HRX-OM-Z015

A 0x00,0xFA Checksum ASCII:LRC RTU:CRC F,F 0x39,0x73 Trailer CR/LF None Total quantity of byte 15 7 Response message at a circurating fluid return temperature of 25.0 HRLE Series 3.13 Register Map 3-23 HRX-OM-Z015 Chapter 4 Communication alarm function Chapter 4 Communication alarm function Monitors whether the serial communication is sent/received properly between the product and the customers

Compact Cylinder with Air Cushion and Lock Series RLQ

Description RLQ40 RLQ50 RLQ63 T2 63.4 73.8 80.3 T3 57.8 67.8 74.3 TH 47.9 57.3 57.3 TP Rc, NPT, G 1/8 Rc, NPT, G 1/4 Rc, NPT, G 1/4 T1 81.4 93.3 99.8 Compact Cylinder with Air Cushion and Lock PT elbow Restrictor PT tee 32, 40: AS2200-(N, F)01-S 50, 63: AS2200-(N, F)02-S 32, 40: KRL06-01SW2 50, 63: KRL06-02SW2 TRB0604W KR-06C 2 Metal speed controller 5 2 Male elbow By-pass tubing Spatter

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

CJ5-S

side GB F NN MM GA Piping port 2-M5 x 0.8 Cover surface Piping port M5 x 0.8 0 0.3 CEP1 BA CB D CE1 LH LB LY CE2 With head cover port in axial location (R) 0 0.3 LT BB NB A ML2B NA X Y LX LZ S + Stroke Z + Stroke H C J G5-S CV 2-LC Mounting hole MVGQ CC Bore size (mm) A BA BB CA CB D F GA GB H LB LC LH LT LX LY LZ MM NN NA NB S X Y Z 10 15 15 17 14 4 8 8 5 28 21.5 5.5 14 2.5 33 25 42 M4

CJ5-S

H C J G5-S CV 2-LC Mounting hole MVGQ CC Bore size (mm) A BA BB CA CB D F GA GB H LB LC LH LT LX LY LZ MM NN NA NB S X Y Z 10 15 15 17 14 4 8 8 5 28 21.5 5.5 14 2.5 33 25 42 M4 x 0.7 M10 x 1.0 12.5 9.5 46 6 9 74 12 RB 16 15 18.3 20 20 5 8 8 5 28 23 5.5 14 2.5 33 25 42 M5 x 0.8 M12 x 1.0 12.5 9.5 47 6 9 75 18.3 J D-X 20Data 10-14-7 8 Series CJ5-S Dimensions R V Rod side flange style (F):

Environment

L Foot F Rod flange*2 D Double clevis*3 !2 Cable length Note 2) [m] !3 Driver type * When the driver type is selected, the cable is included. Select cable type and cable length.

MHY2/MHW2

(F: Thrust of one finger) Pressure 0.6MPa 0.5 40 8 0.5 Holding force (N) Holding force (N) 0.4 30 6 0.4 0.3 0.3 20 4 0.2 0.2 10 2 0.1 0.1 0 20 30 50 60 Holding point L (mm) 40 0 30 40 60 70 Holding point L (mm) 50 80 F F F F MHY2-16D MHY2-25D 35 100 Pressure 0.6MPa Pressure 0.6MPa 30 0.5 0.5 80 25 External hold Holding force (N) Holding force (N) 0.4 0.4 60 20 0.3 0.3 15 40 0.2 0.2 10 20

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

Nil N F Rc NPT G OUT 1 IN Port size Symbol 01 02 03 04 06 Class 3 Class 2 Port size 1/8 (6A) 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) Class 4 Voltage 1 2 3 4 36 100VAC 200VAC 110VAC 220VAC 230VAC Orifice size Consult P/A regarding other voltages.

AC Servo Motor Driver (SSCNET /H Type)

(SW1) (SW1) (SW2-3, SW2-4) (SW2-3, SW2-4) 0 33 0 49 1 34 1 50 2 35 2 51 3 36 3 52 4 37 4 53 5 38 5 54 6 39 6 55 ON ON 7 40 7 56 8 41 8 57 1 2 3 4 1 2 3 4 9 42 9 58 A 43 A 59 B 44 B 60 C 45 C 61 D 46 D 62 E 47 E 63 F 48 F 64 -14- 5. Parameter list (Driver side) Please configure the appropriate parameters to enable correct driver operation. Refer to [5.

3

F G Rod flange Auto switch type Head flange Auto switch multiple side mounting Nil Without auto switch (Built-in magnet) Rod flange, head flanges are shipped together, (but not assembled). For applicable auto switch models, refer to the below table. Auto switches are shipped together, (but not assembled).

