Soft Start-up Valve AV2000/3000/4000/5000 1

Normal operation 1/2 PP PA 3 (R) When pilot valve w is turned OFF, spring r pushes piston A e and q upward and opens R port while shutting off the air supply from P port. The pressure difference generated at this time lets the check valve open y and the residual pressure on the A port side is quickly exhausted from R port.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Rotate the lever assembly w to align the holes on the lever assembly w and the base e. Insert the lever pin q into the holes to fix the lever assembly w. 1 y Tubing !1 Holder assembly replacement screw i Holder assembly r Insert pin assembly u Fitting nut t Insert bushing Place the insert bushing t on the insert pin assembly r. 2 !

ITV

circuit EXH w Exhaust solenoid valve q Air supply solenoid valve u Pressure sensor r Diaphragm EXH e Pilot chamber y Exhaust valve u Pressure sensor t Supply valve r Diaphragm e Pilot chamber EXH t Supply valve SUP SUP OUT OUT EXH ITV1000 ITV2000, 3000 Block diagram Supply pressure q Air supply solenoid valve Input signal Output pressure r Diaphragm i Control circuit Pilot valve w Exhaust

One-touch Fittings

[inch] Model D1 D2 L Weight [g] 1/4 KQ2C-07B 11.5 7.5 2.6 0.1 3/8 KQ2C-11B 15.7 10.7 2.7 0.1 1/2 KQ2C-13B 19.6 13.9 2.7 0.2 : B (Black), R (Red), YR (Orange), BR (Brown), Y (Y ellow), G (Green), CB (Sky blue), GR (Gray), W (White), BU (Blue) : B (Black), R (Red), YR (Orange), BR (Brown), Y (Y ellow), G (Green), CB (Sky blue), GR (Gray), W (White), BU (Blue) 26 These safety instructions are

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Assembly of check valve body assembly, check valve cover and 2 screws Please consult SMC for special application specifications. 8 Series ARP20/30/40 Working Principle (Regulator with Backflow Function) ARP20K/30K/40K w A-A A 1 I N 2 OUT C SM A w w Inlet pressure Pressure in diaphragm chamber Inlet pressure Pressure in diaphragm chamber (IN side) (IN side) r r IN (Inlet pressure) OUT (Outlet

Rotary Actuator NCRA1 Series Single Rack and Pinion

Posfiql ol fivot: Diameter , W 2 r 2 Pcitim ol pivot: Fdsses though orp erd perpendicular to the plate. Position ol pivot: t=$.4eit!1*ua,+.i+u' 9 4

3 Port Solenoid Valve Metal Seal Series VZ200 1

Description No. t y NBR Stainless steel Material Note Spool/Sleeve Body Platinum silver Gasket Return spring w e r Polyacetal Piston O-ring u NBR Seal i NBR O-ring o NBR O-ring !0 NBR Mini Y seal !1 Carbon steel Round head combination screw NBR Aluminum die-casted Sub-plate Platinum silver Sub-plate Assembly Part No.: VZ200-S-01 !2 Carbon steel Round head combination screw !

Stroke Reading Cylinder and Counter

2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y CEP1 CE1 CE1 r @9 @2 CE2 !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 ML2B #8 12 40 to 63 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 #7 #6 !5 !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 Component Parts Component Parts Material Note No. Description Material Note No.

XL

Construction /Operation Auto switch (optional) Indicator (optional) Bonnet assembly (includes ) Piston seal Magnet (built-in only for auto switch) Actuation port Piston Exterior seal (maintenance part) Shaft seal Name plate Plate Port P (pressure port) P Port R (exhaust port) Solenoid valve R Heater (optional) Bellows side exhaust With solenoid valve Bellows Spring Body Valve Valve seal (

