Digital Flow Switch (Integrated display type) ( compatible)

Maximum Maximum 6 106 Maximum Maximum Maximum : Unit setting: G Flow range AC_E set value 10(N) value 4 L 16 L 40 L 100 L 250 L -2 10-2 Minimum -1 10-1 Minimum Minimum Minimum Minimum 0 100 1 101 2 102 3 103 4 104 Maximum 5 105 Maximum Maximum 6 106 Maximum Maximum -36No.PF-OMV0006-B [F 1] Setting of OUT1 The output mode of OUT1 can be selected.

XLGR Series

Dimensions E C D E E L (Width across flats) M (Width across flats) M8 (KF Flange) (K Flange) Fn Fd C Detail of (a) (a) M Rc1/8 J H K B A G A Model A B C D E Fn Fd XLGR-80*-1* 90 250 117 45.5 38.5 114 110 XLGR-100*-1* 108 270.5 154 55 38.5 130 102 XLGR-160*-1* 138 339 200 65 38.5 180 153 Model G H J K L M XLGR-80*-1* 83 105 44 9 13 4 XLGR-100*-1* 102 92 58 9 13 4 XLGR-160*-1* 153 124 62 12.5

LEC-T1_C

.** .101 (9) TB .102 (9-1) TB . 102 (9-2) TB . 103 (9-3) TB . 103 (10) .104 3 - (10-1) . 104 6.4 .105 1.105 11. 105 2.106 21. 106 3.107 31. 107 7. /.109 8. /.110 8.1 .110 8.2 .111 8.3 .112 8.4 .113 8.5 .114 8.6 .114 9. .115 9.1 /.115 9.2 .115 9.3 .117 9.4 .117 9.5 .118 9.6 .118 9.7 .118 10. .119 .121 .121 1TB Ver1.**.121 2TB Ver2.**.123 4 - LEC-T1 Series/ (ISO/IEC)(JIS) *1) *2) *1) ISO

JXCx-OMT0005CN

2 12-13 2byte *1 *2 1 100 Get/Set 32 No.0 14-15 2byte *1 *2 16-17 2byte *1 *2 18-19 2byte *1 *2 20-23 14byte *1 *2 24-27 24byte *1 *2 28-31 4byte *1 *2 64 100 Get/Set 32 No.63 0-1 2byte *1 *2 28-31 4byte *1 *2 *1 *2 21(P.85 19 - 2IO Class 68h /IO IO IO DeviceNet 0Eh Get_Attribute_Single 10h Set_Attribute_Single Attribute Access Size Name Semantics of Value 100 Get 2 101 Get 2 102

XLG Series

(Take care not to damage the mounting surface of the body.) 3 Tightening torque Nm Valve size 2 1 -25 XLG-16 0.7 1.5 4 -40 2.5 -50 6 -63 6 -80 15 -100 20 -160 102 Wipe any dust off the O-ring surface and O-ring seat with a clean cloth (Bemcot TM) dipped into ethanol. Tighten the socket head cap screws in numerical order.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

RA 5 VA depth VB YC RB RB NA B XA depth XB NB Q 4 x M6 x 1 thread depth 12 (Mounting thread) O 20 20 FX FY FZ (Open DO) CB CA (Closed DC) WA depth WB 4 x M5 x 0.8 thread depth 10 Thread for mounting attachment M5 x 0.8 (Finger opening port) Closed EC Open EO K L J MHZ M5 x 0.8 (Finger closing port) MHF G MHL M (mm) MHR G 37.5 44 FZ 6 7 FX 31 38 FY 28 34.5 EC 22 30 EO 34 46 DC 70 86 DO 82 102

