Support Guide/11-LEFG Series

Environment Clean Room Specification ISO Class 4*1 (ISO14644-1) Built-in vacuum piping Possible to mount the main body without removing the external cover etc. Body-integrated linear guide specification *1 Changes depending on the suction flow rate.

Thermo-con/Rack Mount Type

Noise level Power consumption Air-cooled HECR004/006*1 49 dB 200 W HECR002 55 dB HECR004/006*1 400 W HECR008/010*2 Air-cooled Water-cooled HECR008*2 54 dB HECR008/010*2 300 W 200 W HECR012*2 48 dB Water-cooled HECR008/012 *1 200 W load *2 500 W load *1 200 W load *2 500 W load Simple operation Fluid fill port Fluid can be supplied without removing the product from the rack.

Ionizer

12 12 1 5 4.8 Static Neutralization Equipment Connection cable B (6P)/IZS31-CR 230 +60 0 1 1 Alphabetical Index Length Measuring/ Counter 6 6 Sensor bracket/IZS31-BL 4 x 4.5 20 14 48 35 10 84 20 4.5 100 34 663 A Series IZS31 Made to Order 1 Please contact SMC for detailed dimensions, specifications, and lead times.

IDX-OM-W094

11-2 12 T . 12-1 12.1 . 12-1 12.2 . 12-1 12.3 . 12-2 12.4 . 12-3 12.5 . 12-4 13 V . 13-1 13.1 . 13-1 13.2 . 13-1 13.3 . 13-2 14 . 14-1 14.1 . 14-1 IDFA60/70/80/90 Series IDX-OM-W094 1 1.1 z z z z z z z z z () 6.2 z 1.1.1 3 IDFA60/70/80/90 Series 1-1 IDX-OM-W094 1.2 6 1.2.1 1.2.2 50 1.2.3 0 IDFA60/70/80/90 Series 1-2 IDX-OM-W094 1.2.4 IDFA60/70/80/90 Series 1

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

circuit (power) 0: disable, 1: enable 1 Monitor short circuit (out) 0: disable, 1: enable 2 Inrush current filter 0: disable, 1: enable 2 3 Restart after short circuit (Output) 0: manual, 1: auto 4..5 Input filtering time 0: 0.1 ms, 1: 1 ms, 2: 10 ms, 3: 20 ms 6..7 Input extension time 0: 1 ms, 1: 15 ms, 2: 100 ms, 3: 200 ms Channel parameter Channel 0 to 7 0 (Ch0 input) Monitor counter

Trimmer Auto Switch

(Including Nut, Screw, (Spacer)) Cylinder series Bore size 12 16 20 25 32 40 50 63 80 100 125 140 160 CQ2 BQ-1 BQ-1 BQ-1 BQ-1 BQ-2 BQ-2 BQ-2 BQ-2 BQ-2 BQ-2 BQ-2 BQ-2 BQ-2 MU BMU1-025 BMU1-025 BMU1-025 BMU1-025 BMU1-025 MK/MK2 BQ-1 BQ-1 BQ-2 BQ-2 BQ-2 BQ-2 6 Series D-M9K/D-7K/D-RK How to Mount and Move the Auto Switch D-Y7K Mounting Bracket Tie-rod Mounting Type

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

L3 (1) Model Port size Max. Dimensions AS420 AS500 AS600 67.5 74 90 1/4, 3/8, 1/2 3/4 1 38 42 55 122 115 158 112 105 148 50 50 62 L1 L2 L4 Min.

Title not found

3/8 5 AF4000 1/4, 3/8, 1/2 Float style auto drain AF4000-06 3/4 Pressure differential auto-drain 3/4, 1 AF5000 AF6000 1 Mist Separator Series AFM AFM2000 1/8, 1/4 Bracket AFM3000 1/4, 3/8 0.3 Float style auto drain AFM4000 1/4, 3/8, 1/2 Pressure differential auto-drain AFM4000-06 3/4 Micro Mist Separator Series AFD AFD2000 1/8, 1/4 Bracket AFD3000 1/4, 3/8 0.01 Float style auto drain AFD4000

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

DXT083-13-1 Qty. 1 pc. Hexagon socket head screw DXT083-19-1 2 pcs.

Heavy Duty Stopper Cylinder

A93 A90 12 V 5 V,12 V IC circuit 100 V Relay, PLC 2-wire No 100 V or less 1 Water resistant type auto switches can be mounted on the above models, but in such case SMC cannot guarantee water resistance.

