unit Stations: None, Valve Stations: 14 Stations, P,E Port, SUP/EXH Assembly: B (Port Location Both Sides, Internal Pilot), A,B Port Size: C6 (ø6 One-touch Fitting)

Series: SS5Y3 (SY3000 Manifold), Model: 10S6 (Side-Ported, Serial Interface, EX600), SI Unit: 0 (w/o SI Unit), SI Unit Common, End Plate: w/o SI Unit, I/O Unit Stations: None, Valve Stations: 14 Stations, P,E Port, SUP/EXH Assembly: B (Port Location Both Sides, Internal Pilot), A,B Port Size: N7 (ø1/4" One-touch Fitting)

Series: SS5Y3 (SY3000 Manifold), Model: 10S6 (Side-Ported, Serial Interface, EX600), SI Unit: WE (EtherNet/IPâ„¢, Compatible Wirless Base Unit), SI Unit Common, End Plate: 2 (Positive Common, M12 Connector), I/O Unit Stations: None, Valve Stations: 14 Stations, P,E Port, SUP/EXH Assembly: B (Port Location Both Sides, Internal Pilot), A,B Port Size: N7 (ø1/4" One-touch Fitting), Mounting:

Table of Contents

OUT2 P2(n2) P1(n1) Supply pressure verification Leak test CH P2(n1) > P1(n2) 10.0 to 101.0 kPa Increases the set value 1 2 3 4 PRESSURE For normally closed P2(n2) P1(n1) P2(n1) > P1(n2) 0.1 to 1000.0 MPa Decreases the set value SET P3(n3) and P4(n4) are the same as P1(n1) and P2(n2).

0.4

+ 65.5 L4 = L3 + 81 + 47 x n2 L5 = (L1 L4)/2 L6 = 10.5 x n1 + 45 L7 = 47 x n2 + 89.8 L1: DIN Rail Full Length Valve stations (n1) I/O unit stations (n2) 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 0 1 2 3 4 5 6 7 8 9 198 198 210.5 223 235.5 248 260.5 260.5 273 285.5 298 310.5 323 335.5 335.5 348 360.5 373 385.5 398 398 410.5 423 435.5 235.5 248 260.5 273 285.5 298 298

SX

4, 6 n1: Number of SX3000s stations n2: Number of SX5000s stations (Station n) (Station 1) 2n2-One-touch fittings (A, B port) Applicable tubing O.D.: 4 6 8 Equivalent to applicable D-sub connector JIS-X-5101 MIL-C-24308 16 x n2 12.5 x n1 DIN rail DIN rail holding screw Manual override (Press and turn for the locking type.)

Compact Vacuum Ejector Series ZA

Vacuum (V) port Applicable tubing O.D.: 3.2 Vacuum (V) port Applicable tubing O.D.: 4 15.3 15.6 KJL04-M5 KJL23-M5 KJS04-M5 KJS23-M5 9.3 8.4 Applicable tubing O.D.: 3.2 Applicable tubing O.D.: 4 10.6 10 15.5 16.5 Vacuum (V) port Vacuum (V) port Q1 N1 ZA1 1 1 Q1 N1 ZA1 1 2 Q1 N1 ZA1 1 4 Q1 N1 ZA1 1 5 Dimensions of the vacuum (V) port fittings after installation 9.3 13.7 Air pressure supply

SZ3000

Switch (When equipped with switch) L n 2 5 6 7 8 9 10 4 3 Internal Pilot Manifold L Dimension n: Stations (n1 + n2) L n 2 5 6 7 8 9 10 4 3 External Pilot Manifold L Dimension n: Stations (n1 + n2) L1 L2 L3 L4 L1 L2 L3 L4 110.5 100 81 15 123 112.5 91.5 16 135.5 125 102 17 148 137.5 112.5 18 148 137.5 123 12.5 160.5 150 133.5 13.5 173 162.5 144 14.5 185.5 175 154.5 15.5 198 187.5 165 16.5 123

