,

(3-position): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B)

Series AP500

Vespel is a registered trademark of DuPont. 9 Low to intermediate flow (Tied-diaphragm) Single Stage Regulator for Ultra High Purity Series AP1900 For UHP gas delivery High inlet pressure type: Max. 3500 psig (24.1 MPa) Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance Tied-diaphragm design How to Order Port Number q w e r AP19 S FV4 FV4 01 2PW

EX500-GPR1A.eng

SI Unit for VQC/S0700 Series Valves ( EX500-Q 01 ) SI Unit for SV Series Valves ( EX500-S 01 ) M3 28: 4 pcs. ( Plus-minus slot round head screw ) Supply/exhaust block assembly Supply/exhaust block assembly 1.

Speed Controller with

2 w y r u e !2 t i q o !0 !1 i q o !0 !1 Component Parts No. Description Body A Handle Body B Needle Seat ring Needle guide Material Note No.

VEX-OMY0001

68 () 1) () AC100V AC200V 2) DC + 3) 1) 0.5Nm20% 180 AC DC o (DIN ) DIN DIN B1B09-2A () GM209NJ-B17 (CE ) (DIN ) 10 No.VEX-OMY0001 1) 2) 3) 1.351.45Nm P8,9 02 03 04 02 03 04 04 06 10 10 12 01 02 01 02 14 20 VEX312VEX322VEX332VEX342VEX350VEX370VEX390( ) VEX1-18-1A VEX5-32A VEX7-32A VEX9-32A ( ) VEX1-18-2A VEX3-32-2A P2 AN120-M5 AN103-01 AN210-02 1) VEX1-9-1P VEX4-2A-P

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

(N specifications) AS4200-04 How to Order 01 S AS 2 2 0 0 AS3200-03 Body size AS2200-02 1 2 3 4 M3, M5 standard AS1200-M5 AS2200-01 Made to Order Refer to page 523 for details. 1 8 1 4 , standard standard standard 8 3 2 1 Lock nut option Type J Hexagon lock nut Round lock nut Nil AS1200-M3 Direct cylinder elbow type 2 Option AS1400-M3 Direct cylinder flat elbow type 4 Nil None With seal S

S Couplers Series KKA

Body size Port size KKA3 S-01 M KKA3 P-01 M R1 / 8 R1 / 8 1 / 8 KKA3 S-02M 1 / 8 KKA3 P-02M R1 / 4 R1 / 4 KKA3 S-03 M KKA3 P-03 M R3 / 8 R3 / 8 KKA4 S-02M KKA4 P-02M R1 / 4 R1 / 4 KKA4 S-03 M 1 / 4 KKA4 P-03 M 1 / 4 R3 / 8 R3 / 8 KKA4 S-04 M KKA4 P-04 M R1 / 2 R1 / 2 KKA6S-03 M KKA6P-03 M R3 / 8 R3 / 8 KKA6S-04 M KKA6P-04 M 1 / 2 1 / 2 R1 / 2 R1 / 2 KKA6S-06M KKA6P-06M R3 / 4 R3 / 4 Built-in

C95Series

l S.

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Types 10, 20 Types 10, 20 VVDW 0 2 C 1 01 2 VVDW 2 0 4A Series Series 1 2 10 20 Thread type 1 2 10 20 Rc G NPT Nil F N Material Brass Stainless steel C S Type 30 OUT port size Stations VVCW20-4A Symbol M5 01 Port size M5 1/8 (6A) For 2 stations For 3 stations 1 2 Type 10 is M5 only.

VDW Series

Types 10, 20 Types 10, 20 VVDW 0 2 C 1 01 2 VVDW 2 0 4A Series Series 1 2 10 20 Thread type 1 2 10 20 Rc G NPT Nil F N Material Brass Stainless steel C S Type 30 OUT port size Stations VVCW20-4A Symbol M5 01 Port size M5 1/8 (6A) For 2 stations For 3 stations 1 2 Type 10 is M5 only.

Series H, DL, L, LL Self-align Fittings

L-04 L-06 N-04 N-06 LL-04 LL-06 S-04 S-06 4 6 L-08 8 L-10 10 L-12 12 4 6 N-08 8 N-10 10 N-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 4 6 S-08 8 S-10 10 S-12 12 0.7 1.1 1.4 1.7 2.0 Precautions Be sure to read before handling. Refer to Air Fittings & Tubing Precautions for other details. Installation Caution Cut the tube to the required length.

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil

Title not found

Budafoki ut 107-113, 1117 Budapest Phone: 01-204 4366, Fax: 01-204 4371 Sweden SMC Pneumatics Sweden A.B. Ekhagsvgen 29-31, S-14105 Huddinge Phone: 08-603 07 00, Fax: 08-603 07 10 Ireland SMC Pneumatics (Ireland) Ltd. 2002 Citywest Business Campus, Naas Road, Saggart, Co. Dublin Phone: 01-403 9000, Fax: 01-464 0500 Portugal SMC Espaa (Sucursal Portugal), S.A.

Series AS-FM/AS-M/ASD-FM

06 S Body size With sealant "S" is not applicable to M5 and U10/32 types, as they are not available with sealant. 2 3 4 M5 standard 1/8 standard 1/4 standard Model Applicable tube outside diameter Metric size Inch size 3 Universal 01 03 05 07 09 11 04 06 08 10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 4 6 8 10 With One-touch fitting For low speed control Thread type Port size M5 U10/32 01 02 Nil

Table of Contents

Applicable related components Total stroke time (s) SV Solenoid valve Tubing Speed controller Solenoid valve Tubing Speed controller Silencer Silencer 0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 0.0 0.2 0.4 0.6 0.8 1.0 1.2 1.4 1.6 1.8 2.0 SZ 200 400 CM2 20 MB 32 10% 30% 50% 70% 10% 30% 50% SY 150 300 Stroke (mm) 70% Stroke (mm) AS2201F -01-06 AS2200-01 AS2201F -01-08 AS2200-01 70% 100 SYJ

5 Port Solenoid Valve Series SV

-01-06 AS2200-01 100 50 0 ANA1 -C08 T0604 200 CM2 32 150 Stroke mm AS2201F -01-06 AS2200-01 100 50 0 200 CM2 40 150 Stroke mm AS2201F -02-06 AS2200-02 100 50 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details regarding different conditions, make determinations after using the P/A

Rated Vacuum Range: -101 to 0 kPa, Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: M5 (Female Thread, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A1 (Bracket A, Vertical Mounting)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: M5 (Female Thread), Lead Wire: w/o Lead Wire, Bracket: None, Operation Manual: Y (w/o Operation Manual, w/o Calibration Certificate)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: NPT 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Bracket B, Horizontal Mounting, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: NPT 1/8, Lead Wire: -, Bracket: -, Operation Manual: -