CQS

16 89 104 120 136 152 167 183 199 215 231 20 127 146 166 186 206 227 247 267 287 308 25 Minimum Operating Pressure Unit: MPa Weight/With Auto Switch(Built-in magnet) Unit: g Bore size(mm) 12 16 20 25 Stroke (mm) Bore (mm) Min. operating pressure 0.07 0.07 0.05 0.05 5 10 15 20 25 30 35 40 45 50 Allowable Kinetic Energy Unit: J Bore size(mm) 46 54 62 70 77 85 12 12 16 20 25 60 71 81 91 102

Compact Guide Cylinder Series MGQ

102 143 153 50 st or less 5.5 0 4 0 9.5 5 Over 50 st 42.5 36 46 41 68.5 69 M10 x 1.5 32 40 50 63 80 100 20 20 25 25 28 36 24 17.5 25 20 18.5 21 71.5 71.5 81 81 93 105 16 16 20 20 25 30 M10 x 1.5 M12 x 1.75 M14 x 2 Note) For intermediate strokes other than standard strokes, refer to the Manufacture of Intermediate Stroke on page 339.

MY1

MY1 HT MY1 W MY1 W MY1CW (Cam follower guide type) 16, 20 25, 32, 40, 50, 63 MY2C MY2 H/HT MY3A MY3B MY3M B A B A Proper Auto Switch Mounting Position (mm) D-Z7/Z80 D-Y59/Y7P D-Y7W D-Y7BA D-M9V D-M9WV D-M9AV D-A9 D-Y69/Y7PV D-Y7WV D-M9 D-M9W D-M9A Bore size (mm) A B A B A B A B A B 16 20 25 32 40 50 63 74 86 70 90 94 106 90 110 102 118 102 118 97 123 97 123 132 148 132 148 127 153

ZP

P I: M5 x 0.8 I: M6 x 1 Model A B C D E F K L Y G H G H I: M6 x 1 I: M8 x 1 Model A B C D E F K L Y G H G H ZPR40B 40 50 43 34 47.5 58.3 76.1 102 92 24.4 53 38 51.5 62.3 80.1 106 25 15 96 32.4 57 48 19 16 ZPR50B ZPR10B 10 13 12 16 25 33.9 50 71 76 5.5 15 18.5 27.5 36.4 52.5 73.5 20 25 78.5 8.7 19 13.8 7.5 5.5 ZPR13B 16 18 20 29 37.9 54 75 80 9.9 21 8.5 ZPR16B Applicable Tubing Applicable

Compact Cylinder Series CQS

46 16 112 102 91 81 71 60 Mounting Warning 20 261 245 230 214 198 182 166 150 134 119 25 336 316 296 276 255 235 215 195 174 154 Do not apply the reverse torque to the piston rods sticking out from both sides of this cylinder at the same time.

IDX-OM-Y002

Fig. 1 shows the possible issues due to water quality 9 Trouble due to scale is likely to occur 8 pH (25oC) Within criteria 7 Trouble due to corrosion is likely to occur 6 5 4 102 2 3 4 5 103 2 3 4 5 104 102 102102102 102 102102102 Electric conductivityS/cm Fig. 1 Relation between pH conductivity and trouble (3) Maintenance and inspection of the strainer (monthly) CAUTION If the mesh of the

Sine Rodless Cylinder Series REA/REB

RHC W Z tb T TT ta S Q QW RW PW Model PB REAL15 REAL20 REAL25 REAL32 REAL40 112 0.5 1.0 92 22.5 15 77 12.5 30 70 95 90 RZQ 117 130 16.5 25.5 88 105 40 28 120 90 130 0.5 1.0 127 25.5 22 88 16.5 50 100 130 105 157 149 1.0 18.5 28.5 0.5 102 121 60 33 160 120 D194 1.0 1.0 187 35.5 35 138 20.5 84 140 190 159 -X Individual -X 975 Series REAL Auto Switch Proper Mounting Position (Detection at