Compact Vacuum Unit

kPa Option Note 12) Lead Wire with Connector for Vacuum Pressure Switch Nil Without option Nil G Without lead wire with connector (No need to specify for pressure sensor type. ) Lead wire with connector and connector cover, Lead wire length 78.7 inch (2 m) With bracket for single unit (Enclosed with the product for shipment without being assembled) B Vacuum (V) Port Note 11) Bracket C2 C4 N1

SZ3000

Switch (When equipped with switch) L n 2 5 6 7 8 9 10 4 3 Internal Pilot Manifold L Dimension n: Stations (n1 + n2) L n 2 5 6 7 8 9 10 4 3 External Pilot Manifold L Dimension n: Stations (n1 + n2) L1 L2 L3 L4 L1 L2 L3 L4 110.5 100 81 15 123 112.5 91.5 16 135.5 125 102 17 148 137.5 112.5 18 148 137.5 123 12.5 160.5 150 133.5 13.5 173 162.5 144 14.5 185.5 175 154.5 15.5 198 187.5 165 16.5 123

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Description Material Note 1 Body Spool Sleeve Spool valve Piston Pilot valve Aluminum die cast / Metal seal Stainless steel 2 Rubber seal / Aluminum NBR 3 4 Resin 33 Series VQZ Body Ported Type Dimensions: VQZ100 Dimensions: VQZ100 (mm) Valve Scale: 65% Grommet (G): VQZ115G -N1, N3, N7, M5 2-N1, N3, N7, M5 N1: One-touch fittings for 1/8" N3: One-touch fittings for 5/32" N7: One-touch fittings

CM2

I Bore size (mm) -X 20 41 8 75 60 4 34 7 15.5 13 18 8 28 13 26 30 5 8 0 0.033 20 25 45 8 75 60 4 40 7 19.5 13 22 10 33.5 17 32 37 6 8 0 0.033 26 2032 45 8 75 60 4 40 7 19.5 13 22 12 37.5 17 32 37 6 8 0 0.033 26 40 50 11 82 36 66 5 52 7 21 16 24 14 46.5 22 41 47.3 8 10 0 0.039 32 Data With Air Cushion Built-in One-touch Fittings Bore size (mm) Bore size (mm) MM K NN ZZ NA Z N P S Q WB N1

SMC has improved product performance and reliability with the redesigned SY series valve. The SY3000 and SY5000 have the same valve width as their predecessors, but the flow has been increased by up to 80%, allowing the valve size to be reduced. A built-in strainer in the pilot valve prevents trouble caused by foreign matter. By using H-NBR seal material for the main valve and seals, Ozone

PSE200

Supply pressure verification Leak test P2(n1) > P1(n2) P2(n2) P1(n1) 10.0 to 101.0kPa CH Increases the set value 1 2 3 4 PRESSURE For normally closed P2(n1) > P1(n2) P2(n2) P1(n1) 0.1 to 1000.0MPa Decreases the set value SET P3(n3) and P4(n4) are the same as P1(n1) and P2(n2).

PSE530/200

OUT2 P2(n2) P1(n1) Supply pressure verification Leak test CH P2(n1) > P1(n2) 10.0 to 101.0 kPa Increases the set value 1 2 3 4 PRESSURE For normally closed P2(n2) P1(n1) P2(n1) > P1(n2) 0.1 to 1000.0 MPa Decreases the set value SET P3(n3) and P4(n4) are the same as P1(n1) and P2(n2).

Valve Single Unit

4, 6 n1: Number of SX3000s stations n2: Number of SX5000s stations (Station n) (Station 1) 2n2-One-touch fittings (A, B port) Applicable tubing O.D.: 4 6 8 Equivalent to applicable D-sub connector JIS-X-5101 MIL-C-24308 16 x n2 12.5 x n1 DIN rail DIN rail holding screw Manual override (Press and turn for the locking type.)

Valve Single Unit

4, 6 n1: Number of SX3000s stations n2: Number of SX5000s stations (Station n) (Station 1) 2n2-One-touch fittings (A, B port) Applicable tubing O.D.: 4 6 8 Equivalent to applicable D-sub connector JIS-X-5101 MIL-C-24308 16 x n2 12.5 x n1 DIN rail DIN rail holding screw Manual override (Press and turn for the locking type.)