Series KV2 Fittings

(g) Bag/Box Quantity D1 L1 5/32 1/4 1/4 3/8 3/8 1/2 1/2 1/4-18 1/8-27 1/4-18 1/4-18 3/8-18 3/8-18 1/2-14 KV2E03-35 KV2E07-34 KV2E07-35 KV2E11-35 KV2E11-36 KV2E13-36 KV2E13-37 1/2-20 9/16-18 9/16-18 7/8-14 7/8-14 1-12 1-12 17.46 17.46 17.46 25.40 25.40 28.57 28.57 17.46 17.46 17.46 25.40 25.40 28.57 28.57 31.0 27.5 32.4 34.5 36.9 37.1 41.2 14.7 9.8 14.7 12.1 14.5 13.7 17.8 16 17 17 21 21 22

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Metric sizes Type 4 6 8 10 12 04 06 08 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 x 0.8 1/8 1/4 3/8 1/2 M5 01 02 03 04 With One-touch fitting Clean specification Metal part material Q G Brass (electoless nickel plated) Stainless steel (SUS304) Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

depth 22 Up to 300 50 32 25 37 3 40 40 22 71 20 110 20 16 10 M26 x 1.5 M12 x 1.75 depth 22 Up to 300 60 41 30 37 3 40 50 26 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 NA P S TA TB ZZ 11 11 77 1/8 24 114 Up to 200 11 11 77 1/8 29 119 Up to 300 11 11 79 1/8 35.5 121 Up to 300 12 12 87 1/8 44 139 Up to 300 13 13 102 1/4 55 162 Up to 300 13 13 102 1/4 69 162 Up to 300 122

212

Applicable model LVR20 LVR40 LVR50 03 3 x 2 LVR20 LVR40 LVR50 03 1/8" x 0.086" 04 4 x 3 05 3/16" x 1/8" 06 6 x 4 07 1/4" x 5/32" 10 10 x 8 11 3/8" x 1/4" 12 12 x 10 13 1/2" x 3/8" 19 19 x 16 19 3/4" x 5/8" LQ3 Metric size Inch size Symbol Applicable tubing size Applicable model Symbol Applicable tubing O.D.

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

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AS-FPQ/AS-FPG

Note) Metric sizes 04 06 08 10 12 4 6 8 10 12 Elbow Control type 0 1 Meter-out Meter-in Note) For applicable tubing O.D. selection, refer to the Model on page 711.

AS-FPQ/AS-FPG

Note) Metric sizes 04 06 08 10 12 4 6 8 10 12 Elbow Control type 0 1 Meter-out Meter-in Note) For applicable tubing O.D. selection, refer to the Model on page 711.

Clean Air Module

drop 1 V or less Max. 80 mA Internal voltage drop 1.5 V or less SFD NPN open collector 1 output + Analog output PNP open collector 1 output + Analog output LLB LLB LLBF (F1) P2 P6 P1 P5 LLB-F (F1) AD Brown Brown DC (+) 1 1 Black OUT1 Load GD Main circuit Main circuit Black OUT1 4 4 12 to 24 VDC White Analog output White Analog output Load 12 to 24 VDC 2 2 Blue DC () Load Load Blue 3 3 P1

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

53.5 28 40 242 36.5 30 6.8 6.6 12 16 M6 x 1 M8 x 1.25 14 372 354 186 190 124 158 118 116.5 73 106 144 140 64 30.5 43 286 40.5 35 8.6 8.5 14 15 M8 x 1.25 M10 x 1.5 Model FF II NN AA BB CC DD EE GG JJ KK LL MM WW XX ML1C25 ML1C32 ML1C40 1/8 5 5 5 5 7 28 26 14 44 20 16 12.5 120 42 1/8 6 5 6 5 8 36 28 18 54 36 18 12.5 140 48 1/4 6 5 6 5 8 47 30.5 17 62 30 22 16.5 170 51 9-14-8 9 Series ML1C Mechanically

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

53.5 28 40 242 36.5 30 6.8 6.6 12 16 M6 x 1 M8 x 1.25 14 372 354 186 190 124 158 118 116.5 73 106 144 140 64 30.5 43 286 40.5 35 8.6 8.5 14 15 M8 x 1.25 M10 x 1.5 Model FF II NN AA BB CC DD EE GG JJ KK LL MM WW XX ML1C25 ML1C32 ML1C40 1/8 5 5 5 5 7 28 26 14 44 20 16 12.5 120 42 1/8 6 5 6 5 8 36 28 18 54 36 18 12.5 140 48 1/4 6 5 6 5 8 47 30.5 17 62 30 22 16.5 170 51 9-14-8 9 Series ML1C Mechanically