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Refer to 4-3Mounting to NEXTAGE (P.15). Hexagon socket head Flange 1pc. Positioning pin (610) 1pc. cap screw (M610) 2 pcs. Hexagon socket head Positioning pin (510) 1pc. cap screw (M510) 2 pcs. 4 - 2.

LEC-OM08003 // LEC-T1 Series LEC6 LECPA TB Ver2.1 .5 .7 1. .9 1.1 .9 1.9 2.10 1.2 .11 1.11 2. .12 3. .13 3.1 .13 (1).13 (2)Tree .13 3. .14 (1).14 (2)Tree .15 4.16 5. .17 5.1 .18 5.2 .19 (1).19 (2).19 5.3 .20 (1).21 (1-1) LECPLECA 22 (2) .23 (2-1) LECPLECA 23 (2-1-a) TB Ver1.**. 23 (2-1-b) TB Ver2.**. 25 (2-2) LECPLECA 27 (2-2-a) TB Ver1.**. 27 (2-2-b) TB Ver2.**. 29 (2-3) LECPLECA .32 1

SMC SY100-30-1A-10 connector assy, SY3000 SOL/VALVE, RUBBER SEAL*** $1.67 + Add to Quote Add To Cart Add to Cart SMC SY100-30-1A-15

SMC SY100-30-1A-10 connector assy, SY3000 SOL/VALVE, RUBBER SEAL*** $1.67 + Add to Quote Add To Cart Add to Cart SMC SY100-30-1A-15

SMC SY100-30-1A-10 connector assy, SY3000 SOL/VALVE, RUBBER SEAL*** $1.67 + Add to Quote Add To Cart Add to Cart SMC SY100-30-1A-15

SMC SY100-30-1A-10 connector assy, SY3000 SOL/VALVE, RUBBER SEAL*** $1.67 + Add to Quote Add To Cart Add to Cart SMC SY100-30-1A-15

SMC SY100-30-1A-10 connector assy, SY3000 SOL/VALVE, RUBBER SEAL*** $1.67 + Add to Quote Add To Cart Add to Cart SMC SY100-30-1A-15

Rotate the pressure gauge cover 15 degree counterclockwise to pull out the pressure gauge cover. AW20(K) AW30(K) AW40(K) AW60(K) 2) Remove the pressure gauge. Rotate two mounting screws counterclockwise with Phillips head screw driver to remove the pressure gauge and two mounting screws.

15 15 17 (Workpiece adsorption port) 6.4 6.4 58 6.4 74.2 A (Refer to the figure below.) 6.8 66 58 58 Auto switch mounting groove on workpiece adsorption side Rc1/8 (Workpiece release port) Bumper (9.8) (26.5) (25.1) 50 50 (4) 50 D-P3DWA D-M9V With auto switch Symbol Part number A B C T 1 MHM-32D1-X6400 80.2 39 A T (6) 2 MHM-32D2-X6400 81.2 30 (7) 3 MHM-32D3-X6400 82.2 (8) 50 B C Bumper dimensions

Refer to pages 12-15-3 to 12-15-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 12-1-4 to 12-1-6 for Precautions on every series. Warning If a workpiece is hooked onto the attachment, make sure that excessive impact will not be created at the start and the end of the movement.

B G P BG GP 1 Specialty Regulators ARX Series Regulator for 290 psi (2 MPa) ARX20, 21 Flow Characteristics ARX20-N02 130.5 ARX20-N01 Conditions: Supply pressure 290 psig 130.5 116 116 101.5 101.5 Secondary pressure (psig) Secondary pressure (psig) 87 87 72.5 72.5 58 58 43.5 43.5 30 30 15 15 0 3.5 7.1 10.6 14.1 17.7 21.2 24.7 28.3 31.8 35.3 0 3.5 7.1 10.6 14.1 17.7 21.2 24.7 28.3 31.8 35.3

Flow (l/min (ANR)) Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Needle rotation (Turns) Needle rotation (Turns) Needle rotation (Turns) ASD530F ASD630F 1000 1500 14 20 10, 11 12 Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 12 1000 10 8 10, 11, 12 08, 09 15

bending radius 80 3.4 13 4.5 6 Series ITV0 Dimensions Single unit for manifolds 56 50 PWR ERR M8 x 1 Cable connection threads 15 15 9 84 86 3.7 Breathing hole Note) (M3 x 0.5) OUTx OUT port (4, 5/32") 8 2 5 18.5 Note) When used under the conditions equivalent to IP65, use the regulator after piping a fitting/tube into a breathing hole.

) M5 x 0.8 34 2-3.5 Manual override (Mounting hole pitch) (For mounting) (Non-locking) 8 10.6 9 A 1 32 24 15 X 24.5 18.6 (37) (30) 1 1.5 14.5 3 R P 23 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 21 34 4 33 42 4 4 2-2.6 (2.3) 39 (25) (18) 46 (For mounting) 2-M3

Note) Tighten within the tightening torque of 0.5 Nm 15%. Note: a It is possible to wire even in the state of bare wire.

VR D E F G J K C 18 1(P) 2(A) 4 4 VHK-04F-04F VHK-06F-04F VHK-06F-06F VHK-08F-06F VHK-08F-08F VHK-10F-08F VHK-10F-10F VHK-12F-10F VHK-12F-12F 31.5 21.8 17.5 3 port valve 41 3.5 1 27 22 26 47.6 23.8 23.8 16.5 15.8 15.8 11 3.4 1.2 15 VHK-B1A 44.5 14.5 16.5 VH 18 6 4 6 41 48 48.6 24.3 23.7 16.5 3.5 16.8 15.8 11 5.1 1.2 15 16 VHK-B1A 44.5 14.5 1 27 22 16.5 26 24.3 16.8 7.2 18 8 6 8 41 50.5 52.4

PF2D5--1 (With voltage output type) PF2D540-19 Display unit (PF2D30/31) 186 Sensor unit 78 86 Brown 6 2 Analog output Switch output or Pulse output Main circuit Main circuit 56 8 4 Load + 12 to 24 VDC 15 White 7 3 Black 5 1 Blue Load is an analog input equipment such as a voltmeter.

, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Replacement Parts: Seal Kits Theoretical Output Table OUT IN Unit: N Bore size (mm) Contents Kit No.

34.5 26.5 25.5 (34.5: Connector type) Angle adjustment bolt 2-M5 x 0.8 (Port position: Side port type only) A port B port 31 25 20.5 (26.5: Connector type) 50 65 Connector type 8 4 Connector type 10 Series MSUA Rotary Table High Precision Type Construction Single vane 180 (Indicates intermediate position) 90 (Indicates A port pressurized) Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15

Bore size (mm) Bore size (mm) DL DM HR LL MO DB Over 25 to 75st 98 Over 75 to 175st 118 Over 25 to 75st 13.5 Over 75 to 175st 33.5 Over 175st 25st or less 25st or less Over 175st 22 22 9.5 21 15 15 84.5 140 16 0 55.5 32 32 26 23 11.5 25.5 21 19 91 98 118 140 16 0 7 27 49 40 40 24 23 13 27 21 19 50 97 114 134 161 20 0 17 37 64 50 25 25.5 11 25 21 19 63 102 114 134 161 20 0 12 32 59 63