Manifold Type: 41 (Base Mounted), Valve Stations: 2 Stations, A, B Port: M5 (M5X0.8)

Manifold Type: 41 (Base Mounted), Valve Stations: 3 Stations, A, B Port: M5 (M5X0.8)

Manifold Type: 41 (Base Mounted), Valve Stations: 4 Stations, A, B Port: M5 (M5X0.8)

Manifold Type: 41 (Base Mounted), Valve Stations: 20 Stations, A, B Port: M5 (M5X0.8)

JXCx-OMT0005CN

(P.23) 10.1 (P.33) 3.4 (P.16) 11.(P.42) (CN1: EMG 3.(P.12) ) INP ON 10.1 (P.33) (INP PLC ) 5 3.(P.12) PLC (PLC) 2 12.4 (P.50) 11.(P.42) 3.(P.12) 83 - 5.(P.23) 10.1 (P.33) 3.(P.12) PLC (PLC) 2 12.4 (P.50) () () (LED() 3.2 (P.13) ) 11.(P.42) 5 11.(P.42) 11.(P.42) 3.(P.12) (CN1: EMG 3.

CEx-OMG0106

Solenoid Valve Wiring 36 Chapter 10: Timing Chart 3744 Chapter 11: Data Setting 11-1. Data Presetting 11-1-1. Data Classification & Content 45 11-1-2. Input Method 4548 11-1-3. Confirmation of Set Data 48 11-2. Program Setting 11-2-1. Input Method 4952 11-2-2. Confirmation of Input Data 52 11-3. Selection of Dip Switch 53 Chapter 12: Driving 12-1.

4-channel Flow Monitor ( compatible)

5th letter Y U8 0x00 Refer to Figure "Line name communication data (7 seg)". 0x0974 (2420) 0x0975 (2421) 0x0976 (2422) 0x0977 (2423) (0) 6 R/W Line name 6th letter (11 SEG) Y U8 0x00 Refer to Figure "Line name communication data (11 seg)". (0) 7 R/W Line name 7th letter (11 SEG) Y U8 0x00 Refer to Figure "Line name communication data (11 seg)". (0) 8 R/W Line name 8th letter Y U8 0x00 Refer

EXxx-OMW0014CN

(EX245-DX1EX245-DY1EX245-LA1/LB1) 1 88 EX600-ZT1 . 11-1 (EX600-ZT1) 74 No.EX-OMW0014CN-A 11.2. Y Y (EX245-DX1EX245-DY1) Y 2 2M12M12 2M8M12 PCA-1557785 Y (2M12M12) A code() A code() A code() . 11-2 Y (PCA-1557785) 75 No.EX-OMW0014CN-A PCA-1557798 Y (2M8M12) A code() . 11-3 Y (PCA-1557798) 76 No.EX-OMW0014CN-A 11.3.

CEx-OMQ0013

No.1 OFF ON P2 No.2 OFF ON P3 No.3 OFF ON P4 No.4 OFF ON P5 P6 P7 P8 7 8 1 2 3 4 5 6 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 50 13 14 15 16 9 10 11 12 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 51 F : 2019 1 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +

COQ2BP

Max 1.25 9 80 92 108 8 M1 OX 1.S 15 18 M1 Oxl .5 9 63 103.5 MIOx l .S 11 99 116 13' 10 M1 6X2.0 21 22 M12xl .7S 11 123 Ml 2x 1.75 80 Clevis Mount: C0020P 0 -0 OM-DO Special cap bolt (mm) eo.. _ N CD CL ew ev A 0 R CU ex cz RR Ll H H Thread e I (mm) C Depth M8xl .2S M8x l .25 14 117 I .

CEx-OMI0064

643ms 643ms ON(ON),BCD 39 - 10 10-1 10 8 18 [MODE], 13 OFF 6 , 8 , 13 17 8 12 11 22 5 18 +/, 16 , 40 - 11 , 18 , , 8 11 [RESET] 10ms 11 [HOLD] [BANK] [MODE] 13 RS-232C 12 RS-232C ,3 18 26 NO.