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

-11 counter bore depth 6.3 98 96 1 6.3 76 5 75 0.2 44 8 4.1 M8 x 1.25 x 23l and M8 x 1.25 (hexagon bolt) (hexagon nut) 2-M6 x 1 (through) 18 2-M5 x 0.8 Thread depth 8 30 (Z) 8-M5 x 0.8 thread depth 7.5 (same on reverse side) 4-Rc 1/8 thread depth 6.5 (piping port) (same on reverse side) 9 20 Model S ZZ Z SS 19 CXS32-10-XB19 10 122 92 CXS32-15-XB19 15 127 97 10 56 40 CXS32-20-XB19 20 132 102

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

C4 C6 C4 C6 Stations L1 L2 L3 L4 3 4 5 6 7 8 9 10 2 123 135.5 125 102 16.5 148 148 160.5 150 173 185.5 175 198 210.5 200 112.5 91.5 15.5 137.5 137.5 123 12.5 162.5 144 14.5 187.5 165 16.5 133.5 13.5 154.5 15.5 175.5 17.5 112.5 17.5 Stations SS5Y3-45GUBC4 C6 2 3 4 5 6 7 8 9 10 Stations L1 L2 L3 L4 135.5 125 108 13.5 148 160.5 150 129 15.5 173 185.5 175 150 17.5 185.5 175 198 210.5 200 223

Title not found

record display Log entry display Display setting (Easy/Normal mode) Language setting (Japanese/English) Backlight setting LCD contrast setting Beep sound setting Max. connection axis Distance unit (mm/inch) TB setting Easy/Normal Language Backlight LCD contrast Beep Max. connection axis Password Distance unit TB setting Reconnection of axis Reconnect Reconnect Dimensions 34.5 w 102

JA/JAH/JB/JS

4400 9000 9000 14000 22000 22000 22000 55000 12 16 16 19 19 19 22 22 25 32 32 70 90 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 18 24 24 30 30 30 34 34 42 48 48 54 74 0.5 0.5 0.5 0.75 0.75 0.75 1 1 1.25 2 2 2 3 8 10 10 12 12 12 16 16 20 24 27 27 33 44 52 52 67 67 67 82.5 82.5 98.5 123 123 155 213 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 48 38 44 44 57.5 57.5 57.5 71.5 71.5 86 107 107 102

Floating Joint

80 80 88 116 8 9 9 13 13 13 15 15 18 24 24 24 42 19 25 25 30 30 30 38 38 47 58 58 69 89 44 52 52 67 67 67 82.5 82.5 98.5 123 123 155 213 12 16 16 19 19 19 22 22 25 32 32 70 90 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 18 24 24 30 30 30 34 34 42 48 48 54 74 8 10 10 12 12 12 16 16 20 24 27 27 33 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 48 38 44 44 57.5 57.5 57.5 71.5 71.5 86 107 107 102

Slider Type Ball Screw Drive/11-LEFS Series

or less (No condensation) Cleanliness class Note 5) ISO Class 4 (ISO 14644-1) LER Grease Ball screw /Linear guide portion Low particle generation grease Motor size 28 42 Motor output [W] 30 36 LEH Electric specifications Motor type Servo motor (24 VDC) LEY -X5 Encoder Incremental A/B (800 pulse/rotation)/Z phase Rated voltage [V] 24 VDC 10% 11LEFS 11LEFS Power consumption [W] Note 6) 63 102

51

102 126 130 0 E 0.05 I C Up to 300 M5 x 0.8 Corner of the cover (20 to 63) Up to 300 M6 x 1 CJ2 Up to 300 M8 x 1.25 Width across flats B1 H A AL Up to 300 M10 x 1.5 JCM Up to 300 M10 x 1.5 NA F 8 x J S + Stroke ZZ + Stroke C Up to 300 M14 x 1.5 CM2 Up to 300 M16 x 1.5 Long Male Rod End 2 (mm) Female rod end Long male rod end CM3 Bore size (mm) Standard stroke A AL H ZZ MM Depth A1 CG1 20