SI Unit

Production label Product number MAC address Firmware and Hardware version Firmware version (FW): 1.0.x (X is a number 0 or more) Hardware version (HW): 03 and higher Fig. 6-2 Production label 6.3. PROFIsafe address switch An eight-bit DIP-Switch is provided for the F_Address of PROFIsafe. The switch setting is only checked at power-up.

EX500-Sx03_eng

Before Use Fieldbus system EX500-S 03 Wiring Product Summary LED Display Select the specified branch cable below.

Ionizer Gun

Power supply cable type/ IZG10-03 . 12 4. Function . 13 4-1. Name of parts . 13 4-2. LED indication . 13 4-3. Mode setting switch . 14 4-4. Emitter maintenance (cleaning and replacement) . 15 4-5. Alarm function . 17 5. Performance . 18 5-1. Installation distance and Discharge time (Discharge time of 1000V100V) . 18 5-2.

VEX-OMT0003

Screw tightening torque VO307K: 1.35 to 1.45 Nm V11 : 0.14 to 0.17 Nm Parts for manifold 02 03 04 02 03 04 04 06 10 01 02 10 12 01 02 14 20 Description VEX312VEX322VEX332VEX342VEX350VEX370VEX390Bracket (with bolt and washer) VEX1-18-1A VEX5-32A VEX7-32A VEX9-32A Foot bracket (with bolt and washer) VEX1-18-2A VEX3-32-2A Silencer for pilot exhaust port (PE) AN120-M5 AN103-01 AN210-02 Note 1

CG1

Rod End Nut Material: Rolled steel -03 32-01 -03 Applicable pin O.D. 0.040 0.076 0.040 0.076 0.050 0.093 0.050 0.093 0.050 0.093 0.050 0.093 0.050 0.093 0.065 0.117 Bore size (mm) Part No.

VHS

VHS400-02 VHS401-02 VHS400-03 VHS401-03 VHS400-04 VHS401-04 Pipipng direction VHS500-06 VHS501-06 SA Right IN1 (P) 3 4 1 2 3 8 1 4 Port size Effective area (mm2) Weight (kg) VA 1 (P) 2 (A) 21 105 76 54 35 35 57 93 2 (A) 3 (R) SA 0.25 0.34 Left or right to the front face of the handle.

PF3A7

3-Color Display Digital Flow Switch for Large Flow PF3A7H Series RoHS How to Order PF3A H 10 03 M CS 7 Calibration certificate8 Type 7 Integrated display Nil None A9 Yes 8 Certicate in both English and Japanese 9 Made to order Rated flow range 03 30 to 3000 L/min 06 60 to 6000 L/min 12 120 to 12000 L/min Unit specification Nil Units selection function6 M SI unit only7 6 This product is for

α PneuAlpha HARDWARE MANUAL

HEAD OFFICE: 1-16-4, SHIMBASHI, MINATO-KU, TOKYO 105, JAPAN TELEPHONE: 03-3502-2740 FACSIMILE: 03-3508-2480

ISO Interface

C US How to order ISO 5599/2 Plug-in Manifold VV8 1 5 02 03 D T Size 1 Size 1 2 Size 2 3 Size 3 Port Thread Rc(Pt) T NPTF F G(PF) Number of Stations 1 1 Station Location of P, EA, EB port D Bottom U Top 10 10 Station Note) SU and TBU require one station.

Silencer Compact Resin Type/Male Thread Series AN05 to 40

Performance Weight g Recommended flow m3/min(ANR) Effective area mm2 Sonic conductance C [dm3/(sbar)] Model AN05-M5 AN10-01 AN15-02 AN20-02 AN30-03 AN40-04 0.4 or less 0.5 5 1 1 10 2 0.8 or less 3 2.5 15 1.0 or less 4 7 35 3.0 or less 60 12 5.0 or less 5.5 90 8.0 or less 18 8.5 Note) Recommended flow rate is the flow at 72.5psi (0.5 MPa) in the inlet pressure.

