Model: VPA300, Exhaust Type: Common Exhaust, Stations: 10 Stations, Symbol: 1, Port Size: 1/4, Thread Type: NPT
Model: VPA300, Exhaust Type: Common Exhaust, Stations: 2 Stations, Symbol: 1, Port Size: 1/4, Thread Type: NPT
Model: VPA300, Exhaust Type: Common Exhaust, Stations: 14 Stations, Symbol: 1, Port Size: 1/4, Thread Type: NPT
Model: VPA300, Exhaust Type: Common Exhaust, Stations: 3 Stations, Symbol: 1, Port Size: 1/4, Thread Type: NPT
Model: 3 (VPA300), Exhaust Type: 41 (Common Exhaust), Stations: 6 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: N (NPT)
Model: 3 (VPA300), Exhaust Type: 41 (Common Exhaust), Stations: 8 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: N (NPT)
Model: 3 (VPA300), Exhaust Type: 41 (Common Exhaust), Stations: 4 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: N (NPT)
Model: 3 (VPA300), Exhaust Type: 41 (Common Exhaust), Stations: 5 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: N (NPT)
Model: 3 (VPA300), Exhaust Type: 41 (Common Exhaust), Stations: 10 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: N (NPT)
Model: 3 (VPA300), Exhaust Type: 41 (Common Exhaust), Stations: 2 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: N (NPT)
Model: 3 (VPA300), Exhaust Type: 41 (Common Exhaust), Stations: 14 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: N (NPT)
Model: 3 (VPA300), Exhaust Type: 41 (Common Exhaust), Stations: 3 Stations, Symbol: 1, Port Size: 02 (1/4), Thread Type: N (NPT)
Fluoropolymer Piping Equipment 8 30 26 18 36 41 78 74 49 Inch Size Model Applicable tubing O.D.
41 41 44 41 41 49 49 83.5 93.5 46.5 47 85.5 91 93.5 91 41 41 43 43 41 41 52 43 50 49.5 49 49 52.5 49 49.5 56 57.5 92 102 53.5 53.5 94 107 102 107 49 49 51 51 49.5 49 58.5 51.5 58.5 56.5 56 56 61 56 56.5 65 68 102.5 112.5 61.5 61 104 121 112 121 55.5 56 57.5 57.5 57.5 55.5 66 58.5 Note 2) D-A9/A9V types cannot be mounted on 50. 1224 Auto Switch Mounting Series CA2Y Minimum Auto Switch Mounting
34 38.5 46.5 55 63 Hs 30 34 41 48.5 56 Ht 30.5 35 42.5 51 59 Hs 30 34 41 48.5 56 40 50 63 80 100 30 34 41 49.5 58.5 B 32 A Operating Range Bore size Auto switch model 40 8 50 7 63 9 80 9.5 100 10.5 D-Z7/Z80 D-A3/A44/A3C/A44C D-A5/A6 D-B5/B64 9 10 11 11 11 D-A59W D-B59W D-Y59/Y69/Y7P/Y7V/Y7W/Y7WV D-Y7BAL D-F5/J5/F5W/J59W/F5BAL/F5NTL D-F59F D-G5/K59/G5W/K59W/G5BAL/G5NTL/G59F D-G39/K39/G39C
3 12 53 2-6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 1/8 Port PE Rc1/8 External pilot port 27.5 27.5 41 41 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for metal seal 3 position type 7 Series VQ5000 Base Mounted Type How to Order Manifolds
3 12 53 2-6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 1/8 Port PE Rc1/8 External pilot port 27.5 27.5 41 41 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for metal seal 3 position type 7 Series VQ5000 Base Mounted Type How to Order Manifolds
O After a few seconds at 10-6Torr 41
XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric
port 1/8" External pilot port 27.5 27.5 41 41 41 41 1/2" 1(P), 4(A), 2(B), 5(R1), 3(R2) port 1/2" 1(P), 4(A), 2(B), 5(R1), 3(R2) port Numbers inside ( ) are for metal seal 3-position type. 495 Base Mounted Plug-in Unit VQ5000 Series [Option] Note) CE-compliant: For DC only.