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Body poned type 3 Position Closed Center 3 Position Exhaust Center Closed Center ^"^ttrnEn I/\^ qft4hril-F!

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Body poned type 3 Position Closed Center 3 Position Exhaust Center Closed Center ^"^ttrnEn I/\^ qft4hril-F!

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

ENI 3 Position : NVJA332O-M3(-F) NVJA3420-M3(_F) NVJA3520_M3(_F) c 0.75(191 . r t Base Mounted Ifupe uith Subplate z rosition Sinsle : NvJA314o-M5 2 Posiiion Double : NVJA324O-M5 dtt l5+trEl e f,3 + t . q l l ' D i i @, s T ' t t s I i t o # L .-:r, , .r.r, ., ,, , 3 Poition : iWJA334GM5 NVJA34405 NVJA354GM5 0.04(l )Dia 2 ports

LVQ

Size 1 2 1 2 3 1 2 1 2 A B C A B A B A B 2 2 3 3 3 4 4 5 5 2 2 2 3 3 4 4 5 5 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 SMC SMC P U Panel mount union Union SMC SMC With reducer Basic size Note) Select the fittings of the same size as the one at the valve side

Profile Design ISO/VDMA Air Cylinder Series CP95

Piping length [m] Air consumption Q [Nl/min.] 4 3 100 cylinder [mm] 40 50 63 80 2 2 100 100 Stroke [mm] Air consumption Q [Nl/min.]

CJ5-S

3 w With air cushion !2 !1 i r !3 y o q u e !0 w Component Parts No. q w e r t y u Description Material Description Material No. CG5SR CG5SV Rod cover Stainless steel 304 Water resistant scraper Head cover Stainless steel 304 i Rod seal Cylinder tube Stainless steel 304 o NBR FKM Piston seal Piston rod Stainless steel 304 !0 Valve seal Bumper Urethane !

CJ5-S

3 w With air cushion Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !2 !1 i r !3 y o q u e !0 w Component Parts No. q w e r t y u Description Material Description Material No.

ML2B

9 @0 @8 #4 $2 $3 $9 %2 ^0 ^7 Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 2 2 4 2 2 6 4 8 2 6 2 1 2 4 4 3 4 4 1 1 4 1 4 2 1 1 1 2 2 1 1 1 2 1 1 1 8 4 2 1 6 No. q w e r t y u i o !0 !1 !2 !3 !

ML2B

6 e q #5 #4 $9 $1 $0 ^1 ^0 $7 $8 ^0 !2 #2 @4 !3 %0 %1 %2 !0 @2 ^3 @1 #3 ^6 $6 %3 @6 $5 ^2 %5 %6 @5 $4 ^0 $3 #1 ^5 %7 @8 $2 o %8 ^7 #0 %9 ML2BS %4 ^4 !

MXQ

8 q @0 !2 e !3 !5 MX MTS t !6 r u y w !

NAAMS Standards Compliant

E E F G H G H I I J K L M N O J K L 8F7 through +0.028 +0.013 +0.028 +0.013 8F7 through M 11 through N O 12.5 300.05 250.03 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 250.03 12.5 11 through P P Q M8 x 1.25 R28 Q 150.03 180.03 M8 x 1.25 8.5 R50 4 33 12.5 8.5 20 550.05 3 22 22 12.5 R7 R27 20 22 22 R7 [mm] [mm] Model NAAMS code A B C D E F

1

40 24.5 1/4 32 35 52.5 28 69.5 57.5 104.5 73.5 XSA3-32V 56 XSA3-43S 64.5 31 3/8 XSA3-43V 67 82.5 72 58.5 66 72 64 66 5 Normal Close High Vacuum Solenoid Valve XSA Series Dimensions: (Rc, NPT) Female Thread Grommet: G Female thread type D 300 G F C H E P Fitting size 2 1 Q B 2 x M5 thread depth M A Q Grommet: GS Flat terminal: F Conduit: C 11 G F 300 G F 280 G F Terminal part Flat terminal

240

3 e u !

Environment

0 i o e r t q u !1 !2 !3 !

C95

3 wu !8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

3 !4 r t y u i !5 !6 No.

Series: 1 (VQZ1000), Composite Symbol: 3 (3 Position Closed Center), Seal Type: 1 (Rubber Seal), Function: R (External Pilot), Coil Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: 01 (Base Mounted w/Sub-plate Rc1/8), Q: Q (CE Marked)

Series: 1 (VQZ1000), Composite Symbol: 3 (3 Position Closed Center), Seal Type: 1 (Rubber Seal), Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: 01 (Base Mounted w/Sub-plate Rc1/8), Q: Q (CE Marked)

Series: 2 (VQZ2000), Composite Symbol: 3 (3 Position Closed Center), Seal Type: 0 (Metal Seal), Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: M (M Plug Connector w/Lead Wire 0.3m), Manual Override: B (Locking Slotted Style), IP65 Compliant: No, Port Size: 01 (Base Mounted w/Sub-plate Rc1/8), Q: Q (CE Marked)

Series: 2 (VQZ2000), Composite Symbol: 3 (3 Position Closed Center), Seal Type: 1 (Rubber Seal), Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: 01 (Base Mounted w/Sub-plate Rc1/8), Q: Q (CE Marked)