Compact

I l 50i 70 , iiFl.r* 0 q . . , . 50 6o ' 3 0 3o , , , . 3 0 , : LXPB5SA 40 40 '" .,1 Slide i Screw \ I i LXPB5SB 2D 2A LXSH2BC 100 50 220 High rigidity linear guide Ball LXSH2BD 100 50 90 Screw LXSH5BC 1 0 0 50 1 6 0 LXSH5BD 1 0 0 50 70 LXSH2SA 90 40 60 Slide LXSH2SB 45 20 30 Screw LXSHSSA 60 20 40 LXSH5SB 30 1 0 20 , \ | '-t 'oo"ot| I PLc I ll'i;!:-,?

Dual Speed Controller with One-touch Fitting Series ASD 1

-06S 74 17 12.8 48.3 25.2 20.3 8 ASD530F-03-08S 93 18.5 15.2 51.3 28.2 41.9 46.9 46.5 41.5 19.8 23 14 R 3/8 19 40 35 10 ASD530F-03-10S 98 21 54.1 32.6 18.5 23.1 12 ASD530F-03-12S 101 22 55.9 34.4 20.9 10 ASD630F-04-10S 177 21 64.3 32.6 18.5 57.3 64.8 57.6 50.1 18.6 R 1/2 49.6 42.1 26.5 28.6 25.9 24 12 ASD630F-04-12S 179 22 66.1 34.4 20.9 Reference dimensions of M5 x 0.8, R threads after

ASD

-06S 17 74 12.8 25.2 48.3 20.3 8 ASD530F-03-08S 18.5 93 28.2 51.3 15.2 41.9 46.9 46.5 41.5 23 19.8 14 R(PT)3/8 19 40 35 10 ASD530F-03-10S 21 98 32.6 54.1 18.5 23.1 12 22 ASD530F-03-12S 101 34.4 55.9 20.9 10 21 177 ASD630F-04-10S 32.6 64.3 18.5 57.3 64.8 57.6 50.1 18.6 R(PT)1/2 49.6 42.1 28.6 26.5 25.9 24 12 22 179 ASD630F-04-12S 34.4 66.1 20.9 Reference dimensions of M5 X 0.8, R(PT) thread

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Example) 10-ARP30K-03BE-1RY Clean room compliant, copperfree, fluorine-free, silicon-free Clean room compliant Copper-free, fluorine-free Symbol 20 30 40 Body size Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without

Stainless Steel Heat

x 3 x 60 = 2736g/h. 6 7 8 3 1 2 3 4 5 Dew point conversion chart 60 50 40 30 Pressure dew point C 20 10 1.5MPa 1.3MPa 1.1MPa 0.9MPa 0.7MPa 0.5MPa 0.3MPa 0.1MPa Atmospheric pressure 0 -40 -30 -20 -10 -60 -50 -60 -50 -40 -30 -20 -10 0 10 20 30 Atmospheric pressure dew point C 8 Series IDUS/IDFS Safety Instructions These safety instructions are intended to prevent a hazardous situation and/

P-E99-4A Air Cylinder with Drop Prevention Mechanism — Cylinder with End Lock & Cylinder with Lock — Prevents dropping when air supply decreases or residual pressure is exhausted  Cylinder with End Lock Pick and place Locking door Drop prevention at stro

to 40 Locking direction Both directions Bore size 25 to 40 For details...

Modular Type Lubricator Series AL

50 60 Thread type Metric thread (M5) Rc NPT G Nil N F AL20 Port size Body size Symbol Port size M5 1/8 1/4 3/8 1/2 3/4 1 10 20 30 40 50 60 Note 2) M5 01 02 03 04 06 10 Accessory When more than one specification is required, indicate in alphanumeric order.

LX Series Compact Electric Actuators

I l 50i 70 , iiFl.r* 0 q . . , . 50 6o ' 3 0 3o , , , . 3 0 , : LXPB5SA 40 40 '" .,1 i Slide Screw \ I i LXPB5SB 2D 2A LXSH2BC 100 50 220 High rigidity linear guide Ball LXSH2BD 100 50 90 Screw LXSH5BC 1 0 0 50 1 6 0 LXSH5BD 1 0 0 50 70 LXSH2SA 90 40 60 Slide LXSH2SB 45 20 30 Screw LXSHSSA 60 20 40 LXSH5SB 30 1 0 20 , \ | '-t 'oo"ot| I PLc I ll'i;!:-,?