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

SYJA3 20-M3-F The mounting bracket for the 2 position double solenoid and 3 position is supplied unattached.

3 Port Solenoid Valve Series SYJ300/500/700

N.O. 1 (P) 3 (R) 1 (P) 3 (R) a c e d a c e d (A) (A) 2 2 g g 3 (R) 1 (P) 3 (R) 1 (P) b b f f Component parts Replacement parts Note Zinc die-casted No.

MY1

MY3M EA h EB W F Stroke adjustment unit (Shock absorber stroke) T MY1W16/20 S F MY1W50/63 Shock absorber EY EC (mm) h E EB EC EY T EA S TT F Shock absorber model RB0806 W 58 Model MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 3.6 14.6 30 5.8 39.5 6 7 40.8 5.4 (Max.11) 4 20 32 5.8 45.5 3.6 6 10 RB0806 RB1007 40.8 5 (Max.11) 4 58 70 D24 38 6.5 53.5 7 12 3.5 46.7 5 (Max.16.5) 6 RB1412 RB1412

Power Valve: Economy Valve Series VEX5

h Grommet terminal i Conduit terminal j DIN terminal a Model b d e f VEX5510 VEX5511 19 130 110 9 12 2.3 204 204.5 222 221.5 32 VEX5710 VEX5711 136 120 9 20 2.3 221 221.5 239.5 239 VEX5910/5911 Bracket (Option) Pressure gauge (Option) Grommet terminal (E) DIN terminal (D) Applicable O.D. 6 to 8 Conduit terminal (T) 1/4 (P2) 1/4 (P1) Refer to page 2449.

CXS

A A a B B s j C f g t C0.5 C0.2 C0.2 b d e 45 45 Section A-A p k C0.5 45 C n h i l (d) C0.5 q m O Section B-B r (l) View C (mm) +0.2 0 l i o j k m n p q r s t b e g a c d f h Model 0 0.2 0.05 0.15 + 0.1 0 +0.2 0 3.5 +0.013 +0.001 CXS 6 2.75 M2.5 x 0.45 4.5 3.5 4.75 C0.5 2.8 0.5 4 3.5 3 3.5 16 0.1 M3 x 0.5 4 1 5.5 6 +0.2 0 0.05 0.15 0 0.2 + 0.1 0 +0.2 0 5 +0.016 +0.001 CXS10 4 M3 x 0.5 8 5

Clean Air Module

F1 F 1 LLB3 Standard (100 L/min (ANR)) LLB4 High flow type (500 L/min (ANR)) F 1 Filter F With filter Port size 1 3 3N 12 One-touch fitting Rc 3/8 NPT 3/8 Restrictor Note) Use a resin fitting (no metal) for Rc and NPT thread.

D. P. Lube ALD600/900 Series

Lube/ALD600-06 to 10, ALD900-12 to 20 Float switch mounting position (Connection port center) AL800 AL900 ALF ALT ALD ALD ALB (Connection port center) LMU F (Bracket mounting dimensions) ALIP AEP HEP Bracket (Option) Bracket dimensions A B C D E Model Port size F 344 416.5 G 32.5 0 H 95 120 J 14 14 K 55.5 48 ALD600-06 to 10 ALD900-12 to 20 , 1 4 3 175 250 175 250 87.5 125 487 639 135 210

Series VQ1000 10- Base Mounted 21- Plug-in Unit

kit F kit P kit J kit P kit J kit G kit 2 to 24 2 to 24 2 to 16 stations stations stations Note 1) Besides the above, F/P kit with different number of pins are available.

AFF

AFF37B AFF75B Port size N.C. auto-drain N.O. auto-drain Drain guide B 01 B 06 B 1 8 3 4 1B Accessory 02 03 10 14 B 1 4 B 3 8 04 B 1 2 1 4 1 B 1 2 20 2B Option IN-OUT reversal direction -T Element service indicator AFF75A to AFF220A AFF 75A 20 D Accessory (Option) Basic size (Applicable compressor rating) D Auto-drain G Pressure gauge F Companion flange L Anchor bolt 75A 75 kW 125A 110 to

AMF

P . 14-20-57 14-20-42 2 Odor Removal Filter Series AMF How to Order AMF150 to AMF850 AMF 250 03 R B Option R IN-OUT reversal direction Body size Bracket Accessory (Option) 150 Standard 1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard 3 4 650 850 B 1 4 B 3 8 04 B 1 2 06 B Nil Nil B Piping port (B dimension) 1 Standard 11 2 Standard 01 B 1 8 02 03 Thread type Nil Rc F G N