S070

Mounting bracket q Manifold base Solenoid valve body Mounting bracket 4-11-17 18 Series S070 Specific Product Precautions 2 Be sure to read before handling. 2. Body ported manifold type q Remove the clip on the position where the station is to be added by pulling it in the direction indicated by the arrow.

Process Valve

-40A VNA7-50A 1 8 1 4 1 4 1 4 1 105 120 140 77 96 113 53 60 74 26.5 30 37 120.5 137 160 20 24 24 129.5 147 170 170.1 187.6 210.6 211.5 229 252 55 63 74 1 2 1 2 564 A VNA Series Process Valve: 2 Port Valve For Compressed Air and Air-hydro Circuit Control How to Order Pilot Solenoid Valves Valve size 1/2/3/4 Valve size 5/6/7 SF4 5 D 23 Q VO307 5 D 1 Q CE-compliant CE-compliant Coil rated voltage

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

Tf = F x l (Nm) Load : Angular acceleration g = 9.8m/s Load 2 = (rad/s) Lever t : Rotation angle (rad) t : Rotation time (S) Shaft axis Rotary actuator 12 Step Step 2 Consider the impact at the end of the rotation. 3 Consider the allowable shaft load. 1.

ZR

ZR1 W 20 S 1 Ejector exhaust Nozzle diameter 2 Individual exhaust 1 Built-in silencer 10 13 1.0 mm 1.3 mm Port size: RC 1/8 (Nozzle dia. 1.0 to 1.5 mm) RC 1/4 (Nozzle dia. 1.8, 2.0 mm) 15 1.5 mm 18 1.8 mm 20 2.0 mm Maximum vacuum pressure S L 84 kPa 53 kPa 13-3-9 9 Series ZR Ejector Unit/Standard Type (S): Max.

MTS

7 q e @0 !0 o @2 @3 !5 u t !8 @1 r @4 w MX MTS MY 12 to 40 CY @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !

MGC

2 !3 !4 !5 !6 !7 !8 No.

7

9 t q @1 w e @0!4 @3 y !6 o u !7 @2 CK1C (Clevis width 12.5) @4 i !2 !0 !1 !3 !5 Component Parts MK No.

Compact Cylinder Series NCQ8

, 106 (1-1/16"), 150 (1-1/2"), 200 (2"), 250 (2-1/2") N-through hole H-thread C-depth 4 places Z Q Q P-port 2 places J E M2 bolt circle W M1 D-rod dia.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

2 w y r !0 e 1 New PFA Body 2 New PFA Sensor 3 Super PFA Tube 4 PPS Housing A 5 PPS Housing B 6 PPS Housing C 7 POM Bushing 8 PPS Cap 9 FKM Gasket 10 FKM O-ring 11 Stainless steel 304 Thread 12 PVC Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

125

(R) e r Port 3 (R) Port 2 (A) Port 1 (P) Port 23(P2) (Pilot air port) y i Port 2(A) u r y Port 1(P) t q VEX3320 (Air operated) VEX3420 (Air operated) w e q r y y t w r e u t t 12(P1), 23(P2) Port Port 3(R) y y (Pilot air port) r i Port 2(A) u r Port 1(P) t q Port 1(P) Port 2(A) Port 3(R) Component Parts No.

MHF2

Note 2) Excluding the auto switch weight 6 Series MHF2 Construction MHF2-8D, MHF2-8D1 q w u !0 !3 !1 !2 !8 !4 @0 @1 o r t !5 y !9 e !7 MHF2-8D2 i !6 Parts list Parts list Note No. Description No.

Compact Cylinder

D Bore size (mm) A Piping port (1) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) 20 25 B D 32 View from piston rod end 40 (2) (2) (2) (2) (2) (2) C 50 63 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Operating Range

VHK

(mm) Model H Bracket mounting dimensions Q Weight (g) 1(P) R 2(A) 2(A) R 3(R)* L1 L2 L3 L4 L5 L6 M1 M2 Bracket assembly no.

Compact Cylinder with Lock Series CLQ

2 x 2-9 counter bore depth 7 H effective thread depth C 2-5.4 through M5 x 0.8 unlocking port 5.5 (unlocks when pressurized) U I 6.5 VV D M E M5 x 0.8 Rear cylinder port K M E S 3.2 2 x 2-M5 x 0.8 3.2 16 16 Dust cover (manual unlocking unit) W L G B + Stroke A + Stroke Retraction locking LOCK VH1 W1 Dust cover (manual unlocking unit) M5 x 0.8 unlocking port (unlocks when pressurized) Rod

IDX-OM-W020

GFCI 0.25inch (6.5mm) IDFB15E 0.37inch (9.5mm) L N PE GFCI 0.25inch (6.5mm) IDFB Series 9-2 9 2 IDX-OM-W020 10 S 10 S 10-1 10-2 IDFB3E PE 10-1 IDFB Series 10 1 IDX-OM-W020 10 S IDFB4E 11E PE IDFB15 PE 10-2 IDFB Series 10 2 IDX-OM-W020 11 T 11 T 11-1 IEC 11-2 AC115V,5A DC24V,5A (20V,5mA(AC/DC)) 11-3 ON ON/OFF 3 () 5 /1 () 11-1 IDFB Series 11 1 IDX-OM-W020

Power Valve: Economy Valve Series VEX5

Port size E F G H I L M P Q A Model B J R T U C D K N O S Port 2 (A),1 (P) Port 3 (R) VEX5500 VEX5501 133.5 50 25 10 7 25 80 60 81.5 83.5 1 2, 3 4, 60 143.5 62.5 70 156.5 36.5 16.5 20 Center 2 x M6 Thread depth 9 116.5 1 2, 3 4, 1 1 25 VEX5700 VEX5701 160.5 150.5 62.5 90 60 30 15 7 173.5 37.5 100 60 13 88.5 86.5 18 2 x M6 Thread depth 6 136.5 17 82 1 4 1 4 1, 1 1 c Bracket mounting dimensions

Compact Cylinder with Solenoid Valve/

Example) Lead wire length 2000 mm Electrical entry When ordering cylinder with valve CVQM32-30-M9B-5MOZ SY100-30-4A-20 M-type plug connector with lead wire (Lead wire length 300 mm) M MO M-type plug connector without connector 5 Series CVQM Dimensions 32 to 63 EXH 2 x P2 F SUP P1 S S Q 2 x HB through Manual button 2 x HA through V W 2 x 2 x OA effective length RA KA 2 x N through Y EB (KB

10

Number of auto switches Number of fingers 2 2 Nil 2 S 1 n n Bore size 10 10 mm 16 16 mm 20 20 mm 25 25 mm Auto switch Nil Without auto switch (Built-in magnet) For applicable auto switches, refer to the table below.

MXH

4 @2 u o !3 @4 e !5 !1 r u @2 @3 !3 @4 e !2 MXH16/20 (16, 20) @0 y @1 !7 w q!9 t !8 i !0 !1 r u @2 @3 !3 @4 e !2 Component Parts Description Material Note Description Material No. q w No. !2 !3 !4 !5 !

Symbol: FG (2-Position), Solenoid: S (Single), Voltage: 2 (200V AC), Option: None, Seal: R (Rubber Seal), Subplate: A04 (Side Ported 1/2), Thread: T (NPTF)