Pressure Range: -100.0 to 100kPa, Piping Specifications: NPT1/8 Piping Adapter, Side Ported, Output Specifications: NPN Open Collector 1 Output+Analog Voltage, Unit Specifications: Unit Switching Function, Initial Value psi, Not Allowed for Use in Japan, Lead Wire: -, Adapter: -, Calibration Certificate: -

Pressure Range: -100.0 to 100kPa, Piping Specifications: M5 Female Thread/Rear Piping Port, Output Specifications: NPN Open Collector 1 Output+Analog Voltage, Unit Specifications: Fixed SI Unit, kPa, Lead Wire: G [Lead Wire w/Connector (2m Lead Wire Length)+Connector Cover], Adapter: -, Calibration Certificate: -

Pressure Range: -100.0 to 100kPa, Piping Specifications: M5 Female Thread/Rear Piping Port, Output Specifications: NPN Open Collector 1 Output+Analog Voltage, Unit Specifications: Fixed SI Unit, kPa, Lead Wire: G [Lead Wire w/Connector (2m Lead Wire Length)+Connector Cover], Adapter: Panel Mount Adapter+Front Protective Cover, Calibration Certificate: -

Pressure Range: -100.0 to 100kPa, Piping Specifications: M5 Female Thread/Rear Piping Port, Output Specifications: NPN Open Collector 1 Output+Analog Voltage, Unit Specifications: Fixed SI Unit, kPa, Lead Wire: G [Lead Wire w/Connector (2m Lead Wire Length)+Connector Cover], Adapter: Panel Mount Adapter+Front Protective Cover, Calibration Certificate: w/Certificate

Pressure Range: F (-100.0 to 100kPa), Piping Specifications: N01 (NPT1/8 Piping Adapter, Side Ported), Output Specifications: C (NPN Open Collector 1 Output+Analog Voltage), Unit Specifications: M (Fixed SI Unit, kPa), Lead Wire: G [Lead Wire w/Connector (2m Lead Wire Length)+Connector Cover]

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

HOW TO ORDER N V F 1 1 0 H s D Z O 0 1 T F T T Opo.afing Pressure -J I 0 100 psi (CrP.055) | ' H 0 r 150 psi (C\p.05) | Solenr io vAc 3 _ KYPS" 4-2mVAC E l{vF 1100-oc{17 @io.rg None F Foot Bracket --R(PT),Mekic' T NPTF (Std.) N _ N P T Ii ; o Electrical Corinsctioi G 12'Lead (Sd.) D .

lVFl 10

HOW TO ORDER N V F 1 1 0 H s D Z O 0 1 T F T T Opo.afing Pressure -J I 0 100 psi (CrP.055) | ' H 0 r 150 psi (C\p.05) | Solenr io vAc 3 _ KYPS" 4-2mVAC E l{vF 1100-oc{17 @io.rg None F Foot Bracket --R(PT),Mekic' T NPTF (Std.) N _ N P T Ii ; o Electrical Corinsctioi G 12'Lead (Sd.) D .

High Vacuum L Type Valve

XL1A16-2-101-XN1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

XL-OMY0001

R R PLASMA No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 R 1Barrel Perfluoro R Kalrez Chemraz Greene, Tweed Technologies, Inc.

SY3000-OMH0002

( ) C-R ( ) 3 3 EXH ( ) ( ) 3 DC 3% AC 20% (SSR )AC 1) (C-R ) OFF 2)() 4 No.SY3000-OMH0002 SY Series 3 3 3 3 5 5 5 5 / / / / -10 1V () (1) ()COM COM ( 2) 5 No.SY3000-OMH0002 SY Series 3 3 3 3 5 5 5 5 / / / / 2)Rc ( ) Nm Rc 1/8 79 Rc 1/4 1214 Rc 3/8 2224 Rc 1/2 2830 DC / Best Pneumatics No. 1 1 ()ISO VG32 MSDS 1 1 M5 1/61/4 11.5Nm ) 6 No.SY3000-OMH0002 SY Series 3 3

VFR2000-OMM0001

01-1,2 VVFS2000-R-02-1,2) ( ) ( ) 3 1 DC 3 () -4No.VFR2000-OMM0001 5 5 5 5 0.1 2 C-R () C-R DC 3% AC 20% (SSR )AC 1) (C-R )OFF 2)() ZNR 1V -10 -5No.VFR2000-OMM0001 5 5 5 5 1.5~2 1) 2)1 ()ISO VG32 MSDS 3)2 ()ISO VG32 M5 1/61/4 1.5Nm Rc Rc1/8 79 Rc1/4 1214 -6No.VFR2000-OMM0001 5 5 5 5 ( ( ( ( ) ) ) ) 5m 3 30 () 1 VG32 2 ()ISO VG32 -7No.VFR2000-OMM0001 G : DC +(+)(-) E T D Y

