Manifold Specifications

Non plug-in type Thread type 02 2 stations Standard Nil NPT Rc N T F Symbol 24 24 stations NPTF G Option VV5ZS2-51FD-091-01-MP5 VZS2150-5FZ VZS2250-5FZ 1 5 2 Note) Maximum stations 51F 16 stations 51G15 stations 51 24 stations Passage Porting specifications 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common Symbol Port size 1 1 8 01 Rc (Manifold base) (2 position single) VV5ZS2-51-071-01-M5

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Nil N D Note 5) DIN rail length specified (: Stations 02 to 16) Symbol Stations PNP output (COM.) 01 K Note 3) 1 station Special wiring spec. (Except double wiring) N R Note 4) SI unit part no. With name plate 08 8 stations with external pilot SI unit specifications SI unit part no. Symbol Note) Max. 16 stations.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Nil N D Note 5) DIN rail length specified (: Stations 02 to 16) Symbol Stations PNP output (COM.) 01 K Note 3) 1 station Special wiring spec. (Except double wiring) N R Note 4) SI unit part no. With name plate 08 8 stations with external pilot SI unit specifications SI unit part no. Symbol Note) Max. 16 stations.

AS-FPQ/AS-FPG

A Note 1) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted

VS3135 A01-01 A01-02 A07-52 q Description Electrical entry VS3145 Solenoid cover Body 100 VAC 200 VAC Grommet A12-01 A12-02 A08-52 w e Spool/Sleeve 24 VDC 100 VAC 200 VAC Conduit terminal 24 VDC A01-01-63 A01-02-63 A07-52-63 A12-01-63 A12-02-63 A08-52-63 Replacement Parts Material Part no. VS3135 XT019-6 XT013-13-2 XT010-15 Description VS3145 No.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

M1 M2 Weight (g) ASV310F-01-06S ASV310F-01-08S ASV310F-02-06S ASV310F-02-08S ASV410F-01-08S ASV410F-01-10S ASV410F-02-08S ASV410F-02-10S ASV410F-03-08S ASV410F-03-10S ASV510F-02-10S ASV510F-02-12S ASV510F-03-10S ASV510F-03-12S ASV510F-04-10S ASV510F-04-12S 71.9 73.8 71.9 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2 91.8 90.2 91.8 90.2 91.8 16.8 19.3 16.8 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3

Mini Free Mount Cylinder

Mounting condition 2 With Magnet (With Auto Switch) Mounting condition 1 6, 8, 10 12, 16 20 Bore size (mm) M3 x 0.5 M5 x 0.8 Port size 5 or more 4 or more 5 or more Stroke (mm) AS121F-M3-02 AS121F-M5-02 AS121F-M3-23 AS121F-M5-23 AS121F-M3-04 AS121F-M5-04 AS121F-M5-06 AS131F-M3-23 Mounting condition 4 Mounting condition 3 AS131F-M3-04 AS131F-M5-23 AS131F-M5-04 AS131F-M5

PSxx-OMV0008CN

-L2 0x0013 (19) 0 R ID ISE70G-02-L2 0x0014 (20) 0 R Pressure sensor 8 0x0015 (21) 0 R No.

Air Combination

AC-OMX0051-D PRODUCT NAME Air Combination MODEL / Series / Product Number AC20(A)-(F,N)01~(F,N)02(C,E,E1,E2,E3,E4,G,M)-(1,2,3,6,C,J,N,R,Z,ZA)-D AC20B,C,D -(F,N)01~(F,N)02(C,E,E1,E2,E3,E4,G,M)-(1,2,6,C,J,N,R,Z,ZA)-D AC30(A)-(F,N)02~(F,N)03(C,D,E,E1,E2,E3,E4,G,M)-(1,2,3,6,8,J,N,R,W,Z,ZA)-D AC30B,C,D -(F,N)02~(F,N)03(C,D,E,E1,E2,E3,E4,G,M)-(1,2,6,8,J,N,R,W,Z,ZA)-D AC40(A)-(F,N)02~(F,N)04(C,D

Dual Speed Controller with One-touch Fitting Series ASD 1

Weight (g) d T H D1 D2 D3 L1 L2 L3 Model 4 ASD230F-M5-04 9.3 29.4 12 17.5 12.9 25.5 28.6 25.8 10 9.6 7.8 11.7 M5 x 0.8 28.3 8 25 22.2 6 ASD230F-M5-06 11.6 32.5 13 13.7 20.6 6 34.6 ASD330F-01-06S 14 39.6 11.6 29 13.7 38.5 22.9 36.1 31.1 11.8 14.2 10.6 R 1/8 12 32.1 27.1 15.8 8 33.9 ASD330F-01-08S 38.9 15.2 31 18.5 44.8 28.2 6 ASD430F-02-06S 12.8 53 17 43.5 25.2 18 8 ASD430F-02-08S 36.7 41.7

ASD

Weight (g) d T H D1 D2 D3 L1 L2 L3 Model 4 ASD230F-M5-04 9.3 12.9 17.5 29.4 12 25.5 28.6 25.8 28.3 9.6 10 7.8 11.7 M5 X 0.8 8 25 22.2 6 ASD230F-M5-06 11.6 13.7 20.6 32.5 13 34.6 39.6 6 14 ASD330F-01-06S 11.6 13.7 22.9 29 38.5 36.1 31.1 14.2 11.8 10.6 R(PT)1/8 12 32.1 27.1 15.8 33.9 38.9 8 ASD330F-01-08S 15.2 18.5 28.2 31 44.8 6 ASD430F-02-06S 12.8 17 25.2 53 43.5 18 8 36.7 ASD430F-02-08S

Direct Operated Solenoid Valve Metal Seal Series VS4
10

Electrical entry q Description 01 02 03 01 02 03 01 02 03 Mounting bolt and gasket are not included. Platinum silver Body C: Conduit VS4010-CSSub-plate Platinum silver Aluminum die-casted w T: Conduit terminal VS4010-TSSpool/Sleeve Stainless steel e U: Grommet, D: DIN terminal VS4010-SReplacement Parts Part no. No.

VSA4

VSA4120-02 VSA4120-03 VSA4220-01 VSA4220-02 VSA4220-03 VSA4320-01 VSA4320-02 VSA4320-03 VSA4420-01 VSA4420-02 VSA4420-03 2 position single VA 1 4 1 8 Rc 0.60 1 8 Rc 1 8 Rc SA 2 position double 1 4 1 8 Rc 0.70 1 8 Rc VA 1 8 Rc 3 position closed center 1 4 1 8 Rc 0.86 VM 1 8 Rc Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200

VDW

02 M5 1/8 (6A) 1/4 (8A) Electrical entry G-Grommet Orifice size N.O.

Speed Controller: Standard Type Elbow Type (Metal Body) AS Series

AS120-M5 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 646 B AS Series Speed Controller: Standard Type Elbow Type (Metal Body) Note) The flow rate characteristics are representative values.

EX500-GPR1A.eng

SI unit for VQC/S0700 series valves ( EX500-Q 01 ) 1. SI unit for SV series valves ( EX500-S 01 ) ( EX500-Q 02 ) PWR PWR COM COM 64.4 80.3 64.4 28 66 84.8 79.4 68.5 80.3 series 54.5 60 60 43.2 43 43.2 22.2 22 22.2 13 10.5 28.6 44 0 1 36 10.5 1 0 22 23 The mounting and removing methods of SI unit are as shown below.