Micro Mechanical Valve Series VM1000 (Pre-Travel) 1 VH VHS 4 x 5.1 mounting hole 4 x M6 x 1 Thread depth 15 VHS 3 x 1/8 3.0 mm T.T. 2.0 mm O.T. 1.0 mm P.T. 23 N F.O.F. 2315 Series VM800 Series VM800 Roller lever VM830-01-01 Stainless steel sintered roller 17.4 x 7.1 Symbol (OUT) 2 10 12 3 (N.C.) 1 (N.O.) 4 x 5.1 mounting hole Hexagon socket head cap screw M5 x 12 4 x M6 x 1 depth 15 50 T.T. 30 O.T. 20 P.T. 20 N F.O.F. 3 x 1/
type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 Single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Specifications Suction Flow Rate of Vacuum Suction Type (Reference values) Bore size (mm) 10/15 20/25/32 6 Item 1.05
38 43 C D Model Mounting bolt CDUJB6-4 -6 -8 -10 -15 CDUJB8-4 -6 -8 -10 -15 -20 CDUJB10-4 -6 -8 -10 -15 -20 Model Mounting bolt CDUJB6-4 -6 -8 -10 -15 CDUJB8-4 -6 -8 -10 -15 -20 CDUJB10-4 -6 -8 -10 -15 -20 M3 x 27L M3 x 29L M3 x 31L M3 x 33L M3 x 38L M3 x 27L M3 x 29L M3 x 31L M3 x 33L M3 x 38L M3 x 43L M3 x 27L M3 x 29L M3 x 31L M3 x 33L M3 x 38L M3 x 43L 5 5 18 M3 x 18L 5 5 18 M3 x 18L
For more information, refer to page 15.
Series 12-CY3B Magnetic rodless cylinder 15, 20, 25, 32, 40 How to Order Clean series 12 Special treatment on sliding part Bore size (mm) 300 15 12 CY3B Cylinder stroke (mm) Type Bore size Port type Symbol 15 M5 x 0.8 Rc NPT G Nil 20, 25, 32, 40 TN TF Model Maximum manufacturable stroke Cushion Standard stroke (mm) Bore size (mm) Port size Lubrication Model Rubber Air 15 1000 M5 x 0.8 Rc1
C 8 8 8.5 8.5 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 X 50l M3 X 60l M3 X 50l M3 X 60l M5 X 75l M5 X 85l M5 X 75l M5 X 85l M5 X 85l M5 X 95l M5 X 75l M5 X 85l M6 X 95l M6 X 130l M8 X 100l M8 X 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50 PTo attach and detach
25 32 40 50 63 80 100 1 2 1 2 1 15 2 15 1 15 2 15 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 2 10 15 5 10 5 10 10 5 10 D-A9 D-A9V D-M9V D-M9 10 10 10 10 D-M9W D-M9WV D-M9AVL 15 10 D-M9AL 15 10 5 D-Z7 D-Z80 D-Y59 D-Y7P D-Y69 D-Y7PV D-Y7W D-Y7WV 15 10 10 15 10 5 5 5 10 15 15 10 15 D-Y7BAL 10 20 75 18-3.