Suction cups with flange

ZP25U ZP 32 U ZPG32U-7A-X2 10 11 11 12 ZP32U ZP 10 C ZPG10C-7A-X2 7 7 7 7 ZP10C ZPT2-7A-X2 ZP 13 C ZPG13C-7A-X2 7 7 7 7 ZP13C ZP 16 C ZPG16C-7A-X2 7 7 7 8 ZP16C ZP 20 C ZPG20C-7A-X2 9 10 10 11 ZP20C ZPT3-7A-X2 ZP 25 C ZPG25C-7A-X2 10 10 10 11 ZP25C ZP 32 C ZPG32C-7A-X2 10 11 11 12 ZP32C ZP 10 B ZPG10B-7A-X2 7 7 7 8 ZP10B ZPT2-7A-X2 ZP 13 B ZPG13B-7A-X2 7 8 8 8 ZP13B ZP 16 B ZPG16B

PF2D

1 q t i 16-11-40 5 Series PF2D Digital Flow Switch For Deionized Water and Chemicals Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuit and wiring example 60 70 176 z to , are terminal numbers.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021 1021 1021 44 40 69 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 ARP30(K) 27.8 44 41 70 41 40 44 6.5 8 53 2.3 31 38.5 19 7 ARP40(K) 27.8 44 45 74 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 Note 1) The

S Couplers

R 3/8 32.9 32.9 39.4 KKA4P-02M 17 R 1/4 28.3 36.2 42.2 -03M 1/4 R 3/8 18.9 6.9 26.4 36.6 36.7 43.2 T A -04M 22 R 1/2 65.9 38.2 46.2 KKA6P-03M R 3/8 60.3 40.6 47.1 24 -04M 1/2 R 1/2 20.4 10.0 54.2 69.2 39.9 47.9 -06M 30 R 3/4 119.0 40.4 49.9 KKA7P-04M R 1/2 173.9 58.1 66.3 32 -06M 3/4 R 3/4 27.6 13.5 99.6 209.6 59.9 69.4 L2 H -10M 36 R 1 275.0 59.5 69.9 L1 KKA8P-06M R 3/4 362.8 73.4 82.9 41

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021 1021 1021 44 40 69 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 ARP30(K) 27.8 44 41 70 41 40 44 6.5 8 53 2.3 31 38.5 19 7 ARP40(K) 27.8 44 45 74 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 Note 1) The

AC Servo Motor Driver (Pulse input type/Positioning type)

Servo amp lifier Driver (Note 7) (Note 7) CN1 CN1 (Note 2) 24VDC RA1 (Note 4, 9) 2 OPC 9 ALM Trouble (Note 6) 1 DICOM Travel completion 10 MEND RA2 13 DOCOM (Note 9, 11) (Note 13) Ready EM1 SON MD0 8 4 3 (Note 3, 5) Forced stop 11 RD RA3 Servo-on Electromagnetic brake interlock 12 MBR RA4 Automatic/manual selection DOG (Note 9, 10, 12) 25 Proximity dog 10m max. Point table No.

JXCx-OMT0028CN

No.1 2 =0 39 - 11. 11.1 [IN] Bit/Byte / Address ID No. 0 OUT0 bit 0,1 1 OUT1 bit 0,1 2 OUT2 bit 0,1 3 OUT3 bit 0,1 0 4 OUT4 bit 0,1 5 OUT5 bit 0,1 6 bit 0 7 bit 0 0 BUSY bit 0,1 1 SVRE bit 0,1 2 SETON bit 0,1 3 INP bit 0,1 1 4 AREA bit 0,1 5 WAREA bit 0,1 ID1 6 ESTOP bit 0,1 7 ALARM bit 0,1 2 H 3 4 0.01mm 2147483647 4 5 L 6 H 2 065500 mm/s 7 L 8 H 2 0300 % 9 L 10 H 11 4 0.01mm

NAAMS Standards Compliant

RR W XB XC Y Without switch cover With switch cover 50 45 45 5 40 46 88 20 20 46 48 78.4 134 136 92 132 63 55 45 10 55 52 104 25 25 52 54 78 146.5 148.5 104.5 138 With front mounting hole Metal cover type NA0.05 NC NB0.05 Release point Y VC0.1 VB0.1 K +0.1 0 Metal cover open 2 x V H7 depth I 4 x NN depth S VA0.02 [mm] Bore size I K NA NB NC NN S V VA VB VC 50 12 55 13 36.5 9.5 M8 x 1.25 11

33

Note 11) If the product is used at altitude of 1000 m or higher, refer to Operating Environment/Storage Environment (page 210) Item 14 * For altitude of 1000 m or higher. 200 A Thermo-chiller Basic Type HRSE Series Note 1) If the product is used at altitude of 1000 m or higher, refer to Operating Environment/Storage Environment (page 210) Item 14 * For altitude of 1000 m or higher.