V

3 15 50.5 4.5 15 40.5 6.5 3.3 ZPT16 U C 16 18 12.5 17.5 20 38.5 25 43.5 3.5 1.2 ZPT50U C 50 53 19.5 25.5 3 15 51.5 4.5 15 41.5 7.5 3.8 D E E P T Y P E D E E P T Y P E G:M5x0.8 G:M6x1 Model A B C D E F E F Y H:M6x1 H:M6x1 H O W T O O R D E R S E E N E X T P A G E Model A B D E Y C F G C F G ZPT10D 10 12 15 20 20 41 25 46 6 ZPT40D 40 43 29 35.5 3 25 61 4.5 15 51 17 ZPT16D 16 18 16 21 20 42

Vacuum Equipment

49 60 78 101 33 42 49 60 78 102 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 13-1-19

Series SYJA300 3 Port Air Operated Valve

SYJA5l4-01 18 2-2.6 15.5 (Mounting holes for manifold) 24 8.5 A 2.5 15 11 1 13 8.5 SlA M5 X 0.8 34 (External pilot style) (Pilot port) (For solenoid valve) VlA 2-4.5 Manual override (Non-locking) (Pilot port) (Mounting holes) M5 X 0.8 34 2-3.5 Manual override (Mounting holes pitch) (Mounting hole) (Non-locking) 10.6 9 8 A 1 SlA 32 24 15 X 18.6 R P 14.5 3 24.5 30 11.5 37 23 VlA 21 34 4 33 42

Vacuum System Peripherals:

42 e Valve Model Fill in the blanks below with symbols of necessary specifications.

VCA

G1/2 B B 2-P Port size A A D 2-P Port size (S) Port size G1/2 Compatible heavy duty cord Cable O.D. 6.8 to 10 L L K 2-M Thread depth 6 K 2-M Thread depth 6 (mm) Electrical entry P Port size B C Model A D E F K L M Grommet: G Conduit: C DIN connector: D Conduit terminal: T U 81 91.5 101 103.5 Q 98 101 104 104 R 36 44 53 55.5 S 68 71 74 74 Q 46 50 52 52 R 36 44 53 55.5 Q 63 66 69 69 R 35 42

VCB

Valve model Port size L J H G F E D C A B VCW20-12-01A VCB2 1/8, 1/4 13 6 4.5 5 12.8 12.8 30 25 40 34 VCW30-12-02A 1/4, 3/8 19 7 5.5 6 19 19 40 30 52 42 VCB3 VCW30-12-04A 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-02A 1/4, 3/8 19 7 5.5 6 23 23 40 30 52 42 VCW30-12-04A VCB4 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-06A 3/4 26 7 5.5 6 28.2 28.2 53 44 65 56 Two mounting screws (for mounting

Series VQ Metal Seal/Rubber Seal Body Ported

Ambient and fluid temperature Effective area (Cv) Max. operating frequency (1) Note 1) As per JISB83751981 (Supply pressure: 0.5MPa) Dimensions Single unit Manifold Dimensions Equation L1=11n+20 n: Station (Max. 24 stations) n L 1 2 3 4 5 6 7 8 9 10 11 12 42 62.5 73 L1 L2 L3 31 50 60.5 86 112.5 123 108 125 135.5 119 137.5 148 141 162.5 173 97 125 135.5 130 150 160.5 152 175 185.5 53 75 85.5

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

218 228 250 260.5 14 234 244 275 285.5 15 250 260 287.5 298 8 138 148 175 185.5 9 154 164 187.5 198 10 170 180 200 210.5 11 186 196 225 235.5 12 202 212 237.5 248 5 90 100 125 135.5 6 106 116 137.5 148 7 122 132 162.5 173 3 58 68 87.5 98 4 74 84 112.5 123 L1 L2 L3 L4 2.10-35 VQZ100/200/300 Base Mounted VQZ300 VV3QZ35C Station Port size (35) (5.5) 2-4.5 Mounting holes DIN rail clamp screw 42

XL

In the case of gases which cause a large amount of deposits, heat the valve body or use a model with heater to prevent deposits in the valve. 42 Specific Product Precautions 2 Series XL Be sure to read before handling. Mounting Operating Environment & Vacuum Characteristics Caution Caution All models 1.

