Mini-Rotary Actuator Series CRJ Rack-and-Pinion Type/Size: 05, 1

BH BI (UU) 2-M3 x 0.5 (opposite side, same location) (For front port, use hexagon socket head set screw) Q H 2-J through JA depth of counter bore JB (opposite side, same location) 1.5 S BE CA CB BF DD D BD BG A 2.2 (0.4) Note 1) SD 16 BA 2-M3 x 0.5 depth 4 BB W 2-M3 x 0.5 (For side port, use hexagon socket head set screw) N BC Note 2) For the 180 specification, the slated line area do not

Escapements Series MIW/MIS

KB Mounting threads 4-MA thread depth MB HB depth HC HD KA 3 4 Groove position for auto switch mounting HE MD MC 2-HA depth HC D FC GC A B C EA EB FA FB FD FE FF FG FH GA GB GD 111 155 44 64 21 29.5 35 48.5 23 28.5 8 11 19 25.5 10 13 4.5 6.5 Model MIW12-12 MIW20-20 10 (Effective depth 4) 9.5 12.5 3.3 5.1 12.5 16.5 37 54 34 43.5 M3 x 0.5 M5 x 0.8 8 11 076 106.5 6 (Effective depth 3) HA, HB

Modular Type Filter Regulator Series AW

Note 2) When the compressor oil mist discharge concentration is 30mg/m3 (ANR). Note 3) Bowl O-ring and other O-rings are slightly lubricated. Note 4) When the outlet pressure is 0.5MPa. (The rated flow varies depending on the set pressure.) Keep the air flow within the rated flow to prevent an outflow of lubricant to the outlet side.

MXH Series Compact Slide

socket head set screw) 4-M5 x 0.8 x 4l Guide rail width 5 3-M4 x 0.7 through Bottom hole dia. 3.3 6-6 counter bore depth 3.3 4-M3 x 0.5 Depth 5.5 2-M5 x 0.8 6.5 5 4-M3 x 0.5 Depth 4.8 17 38 39 15 19 10 18 19 18 5 5.5 10 5.5 5.5 NS 4 9 10.5 8.5 31 + Stroke 39.5 + Stroke 16 4-M3 x 0.5 Depth 4.8 5 + Stroke 10 Stroke (mm) NS LT LB LA J 5 42 14 10 4 10 42 14 4 10 15 24 52 4 20 20 24 20 52

Short Stroke Electric Actuator Series LX

Transfer load m (kg) a = 1000 a 2000 a = 2000 Mey L3 (mm) a = 3000 m 1000 L3 3 0 2 1 Transfer load m (kg) Refer to page 304 for deflection data. 210 5 Phase Stepper Motor/Without Motor Brake Series LXF Dimensions/LXFH5BC Scale: 35% (5) 2-M2.5 x 0.45 depth 2 5 Stroke + 113 10.5 2.5 2-M4 x 0.7 thread depth 9 31 G 28 58 5H9 +0.030 0 depth 5 (5.5) 10 D-M4 x 0.7 (for work piece mounting) 10.5 12 2-M3

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

DIN rail holding screw A: Orange B: Green Power supply terminals (M3 terminal screws) L2 5 The voltage indication marking is for 24VDC.) ( (Rail mounting hole pitch 12.5) L1 (Station n) .

IDX-OM-U021

P 1-2-5 R 30A (IDF100F, IDF125F, IDF150F) 30Ma 1-2-6 V ON 1.5 OFF 0.5 1-2-7 3 2 1 1-2 IDF100150F 1 2 IDX-OM-U021 1 1-3 A 3 300 A 1-3 IDF100150F 1 3 IDX-OM-U021 1 B V IDF100F V IDF125F V IDF150F B 1-3 IDF100150F 1 4 IDX-OM-U021 1 3.6 5.2 (IDF100F, 125F) R OFF 5.2 L1 L2 L3 M5 9.5mm 3.5mm 2 1,2 3,4 5,6 L1,L2,L3 PE: L1 L2 L3 PE 1 2 3 4 5 6 M4 9.5mm 5.5mm 2 M3

IDX-OM-Z004

: 6.5mm M3 0.631Nm OFF 56 alternate ON ONOFF OFF IDF100150F-W 2.2 2 8 IDX-OM-Z004 2 2.3 2.2.1 1. 2. 2 3. 4. 5.

