HEC_W-E

When the temp. set in this item is reached, the alarm [ERR13] arises. 8-7 Operation 8.6.2 Setting mode, Level 2 F i n e C o n t r o l o f I n t e r n a l S e n s o r M O D E < 0 . 0 7 C 1. Fine Control of Internal Sensor Setting range : -9.99 to 9.99 C Min. increment : 0.01 C Indicated content : Fine adjusting value for internal temp.

Clamp Cylinder with Lock Series CLK1

A B 3 5.5 7 7 15 60 65 + 45 (n-2) D-H7, D-H7W D-H7F 30.5 28.5 30 30 n-2 2 15 + 50 ( ) (n = 2, 4, 6...) Approx. Hs 30.5 35 40.5 47.5 D-H7C 15 65 10 65 + 50 (n-2) A B Approx. Hs 3 5.5 7 7 n-2 2 D-H7C 31.5 28.5 30 30 15 + 50 ( ) (n = 2, 4, 6...)

HRX-OM-S004

OFF Press together OFF ( 0 . 7 i n ) Fig. 4-7 Alarm release 8. Repeat steps 1 to 4 to supply the circulating fluid to the users equipment and piping.

-fl Seies

qn D N coreclor.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

qn D N coreclor.

Air Slide Table Series MXQ

"n" pcs.

ZPT/ZPX

N 11.8 N First mounting load Second mounting load 10 N 15 N 13-11-79 12 Series ZPX ZPX HJ-B01-A18 (With buffer) 40 50 ZPX HJ-B01-A18 (With buffer) 63 80 Hexagon width across flats 14 Hexagon width across flats 14 Hexagon width across flats 27 Hexagon width across flats 27 Width across flats 16 Width across flats 16 Hexagon width across flats 21 Hexagon width across flats 21 Width across

Digital Flow Switches, Series PF2A, Series PF2W

Flow rate conversion NO OFF n-2 n-1 High flow rate Basic state: 0C, 101.3kPa Standard state: 20C, 101.3kPa, 65%RH (ANR) Switchable between these states.

10

N 306 115 6 1700 N 3 325 134 7 2000 N 449 191 10 6000 N 487 229 12 8500 N 611 287 15 Note) Load on mounting frame is at room temperature (20 to 25C). 916 478 25 Caution 4.

Digital Flow Switches

Flow rate conversion NO OFF n-2 n-1 High flow rate Basic state: 0C, 101.3kPa Standard state: 20C, 101.3kPa, 65%RH (ANR) Switchable between these states.

PF2A/PF2W

Flow rate conversion PF2 NO OFF n-2 n-1 High flow rate Basic state: 0C, 101.3 kPa Standard state: 20C, 101.3 kPa, 65%RH (ANR) Switchable between these states.

100

A 22.2 40 N 9.8 7.9 214.6 26.6 188 55 124 Vacuum (2/V) port thread type symbol Nil: Rc thread F: G thread N: NPT thread 2 x 4.1 Mounting hole3 (Recommended tightening torque: 0.56 to 0.76 Nm) Exhaust port thread type symbol Nil: Rc thread F: G thread N: NPT thread (30) Pressure gauge (Included) 3 x 4.4 Mounting hole3 (Recommended tightening torque: 0.56 to 0.76 Nm) Exhaust direction (6) 9

energy saving effect

NPT1) Tank drain port Rc3/4 (Symbol F: G3/4, Symbol N: NPT3/4) Automatic fluid fill system (Standard) Circulating fluid system Pump capacity Supply side pressure range MPa 0.2 to 0.5 Supply side fluid temperature C 5 to 35 Automatic fluid fill port Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Overflow port Rc1 (Symbol F: G1, Symbol N: NPT1) Fluid contact material Metal Stainless steel, Copper

Digital Flow Switch Series PFA For Air Series PFW For Water

Hysteresis mode GPM gal (US) OFF n-1 n-2 GPM = gal (US)/min High flow rate Note 1) For the type with unit switching function [The type without the unit switching function will have a fixed SI unit (l/min or l).] "n" H (fixed hysteresis) = 3 digits H H ON Window comparator mode NO OFF n-1 n-2 High flow rate 5 Series PFA Flow Rate Setting Flow rate setting mode (manual) 1.

IDX-OM-W011

9.5mm 2 1.25mm L ,N N L () () IDF Series 12-1 12 1 IDX-OM-W011 12 R AC100V M4 () AC200V (M3) 12-4 () () ONOFF 12-5 1-1 IDF Series 12-4 12 2 IDX-OM-W011 13.S 13 S 13-1 IDF1E15E1-10 IDF Series 13-1 13-1 IDX-OM-W011 13.S 13-2 IDF1EIDF3E L N PE M3 6.5mm 2 1.25mm IDF4E15E1 L N PE M3 6.5mm 2 1.25mm 13-3 1-1 IDF Series 13-2 13-2 I D XO M W 011 14 T 14 T I D

IDX-OM-W023

PRS FM1 PRS FM1 P P C12 FM2 FM2 MOV MOV M For Option M M For Option M M For Option M M For Option M IDU11E-10-T IDU8E/11E-23-T GFCI R For Option R GFCI GFCI GFCI R For Option R R For Option R GFCI R For Option R R For Option R For Option R R For Option R TB N L 3 2 1 PE 3 1 2 PE N L Operation Failure 3 1 2 PE N L 3 1 2 PE N L TB L N PE 2 3 1 TB TB ILS TB TDR MC TDR MC ILS TDR MC

RB/RBL/RBQ

Nm cycle/min C 2 gh R m RHC m 2 1 2 m 2 1 2 m 2 1 2 1 2 T S R 2 mgh F1S S T t m m Nm C m/s kg MK(2) E1 + E2 mgS mgS F1S mgS F1S + mgS RS Q G E 2 2 E1 + E2 E1 + E2 E1 + E2 E1 + E2 E1 + E2 d p F T n t kg RS H A Me 2 2 2 E 2 2 E 2 2 E 2 2 E 2 E m = 20 kg = 0.7 m/s d = 40 mm p = 0.5 MPa n = 20 cycle/min t = 25C rad/s 2.

Compressed Air Preparation Filter

Bracket B Line filter Mist separator Micro mist separator Bracket A Mounting screws Specific Product Precautions Bracket mounting view 14 AFF/AM/AMD Series Dimensions AFF/AM/AMD20 AFF/AM/AMD30 AFF/AM/AMD40 M D J U J D M S U N T S N T 2 x P (Port size) 2 x P (Port size) R Q Q R V C V C B G IN OUT IN OUT B G Maintenance space A Maintenance space E A AFF/AM/AMD50 AFF/AM/AMD60 J M D N T U S 2

HRX-OM-W002

Piping thread type : When N is selected, NPT thread adapter set will be added.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

25-MLA [ISE35-N-25-M (Switch body only)] NPN output / Wiring bottom entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top entry Note 4) Digital type ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring bottom entry ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] PNP output / Wiring top entry Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40