Metering Valve with Silencer Series ASN2

Metering Valve with Silencer Series ASN2 Superior sound reducing performance Over 20 dB at max. flow rate Cylinder speed easily set Shape of needle is the same as that of speed controller Retainer prevents accidental loss of needle Model Model Port size Effective area (mm 2) Weight (g) ASN2-M5 ASN2-U10/32 ASN2-01 ASN2-02 ASN2-03 ASN2-04 M5 x 0.8 10-32 UNF 1.8 1.8 3.6 6.5 16.6 24.5 5 5 17

21- AF-A 10- Series Air Filter

Clean series 10 AF 03 A 30 F J B 21 AF 03 A 30 F J B Copper, fluorine and silicone-free + Low particle generation q w e r t Air filter Option/Semi-standard:Selectoneeachfora to e. Option/Semi-standardsymbol:Whenmorethanonespecificationisrequired,indicateinalphanumericorder.

3 Port Air Operated Valve VPA3145/3165/3185 Series

3 Port Air Operated Valve VPA3145/3165/3185 Series How to Order 04 4 5 1 VPA3 Thread type VPA Air operated valve Nil Rc G NPT NPTF F N T Port size (IN, OUT port) Number of pilot 1 Single Symbol Port size Rc size VPA3145 VPA3165 VPA3185 Body size (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 03 04 1 2 1 4 6 06 10 12 14 20 8 1 2 1 Valve option Nil For ordinary pressure For vacuum and low pressure

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

Recommended flow rate Note) (l/min (ANR)) Mass (g) Internal capacity (cm3) 1.7 ZA Model IN side, OUT side 2 3.2 4 4 6 6 8 1/8" 5/32" 5/32" 1/4" 1/4" 5/16" ZFC050-02 ZFC050-23 ZFC050-04 ZFC100-04 ZFC100-06 ZFC200-06 ZFC200-08 ZFC051-01 ZFC051-03 ZFC101-03 ZFC101-07 ZFC201-07 ZFC201-09 2 7 10 10 20 30 50 7 10 10 20 30 50 4.9 ZX 1.7 4.3 IN/OUT straight piping Metric size ZR Easy installation

VEX-OMY0001

04 02 03 04 04 06 10 10 12 01 02 01 02 14 20 VEX312VEX322VEX332VEX342VEX350VEX370VEX390( ) VEX1-18-1A VEX5-32A VEX7-32A VEX9-32A ( ) VEX1-18-2A VEX3-32-2A P2 AN120-M5 AN103-01 AN210-02 1) VEX1-9-1P VEX4-2A-P VEX1-11-2 VEX4-4 DXT152-14-1A NXT013-3 VO307K-1 2) 3) VEX322 VEX342 Rc A 1/8 1/4 F G VVEX2 VVEX4 B 1/4 3/8 N NPT ( ) VEX1-17 VEX4-5 C 1/2 T NPTF 11 No.VEX-OMY0001 (2) () 3

Dedicated Controller Series LC1 Uniaxial Type

1-RD 12 7.5 7.5 20 21 29 30 Cable length 02 2m 04 4m 03 3m 05 5m PC Controller Controller connector The connector used for CN1 (control terminal) and CN2 (generalpurpose input/output).

Size: 3 (Body Ported), Operation: 0 (Air Operated Style), Sealant: Nitrile Rubber, Port Size: 02 (1/4), Thread: N (NPT), Option: BG (Bracket+Gauge)

Size: 3 (Body Ported), Operation: 0 (Air Operated Style), Sealant: Nitrile Rubber, Port Size: 02 (1/4), Thread: N (NPT), Option: BGN (Bracket+Pressure Gauge+Silencer for Bleed Port)

Size: 3 (Body Ported), Operation: 0 (Air Operated Style), Sealant: Nitrile Rubber, Port Size: 03 (3/8), Thread: N (NPT), Option: BG (Bracket+Gauge)

Size: 3 (Body Ported), Operation: 0 (Air Operated Style), Sealant: Nitrile Rubber, Port Size: 03 (3/8), Thread: N (NPT), Option: BGN (Bracket+Pressure Gauge+Silencer for Bleed Port)