IIIIIII

T.T 90" .75 PSIG (5 Kgf/cm2) #4n 2V,,tay 3 Way F O F , 3 31 lbs. (1.5 kg ) T T 45" A B c D E F G H J K tl N 3.44 '473' 2.24 '56.81 1.25 31.8) 1.20 0.06 (1.5) 0.12 (3) 0.86 t22.51 1.57 {rto) t.42 361 1.26 (321 1.20 0.24 (6) Millimeters in Parenlheses Millimelrs in Parenthses MECHANICAL VALVES HOWTO ORDER DIMENSIONS Series NVM HOW TO ORDER NVM 220 N02 065 TT t l I LRoller Material (01,02,06,07

Direct Solenoid

(OptionsT& POnly) ParlNo, Portin9 No. of Ports "xx" sP01 'r 1 %,,NPTFSidE 5 4 1 sP0112 %"NPTFSidE 42 sPot 13 /s' NPTF SidLe (5); %" NPTF Ebtlom 1 0 43 sP0114 Ya" N PTF Bottom 5 44 sP0115 3,6" N PTF Side 5 45 MBA4010-02Y." NPTF Side 2 1 2 MBA40r r -02 %" NPTF Sid; 7." Bottom 1 4 MBA4210-02 %" NPTF Side (2); 7."

！ Contact our sales office for delivery dates and prices as this is a special model. SP112X-012E P: PZ P.G.Information (Specialized Product) SMC CORPORATION Power Clamp Cylinder：φ25 4-14-1,SOTO-KANDA, CHIYODA-KU,

[Clamp Cylinder Body Dimensions] Right type Center type Left type 24H7 through 26.5 through CKZ 25 42 * 781EL R Model Arm position Weight kg CKZ25-42A781EL-R Center 0.23Kg CKZ25-42B781EL-R Right 0.23Kg CKZ25-42C781EL-R Left 0.23Kg !

1.00.28/0.31 (at 42/53 l/min, total lifting height 25/25 m)42/5360Rc 3/4Stainless steel, Brass, PVC, Nylon 12, Polyurethane, Copper brazing (Heat exchanger)????Stainless steel, Brass, Synthetic rubber, Copper brazing (Heat exchanger)3-phase 200 VAC 50 Hz, 3-phase 200 to 220 VAC 60 Hz Allowable voltage fluctuation ?

1.00.28/0.31 (at 42/53 l/min, total lifting height 25/25 m)42/5360Rc 3/4Stainless steel, Brass, PVC, Nylon 12, Polyurethane, Copper brazing (Heat exchanger)????Stainless steel, Brass, Synthetic rubber, Copper brazing (Heat exchanger)3-phase 200 VAC 50 Hz, 3-phase 200 to 220 VAC 60 Hz Allowable voltage fluctuation ?

RAM & DISC ASSY H-42 & V-42

Max Operating Pressure: 3 (3.5 MPa), Construction: 42 (Element Upward Removal, Threaded), Port Size: 06 [3/4 Threaded, 20 (3/4) Flange SSA], Pressure Indicator: 4 (Differential Press. Indicator, Construction 42 Only), Relief Valve: 0 (Relief Valve), Fluid: 0 (Petroleum), Element: M (Micromesh), Filtration: 20μm, Fluid Direction: L (IN Right), Made to Order: X0 (Non-standard Filtration)

Max Operating Pressure: 3 (3.5 MPa), Construction: 42 (Element Upward Removal, Threaded), Port Size: 06 [3/4 Threaded, 20 (3/4) Flange SSA], Pressure Indicator: 4 (Differential Press. Indicator, Construction 42 Only), Relief Valve: 0 (Relief Valve), Fluid: 0 (Petroleum), Element: P (Paper), Filtration: 20μm, Fluid Direction: L (IN Right)

Max Operating Pressure: 3 (3.5 MPa), Construction: 42 (Element Upward Removal, Threaded), Port Size: 06 [3/4 Threaded, 20 (3/4) Flange SSA], Pressure Indicator: 4 (Differential Press. Indicator, Construction 42 Only), Relief Valve: 1 (None), Fluid: 0 (Petroleum), Element: M (Micromesh), Filtration: 20μm, Fluid Direction: IN Left, Made to Order: X0 (Non-standard Filtration)

Max Operating Pressure: 3 (3.5 MPa), Construction: 42 (Element Upward Removal, Threaded), Port Size: 06 [3/4 Threaded, 20 (3/4) Flange SSA], Pressure Indicator: 4 (Differential Press. Indicator, Construction 42 Only), Relief Valve: 1 (None), Fluid: 1 (Water-glycol, Emulsion), Element: P (Paper), Filtration: 20μm

Max Operating Pressure: 3 (3.5 MPa), Construction: 42 (Element Upward Removal, Threaded), Port Size: 06 [3/4 Threaded, 20 (3/4) Flange SSA], Pressure Indicator: 4 (Differential Press. Indicator, Construction 42 Only), Relief Valve: 0 (Relief Valve), Fluid: 0 (Petroleum), Element: M (Micromesh), Filtration: 10μm, Fluid Direction: IN Left, Made to Order: X0 (Non-standard Filtration)