IDX-OM-V020

/h(ANR) 1.00 0.89 0.80 256 m3/h(ANR) 7.2 Refrigerant and GWP value Global Warming Potential (GWP) Revised Fluorocarbons Recovery Refrigerant Regulation (EU) No 517/2014 and Destruction Law (Based on the IPCC AR4) (Japanese law) R410A 2,088 2,090 Note 1: This product is hermetically sealed and contains fluorinated greenhouse gases (HFC). 7.2 Refrigerant and GWP value IDFA60/70/80/90 Series

IDX-OM-W032

1 2 IDX-OM-W032 2 2 2-1 50kg 2-2 2 2 1 2000m 240 050 600 mm 600 mm 600 mm 600 mm 600 mm ( ) IDFA Series 2-1 2 1 IDX-OM-W032 2 2 2 2 6 6-3 2 2 3 50 50 OUT IN (IN) (OUT) 2 2 4 10mm IDFA Series 2-2 2 2 IDX-OM-W032 2 2 2 5 6-1 IEC AC230V [30mA 10AIDFA75E 20A] 216AWG 812mm 3 () 1.25mm 0.2m 30m M3 1.25-3 6.5mm M3 0.631Nm IDFA Series 2-2 2 3 IDX-OM-W032 2 2-

VQZ100V-OMT0001

No. 1 1 1 1 1 M3 M3 M3 M3 1/4 0.4~0.5Nm 1) 1) 1) 1) [ [ [ [ ] ] ] ] 1 ()ISO VG32 (MSDS) [ [ [ [ ] ] ] ] 1 ()ISO VG32 2 ()ISO VG32 (MSDS) 6 No.VQZ100V-OMT0001 VQZ VQZ VQZ VQZ 3 3 3 3 5 5 5 5 / / / / , ( ( ( ( ) ) ) ) 5m ( ( ( ( ) ) ) ) 3 30 ( ) 1 ()ISO VG32 2 ()ISO VG32 IP65 (IEC60529) IP65 7 No.VQZ100V-OMT0001 VQZ Series/ / / / L L L L /M /M /M /M ()() VQZ100 VQZ100 VQZ100

VP300-OMP0001

No. 1 1 1 1 1 M3 M3 M3 M3 1/4 0.4~0.5Nm 2 2 2 2 M5 M5 M5 M5 1/6~1/4 1~1.5Nm 1) 1) 1) 1) ISO VG32 (MSDS) 6 No.VP300-OMP0001 VP Series VP Series VP Series VP Series 3 3 3 3 / / / / ( ( ( ( ) ) ) ) ( ( ( ( ) ) ) ) 30 () 1 ()ISO VG32 2 ()ISO VG32 IP65 (IEC60529) IP65 7 No.VP300-OMP0001 VP Series VP Series VP Series VP Series/ / / / L L L L /M /M /M /M 3.2~3.7mm () (+-) () (1mm

m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s, .16975 lb, ModelPort sizeMass (Bottom ported)Mass (Rear ported)Leakage02R1/4117 g89 g1 x 10?5 Pa?m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s

Size: 1 (M3, M5 Basis), Thread: Rc (Metric thread, M3, M5), Port Size: M3 (M3 x 0.5)

Size: 1 (M3, M5 Basis), Thread: Rc (Metric thread, M3, M5), Port Size: M3 (M3 x 0.5), Option: None, Lock Nut: J (Round)

Modular F.R.L. Pressure Control Equipment

Use the attached mounting screw (M3 x 0.5 x 14) for mounting. The mounting screw (M3 x 0.5 x 7) attached to the digital pressure switch assembly will not be required.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

Pressure Control Equipment O-ring Cross recessed round head screws (with SW) (M3) End block Tie-rod For common supply blocks, reversible and double-sided mounting is available. Common supply tie-rod Industrial Filters Cross recessed round head screws (with SW) (M3) Tightening torque: 0.32 0.03 Nm 451 Series ARM5A/5B/5S Replacement Procedure of Diaphragm 4 4.

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

A Mounting screw (M3 x 8L) (Accessory) Waterproof seal (Accessory) Option 2 Panel mount adapter Nil None Panel Sensor connector (4 pcs.) Front protection cover + Panel mount adapter 4C B Connector Mounting screw (M3 x 8L) (Accessory) Front protection cover Connector is not connected, but shipped together. This connector cannot be used with the PSE570 series.

0.4

Manifold base recommended dimensions Lead wire Base mounting hole 1 (IN) 2 (OUT) 1 (IN) 9.5 or more Valve mounting pitch 2 (OUT) A A M3 x 0.5 Thread depth 5 2 (OUT) port 1 (IN) port 3 M3 x 0.5 Thread depth 5 Electrical entry can be on the either side, right or left. 2 (OUT) port 3 11 11 40 Sectional view A-A (2:1) 4 4 46 or more RZ12.5 1 (IN) port 510 High Speed 2 Port Valve SX10 Series Control

Vacuum

Series sY100A o M3 o.22 (O.O12l sYJ300 o a M3 0.9 (0.05 NVZ300 a a M5 3.6 (0.2 NVZ500 o o 1/8 9.0 (0.s) NV2200 o M5 3.24 (0.18) NVZ400 o 1ta 9.0 (0.5) NVS3115 a a 1t8,'v4 '19.8 (1 .1 NVS3135 o o U4,3lA,112 46.5 (2.58) NVS3145 a o 1t2,3/4 81 (4.s) vx2 a o 1t8-1t2 3-31 (0.171.7) vx3 o o 1t8,3/4, 1t4 1.4-9 (0.08-0.s) vxz2 a 1 t 4 1 34-215 (1 .9-12) sg-z s4 118" 5132', s'lo aE qg 1t4'5t16',31A