Through holes Double end taps Extension locking Easy manual unlocking B Locked A 40 to 100 20 to 32 W Retraction locking Unlocked 40 to 100 20 to 32 W A B Wide variations from 20 to 100 Standard stroke (mm) Locking direction Bore size (mm) Mounting Series 5 10 15 20 25 30 35 40 45 50 75 100 20 Through holes, double end taps common 25 Extension locking 32 40 CLQ Through holes 50 Retraction
(mm) M5 Weight (g) D A Nylon Urethane M5 0.8 KGS04-M5 KGS04-01 KGS06-M5 KGS06-01 KGS06-02 KGS08-01 KGS08-02 KGS08-03 KGS10-01 KGS10-02 2.7 2.6 8 3.6 2.7 2.7 4.1 2.7 15.5 13 16 19 16.5 9.5 9.8 11.5 11.8 13.8 2.5 19 23 20 4 1 8 3 2.5 M5 0.8 14 3.2 9 15 12 11 24 18 12 10.0 10.0 9.9 1 8 1 4 1 8 1 4 3 8 1 8 1 4 6 4 20 17 24 10.7 17.2 5 24 19.5 21 26 21.5 28 25.5 27.5 30 14 8 18.5 16.2 23.3 6 17
20 ZZ + 2 Stroke S + Stroke (mm) A AL Bore size Stroke range Standard Long B1 C D E F GA H H1 I J K KA MM NA P RA S 1 2 ZZ 20 20 20 13 14 14 20 20 2 2 2 2 2 2 3 3 12 14 18 25 30 32 40 50 8 10 12 16 20 20 25 30 14 16.5 20 26 32 38 50 60 13 17 17 19 27 27 32 41 0 0 0 10 10 10 10 10 26 31 38 47 58 72 89 110 15.5 19.5 19.5 27 32 32 37 37 93 93 95 87 102 102 122 122 5 6 6 8 11 11 13 16 6 8 10
type (Except for 6) Single clevis type (Non-integrated type) Double clevis type 10 15, 30, 45, 60, 75, 100 16 15, 30, 45, 60, 75, 100 20 15, 30, 45, 60, 75, 100 25 15, 30, 45, 60, 75, 100 Strokes are available in 1mm increments by installing spacers in standard stroke cylinders.
, R port) 15 (Bracket) 11 10 P R 22.1 6.7 1.2 (PE port) 7 9.2 L plug connector (L): SYJ32-L-M3 M plug connector (M): SYJ32-M-M3 M8 connector (W0): SYJ32-W0-M3 58.5 [60.7] (2) Approx. 300 (Lead wire length) 28 [35] 12.6 32.5 M8 x 1 15 39.1 [46.1] Approx. 300 (Lead wire length) (2) 48.7 [50.9] 57.6 (2) 50.2 43.7 13.5 13.5 13.5 15 15 15 22.1 22.1 22.1 Refer to the page 68 for dimensions with
NS 20 20 30 30 40 40 50 60 60 LT 58 58 68 68 78 78 88 98 108 LB 20 25 30 LA 10 10 20 20 30 30 20 25 30 J 4 4 4 4 4 4 6 6 6 Stroke (mm) 5 10 15 20 25 30 40 50 60 26 Compact Slide MXH Series Dimensions: 20 LT MXH MXH 20 31 MXS MXQ 14 LA LB J x M5 x 0.8 Depth 6.5 MXQ MXF 3 x M6 x 1.0 through 2 x 2 x M5 x 0.8 Cylinder port (With plug for port) MXW Pilot hole dia 5.1 2 x 3 x 9.3 counterbore depth
Through holes Double end taps Extension locking Easy manual unlocking B Locked A 40 to 100 20 to 32 W Retraction locking Unlocked 40 to 100 20 to 32 W A B Wide variations from 20 to 100 Standard stroke (mm) Locking direction Bore size (mm) Mounting Series 5 10 15 20 25 30 35 40 45 50 75 100 20 Through holes, double end taps common 25 Extension locking 32 40 CLQ Through holes 50 Retraction
15 20 20 2 pcs. 5 10 15 10 20 15 Auto Switch Mounting Bracket Part Nos.
LAT3LAT3MLAT3F600 350 700 Min. travel time [ms] Min. travel time [ms] Min. travel time [ms] Load weight1000g Load weight1000g Load weight1000g 300 600 [ms] 500 [ms] [ms] 700g 700g 700g 250 500 400 500g 500g 500g 200 400 300 150 300 200 100 200 300g 300g 300g 100 100g 100g 50 100 100g 0g 0g 0g 0 0 0 0 10 20 30 40 50 0 5 10 15 20 25 30 0 10 20 30 40 50 Total travel distance [mm] Total travel
(Refer to pages 15-6-3 to 15-6-5 for details.)
Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD
15 20 20 2 pcs. 5 10 15 10 20 15 Auto Switch Mounting Bracket Part Nos.