Floating Joint

Floating Joint RoHS Compact Model Connection thread Shortened dimensions Overall length JT20 M8 x 1.25 12.3 mm 27.2 mm JT32 M10 x 1.25 13.0 mm 33.0 mm Overall length JT40 M14 x 1.5 19 mm 43.0 mm Reduced by19 mm 29 mm New New JT Series Workpiece Cylinder (JCM) JA Series Workpiece Cylinder (CM2) Max. 56% lighter 50 ga22 g (Compared to JA20) Size JA Series New NewJT Series 20 50 g 22 g 32 70 g 38

Multi-connector with One-touch Fittings DMK Series No. of Connecting Tubes: 6, 12

34 11 4 12 5 7 11 43 55 38 Click here for applicable color caps. 250 B

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Weight (g) LEC S LEC SS-T D-M9P(V) D-M9B(V) D-M9N(V) Auto switch model 0.5 m (Nil) 8 7 LEC Y 1 m (M) 14 13 Lead wire length 3 m (L) 41 38 Motorless 5 m (Z) 68 63 LAT Dimensions LZ (mm) D-M9 D-M9V LC3F2 M2.5 x 4 L M2.5 x 4 L Indicator light Slotted set screw Slotted set screw 8 Indicator light 2 3.2 4.6 2.6 4 2.8 2.7 2.7 20 2.8 4 22 3.2 2.6 9.5 Most sensitive position 6 4 6 Most sensitive

Series 11-MXJ Air Slide Table

J I 12 Z ZZ H G 3 +0.03 0 depth 2 GA A 19 3.3 3.5 A 5.8 4 x M4 x 0.7 3 4 3 +0.05 0 depth 2.5 A-A Model G GA H I J K M Z ZZ 11-MXJ8-5 11-MXJ8-10 11-MXJ8-15 11-MXJ8-20 12 18 17 6 17 28.5 44.5 38 45 12 18 17 6 17 28.5 44.5 38 45 19 28 20 8 25 39.5 54.5 48 55 Other dimensions are the same as standard model (Series MXJ). 19 28 20 8 25 39.5 54.5 48 55 829 Air Slide Table 11-MXJ Made to Order Air

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

at Stroke End) Electrical entry direction: Inward Electrical entry direction: Outward D B A C B D-Z7Z8, D-Y7W D-Y5, D-Y7 D-Y6, D-Y7V D-Y7WV D-Y7BA Bore size (mm) A C 16.5 (15) 23.5 (22) 34 (32.5) 46 (44.5) 46 (44.5) 56 (54.5) D 0.5 (1) 3.5 (2) 0.5 (1) 3 (1.5) 5 (3.5) 5 (3.5) C 18 25 35.5 48 48 58 D 2 5 2 4.5 6.5 6.5 C 10.5 17.5 28 40 40 50 D 5.5 2.5 5.5 3 1 1 6 10 15 20 25 32 20.5 27.5 38

Support Guide/11-LEFG Series

50 3.5 3H9 (+0.025 0 ) depth 3 A (Table traveling distance) L 51 (52) 10 10 58 38 48 38.5 (48) 26 24 n x 4.5 Vacuum port Rc1/8 48 120 F D x 120 (= E) B Dimensions [mm] Dimensions [mm] Model L A B n D E F 11-LEFG25-S-50 180 57 160 4 20 11-LEFG25-S-100 230 107 210 Model L A B n D E F 11-LEFG25-S-450 580 457 560 10 4 480 35 11-LEFG25-S-500 630 507 610 11-LEFG25-S-550 680 557 660 12 5 600

Environment

. * If the step motor and servo motors do not meet your specifications, also consider the AC servo specification (Page 46). 38 Model Selection LEF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication For the LECPA, refer to page 40.

Process Gas Diaphragm Valve

Construction Diaphragm Seat Body 1112 B Diaphragm Valve for Ultra High Purity Manually operated type Series AZ3652 & 4652 inch (mm) Dimensions AZ3652 & 4652 Ports: 2PW (Welded) Ports: 2P (Machined) 1.5 (38) 1.5 (38) BAR STOCK BODY Note) FORGED BODY 0.44 (11.2) 2.17 (55) 2.17 (55) 0.44 (11.2) A A B A A Connections: MV, FV Connections: MV B A A A A Connections: TW Connections: TW 1.0 (25.4)

Tank Volume: 38 [1.34 ft³ (38 liter)], Material Type: A [Carbon Steel (SA-414)], Thread: Rc (PT), Drain Valve: None

Tank Volume: 38 [1.34 ft³ (38 liter)], Material Type: S [Stainless Steel (SA240 316)], Thread: N (NPT), Drain Valve: V (Drain Valve)

Tank Volume: 38 [1.34 ft³ (38 liter)], Material Type: A [Carbon Steel (SA-414)], Thread: N (NPT), Drain Valve: V (Drain Valve)

Tank Volume: 38 [1.34 ft³ (38 liter)], Material Type: A [Carbon Steel (SA-414)], Thread: N (NPT), Drain Valve: None

Tank Volume: 38 [1.34 ft³ (38 liter)], Material Type: S [Stainless Steel (SA240 316)], Thread: N (NPT), Drain Valve: None

Tank Volume: 38 [1.34 ft³ (38 liter)], Material Type: A [Carbon Steel (SA-414)], Thread: Rc (PT), Drain Valve: V (Drain Valve)

Tank Volume: 38 [1.34 ft³ (38 liter)], Material Type: S [Stainless Steel (SA240 316)], Thread: Rc (PT), Drain Valve: None

Tank Volume: 38 [1.34 ft³ (38 liter)], Material Type: S [Stainless Steel (SA240 316)], Thread: Rc (PT), Drain Valve: V (Drain Valve)

Tank Capacity: 38 (38 L), Material: A (Carbon Steel, SS400), Safety Valve: R (Set Pressure: 1 MPa), Drain Valve: V (Drain Valve)

Tank Capacity: 38 (38 L), Material: A (Carbon Steel, SS400), Safety Valve: R (Set Pressure: 1 MPa)

Tank Capacity: 38 (38 L), Material: S (Stainless Steel, 304)

Tank Capacity: 38 (38 L), Material: S (Stainless Steel, 304), Safety Valve: None, Drain Valve: V (Drain Valve)