Rotary Table

B r 2. I is converted to the rotation of the shaft (A). B 2 r I = m2 2 b a I I = A B Number of teeth =b 5. Solid sphere Position of rotational axis: Through the center of diameter r 2 2 r I = m5 27 - Kinetic energy Table 9 shows the allowable kinetic energy of the rotary table.

CJ2Q

Bore d C B H NTJ-015A 10 16 8.1 9.2 7 8 3.2 4 M4 X 0.7 NTJ-010A M5 X 0.8 * Refer to p.1.3-12 for details of the mounting nut. (mm) ND NN Bore 10 16 A B C D F GA GB H MM NA NB S Z 0 0.022 0 0.022 15 12 14 4 8 8 5 28 M4 X 0.7 12.5 9.5 M8 X 1.0 46 74 75 8 15 18 20 5 8 8 5 28 M5 X 0.8 12.5 9.5 M10 X 1.0 47 10 Refer to p.1.3-8 to 1.3-10 for dimensions of each mounting bracket.

Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: C (NPN Open Collector 1 Output+Analog Voltage), Unit Specifications: Unit Switching Function (Not Allowed for Use in Japan), Lead Wire: No Lead Wire, Adapter: R [DIN Rail Adapter (DIN Rail to be Prepared by Customer)]

Pressure Range: 0.0 to -101.0kPa, Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: C (NPN Open Collector 1 Output+Analog Voltage), Unit Specifications: Unit Switching Function (Not Allowed for Use in Japan), Lead Wire: No Lead Wire, Adapter: R [DIN Rail Adapter (DIN Rail to be Prepared by Customer)]

Type: Pressure Switch, Fluid Type: Air, Sensor, Monitor Structure: [Integrated Type] Integrated shape, Analog Output Specification: Voltage, Pipe Port Type: Female Thread, Plumbing Thread Type: M, Plumbing Thread Nominal: M5x0.8, Fluid Characteristics: Noncorrosive / Incombustible, Pressure Resistance(MPa): 1.5, Operating Temperature Range(°C): -5～50, Operating Humidity Range(%): 35～85, Number

Type: Pressure Switch, Fluid Type: Air, Sensor, Monitor Structure: [Integrated Type] Integrated shape, Analog Output Specification: Voltage, Pipe Port Type: Female Thread, Plumbing Thread Type: M, Plumbing Thread Nominal: M5x0.8, Fluid Characteristics: Noncorrosive / Incombustible, Pressure Resistance(MPa): 0.5, Operating Temperature Range(°C): -5～50, Operating Humidity Range(%): 35～85, Number

EX500-GPR1A.eng

OUT IN BUS COM A COM B COM C COM D F R P B U S O I R DIA BF SOL RUN GATEWAY UNIT EX500 SERIES 18 19 Switch setting Open the station number switch protective cover and set the switches with a sharp-pointed watchmakers screwdriver etc. NOTE 1. Be sure to turn off the power before setting the switches. 2. Be sure to set these switches before use.

Safety Instructions

Connection thread size NPT , NPT, R NPT, R NPT, R NPT, R Standard torque (Nm) 7 to 9 12 to 14 22 to 24 28 to 30 Connecting Female Thread: Rc, NPT, NPTF 1 16 1 8 Approx. spanner tightening angle after tightened by hand deg Standard torque (Nm) Nominal size of uni thread 1 4 3 8 1 2 1 8 1 4 3 8 1 2 30 to 60 30 to 60 15 to 45 15 to 30 5 to 7 11 to 13 14 to 16 20 to 22 Courtesy of Steven Engineering

Air Slide Table Series MXQ

Nil AS AT A BS Note 1) Without adjuster Extension end Retraction end Both ends Extension end Retraction end Both ends Extension end Retraction end Both ends Option combinations Rubber stopper Functional option Adjuster option Nil F R P FR FP Shock absorber BT Note 1) Nil B Note 1) Note 3) Note 3) Note 3) AS, CS CS CT C Metal stopper x x AT, CT x x Note 3) x x A, C x x Note 1) Series MXQ6