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

(max.) d W W D d E E D M MA a a M MA F NA NA F K A A K C H + Stroke S + Stroke H B ZZ + 2 strokes (mm) Bore size (mm) A a B C d E F G GA J K M MA MM NA P R S T V W H ZZ D 0 -0.018 0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 0 -0.062 0 -0.062 0 -0.074 0 -0.074 0 -0.074 0 -0.074 0 -0.087 40 23 10 60 44 18 45 25 14 17.5 M8 x 1.25 18 13 20 M14 x 1.5 30 1/4 37 114 11 7.5 8 66 246 17

Air Cylinder RSQ Series Stopper Cylinder

Use this box ior inductive loads, 5 metersor more ol lead wires, or 100,200VAC applica" D-48 swlch is used iof IooVAC or lsss Sin@ lhere F no votage lmilalon, you can s 6ct a suilable model lor your 2 AND connections for 2-wire system 2 OR connctions lor 2-wire system -go-f1;rw el rwo >w !r e\ " f = ; C ; i r _ , i o q m l r a 6 d . t o a d J o r . \\.:j+_ | aq6 oe.orr qredrasa I | -!

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

LEH_C

10 10 PNP PNP 1P 1P 6 6 20 20 AN LECPA () AP AN LECPA NPN NPN 32 8 32 8 PNP AP PNP 40 12 40 12 (m) 8 8 8 8 A A 1.5 1 1.5 1 10 10 ( B B F F 3 3 3 3 15 15 C C 5 5 5 R 20 20 R 5 ( () R R S S / P.42 7.3 <> (NPNPNP) LEHS10K3-4 NPN 6 - 4.3 3 8 2 5 1 4 7 6 1 2 3 4 5 6 7 8 ( DC24V) 7 - 5. 5.1 I/O LEC-CN5-* PLC DC24V 2) CN5 1) CN4 LE-CP-*-* () LE-CP-*S-* () CN3 CN2 120.3

Vacuum Pad

Dimensions: Pad Unit ZP3P-20PTSF [Weight: 1.8 g] ZP3P-25PTSF [Weight: 2.2 g] 14 7 13 7 17.5 17 20 3 25 3 2 1.6 ZP3P-35PTSF [Weight: 4.7 g] ZP3P-50PTSF [Weight: 12.4 g] 20.5 10 20.5 10 22 19 35 4 50 4 3 4.5 Pad Mounting Dimensions 20PT/25PT 35PT/50PT R R 12.5 1.9 12 2.4 R R R R R R 10 7.5 3 13 10.7 4 R R R part has to be smooth with no corners. 2 ZP3P Series How to Order Vertical vacuum inlet

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Output impedance: 1 k L4: Analog output: 4 to 20 mA Load impedance: 50 to 600 When used as an IO-Link device Brown L+ L+ Main circuit Black C/Q C/Q IO-Link master White Other Blue L L 17 2-Color Display Digital Flow Switch PF2M7(-L) Series Construction: Parts in Contact with Fluid PF2M701/702/705/710/725/750/711(-L) e w w q e r t y u i o r Female thread w PF2M705/710/725/750-C4/C6(-L) PF2M711

Modular F.R.L. Unit

Metal bowl with level gauge w q With bowl guard e q w Drain guide 1/4 N R q w Non-relieving type Flow direction: Right to left Note 1) The circled numbers indicate the order in which the units are assembled.

VCL

LVC DIN terminal: D Conduit terminal: T Cable 6 to 12 LVA F S Q 27.5 34 F (Q) LVH LVD LVQ LQ R C U 25 LVN C (44) R E R TI/ TIL G1/2 E PA G1/2 A H D (S) B B A H D 2-P Port size 2-P Port size PAX 2-M Thread depth N 2-M Thread depth N PB L L K K N.C.

RB/RBL/RBQ

e r t y u i o !

AR Series Modular Type Regulator

r q w w Component Parts No.

CYV

low particulate generating vacuum grease. p r Non-contact construction a w t i o o n L There is no particulate generation due to friction, since the construction does not allow contact between the cylinder tube's exterior surface and the slide table's internal surface. a t e l u g c Reduced initial particulate generation 3 e i t n r a e p r a w t i o o n L No contact Cleaned, assembled,