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

Type 40/Type 41 How to Order SS3YJ7-40 -05 --01 Applicable solenoid valve SYJ714SYJ714MSYJ724SYJ724MApplicable blanking plate assembly SYJ700-10-2A R port 1/4 R port 1/8 P, R port thread type Manifold type Stations 40 41 Type 40 Type 41 Nil Rc G NPT NPTF 2 stations : 20 stations 02 : 20 F N T A A A A 01 1/8 A port size P port 1/8 P port 1/4 A port 1/8 Note) If there are more than 6 stations

0.4

Bore size CJ2 series Pressure 0.5 MPa Load factor 50% Stroke 60 mm CM2 series Pressure 0.5 MPa Load factor 50% Stroke 300 mm MB, CA2 series Pressure 0.5 MPa Load factor 50% Stroke 500 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQ1101 Port size: 6 One-touch fitting 800 700 600 500

212

140.5 LVR50-V19 22 80 120 169 C F E Breathing port M5 x 0.8 J Tube extensions 4 x 7 Mounting hole 1/8 (Rc, NPT) Pilot port A H D B G Breathing port M5 x 0.8 Model A B C D E LVR20-T07(06) 40 40 49.3 68 20.1 LVR40-T11(10) 82.5 82.5 89 115 33 IN C F Model F G H J K LVR20-T07(06) 8 27 56 33.5 126.2 LVR40-T11(10) 14 64.5 100 40 183.3 E K J J Breathing port M5 x 0.8 5 Applicable Fluids Regulator

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

(Example) SS3YJ5-20-03 . 1 set (manifold base) SYJ512-5LZ-M5 . 2 sets (valve) SYJ500-10-1A . 1 set (blanking plate assembly) SS3YJ5-41R-03-C6 . 1 set (manifold base) SYJ514R-5G . 2 sets (valve) SYJ500-10-3A . 1 set (blanking plate assembly) The asterisk denotes the symbol for assembly.

99

{Rc3/8} FGH200-03 {Rc3/8} FGH300-03 {Rc3/8} FGH200 Series FGH300 Series 0.05 0.05 0.05 Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) 0.01 0.01 0.01 0.005 0.005 0.005 0.001 10 30 50 70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) FGH100-04 {Rc1/2} FGH200-04 {Rc1/2} FGH300-04 {Rc1/2} 0.05 0.05 0.05 Pressure drop (MPa) Pressure

Direct Solenoid

"AC Only "' Not aveilable WDC Solnold Typo NVS 4024, 'm34 03 = 1'r0v 50Hz U = 2mV fiHz 07 = 24VAC ffiHz t09 = 115/120V 6OHz 100/110V 5OHz t10 = 23o/21t0V 60Hz?

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

VXA31/32

Construction/ Principal Parts Material Operating Fluid and Ambient Temperature Operating fluid temperature (C) (3) Vacuum Ambient temperature (C) Temperature conditions Water (Standard) Air (Standard) Oil (Standard) (V, M) Maximum Minimum 40 1 60 5 (1) 40 5 40 40 5 5 (2) Note 1) Dew point: 5C or less Note 2) 500 cSt or less Note 3) V, M in parentheses are option symbols.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

or less 0.16 26 or less Metal seal Closed center VQ1000 VQ1301 25 or less 0.65 0.70 0.42 0.20 0.18 47 or less 0.16 33 or less Rubber seal 77 VQ1400 20 or less 0.72 0.68 0.25 0.15 0.18 40 or less 0.16 26 or less Metal seal Exhaust center VQ1401 25 or less 1.0 0.70 0.30 0.20 0.25 47 or less 0.16 33 or less Rubber seal VQ1500 0.72 0.70 0.25 0.15 0.18 40 or less 0.16 26 or less Metal seal 20

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

or less 0.16 26 or less Metal seal Closed center VQ1000 VQ1301 25 or less 0.65 0.70 0.42 0.20 0.18 47 or less 0.16 33 or less Rubber seal 77 VQ1400 20 or less 0.72 0.68 0.25 0.15 0.18 40 or less 0.16 26 or less Metal seal Exhaust center VQ1401 25 or less 1.0 0.70 0.30 0.20 0.25 47 or less 0.16 33 or less Rubber seal VQ1500 0.72 0.70 0.25 0.15 0.18 40 or less 0.16 26 or less Metal seal 20

CY1F

10 12 33.5 22.5 12 46 44 23.5 55 50,100,150,200,250,300,350,400,450,500,550,600 LL LW LZ Model KC KA KB KH KW LA ML MM N PA PB PC Q QA QB L QW CY1F10 6.5 44 8 19 59 58 20 86 19 5 M3 x 0.5 18.5 40 40 8.5 90 4 12 38 33 CY1F15 6.5 51 10 19 66 65 20 99 19 5 M3 x 0.5 18.5 50 50 7 97 4 12 53 40 CY1F25 7.5 66 13 27 84.5 89 25.5 128.5 17 9 M5 x 0.8 24 65 65 8 129 5.5 14.5 70 52 P (Piping port) Model