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12 V M9PV M9P 3-wire (PNP) M9BV M9B 12 V Relay, PLC 2-wire 24 V Grommet F9NWV F9NW 3-wire (NPN) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) F9PWV F9PW 3-wire (PNP) 2-wire F9BWV F9BW 12 V Lead wire length symbols: 0.5 m Nil (Example) A93 3 m L (Example) A93L 5 m Z (Example) F9NWZ Solid state switches marked with are produced upon receipt of order.

24 V 3-wire (NPN) Y7NWV Y7NW IC circuit 5 V 12 V Diagnosis (2-color indication) 3-wire (PNP) Y7PWV Y7PW IC circuit 12 V 2-wire Y7BWV Y7BW Lead wire length symbols: 0.5 m Nil (Example) Y59A 3 m L (Example) Y59AL 5 m Z (Example) Y59AZ Auto switches marked with a symbol are produced upon receipt of order.

24 V 3-wire (NPN) Y7NWV Y7NW IC circuit 5 V 12 V Diagnosis (2-color indication) 3-wire (PNP) Y7PWV Y7PW IC circuit 12 V 2-wire Y7BWV Y7BW Lead wire length symbols: 0.5 m Nil (Example) Y59A 3 m L (Example) Y59AL 5 m Z (Example) Y59AZ Auto switches marked with a symbol are produced upon receipt of order.

54 125 Label 188 61 P Port exhaust (N)ZL212P V Vacuum pressure gauge Exhaust with silencer Exhaust port 1 25 With vacuum pressure gauge (N)ZL212-G P V Exhaust with silencer Vacuum adapter 1/8 7 With vacuum adapter (N)ZL212-GN P V Vacuum pressure switch Exhaust with silencer With digital vacuum pressure switch (N)ZL212-E P V RESETSET Approx. 500 Section A (L: approx. 2900) 2-4.4 Mounting hole

Load voltage Indicator light Lead wire length (m) AC DC Auto switch model Applicable load Pre-wire connector Special function Type Electrical entry Wiring (Output) 5(Z) 0.5(Nil) 3(L) Perpendicular In-line Reed switch Solid state switch IC circuit 3-wire (NPN equivalent) A96 A96 5 V Grommet Yes Relay, PLC 2-wire A93V A93 100 V 24 V 12 V M9NV M9N 3-wire (NPN) IC circuit 5 V, 12 V M9PV

Solenoid on side A 0 2 4 6 8 16 28 30 2 3 1 SV24 V +24 V for valve 5 2 SV0 V 0 V for valve Side D Side U URL http://www.smcworld.com 1 4 3 SW24 V +24 V for input (SI unit side) Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 SW0 V 0 V for input 4 Output No.

v Deionized water v Sodium hydroxide Ultra deionized water v Toluene v Hydrofluoric acid Concentration 50% or less v Sulfuric acid (except fuming sulfuric acid) Concentration 20% or less v Phosphoric acid Concentration 30% or less v Note 1) The material and fluid compatibility check list provides reference values as a guide only.

ZL3 M 0 1 K1 5 LO Z 1 E A M G 1 ZL3 M 0 1 K1 5 LO Z 1 E A M G 1 ZL3 M 0 1 K1 5 LO Z 1 V A M W 1 1 2) 3) 4) 5) 6) 7) 8) 9) 10) 11) 12) 13) 14) 4) 2) 1) 3 300L/min(ANR) M 0.35MPa *2 P 6 600L/min(ANR) H 0.50MPa 3)P V/ *23 (V) (P) 5/ 06 Rc3/4 K1 N.C.+N.C. 8() 04 2xRc1/2 K2 N.C. *1 F06 G3/4 B1 N.0.+N.C. *1 F04 2xG1/2 B2 N.O.

11-5 IDFB Series 11 3 IDX-OM-W020 11 T IDFB15E-11-T R V CM FM15 OLR C1 ILS PRS PTC PTC r TB12 MC RY TDR GFCI EDV 11-5 IDFB Series 11 4 IDX-OM-W020 12 V 12 V V 12-2 12-1 1. 1 2 2. 3.

All solenoid valve outputs are reset to zero. 2 SV0 V 0 V for valve 3 SW24 V +24 V for input 1 4 5 SW0 V 0 V for input 4 Mode setting 5 FE Ground URL https://www.smcworld.com Mode SW1-10 0 H / W mode Set address and communication speed by SW1 to 8.

Input voltage 1 V 5 V The sensor input range can be set to the required value and displayed. (Voltage input: 1 to 5 V) Pressure switch/Flow switch can be displayed. M For Flow Sensor / PFMV5 Setting of the display for analog voltage A is displayed for 1 V. B is displayed for 5 V. The range can be set as required.

Table(2) Rated Voltage-Electrical Entry-Electrical Option PAX Table(1) Connection Size and Applicable Model Insulation type Electrical entry Electrical option 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) Class B Class H G C D, T G, C T PB S L, Z S L, Z S Note ) Connection Applicable model VXP2130-02 VXP2130-03,VXP2140-03 VXP2130-04,VXP2140-04 VXP2150-06

LQ LVN Table(1) Connection Size and Applicable Model Table(2) Rated Voltage-Electrical Entry-Electrical Option Insulation type Electrical entry Electrical option 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) TI/ TIL Applicable model VXR2150-04 VXR2150-06 VXR2260-10 1 VXR2270-12 1 VXR2380-14 2 VXR2390-20 Size Class B Class H G PA 1 2 3 4 C D, T G, C T S L,

/10Mbps NRZI (EIA RS485) HDLC 16+X 12+X 5+1) CRC(X CC-Link (bps) 156k 625k 2.5M 5M 10M (m) 1200 900 400 160 100 10 - IF RS485(Modbus ) 115.2k 230.4kbps (115.2kbps) 36m (3mX12 ) 3m 3m 3m 3m 3m 0 40() 90%RH () -10 60() 90%RH () 2(0.5G) 4.9m/s IP20 200g() 220g(DIN ) 11 - 3.2 1 LED 2 STATION No.

Auto switch 1 Auto switch 1 Blue Blue Brown Brown Auto switch 2 Auto switch 2 Blue Blue Load voltage at ON = Power supply voltage Residual voltage x 2 pcs. = 24 V 4 V x 2 pcs. = 16 V Load voltage at OFF = Leakage current x 2 pcs. x Load impedance = 1 mA x 2 pcs. x 3 k = 6 V Example: Load impedance is 3 k. Leakage current from auto switch is 1 mA.

wire Connector Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector Relay, PLC 24 V 3-wire (NPN) 3-wire (PNP) IC circuit Diagnostic indication (2-color indication) 5 V, 12 V Grommet 2-wire 12 V Water resistant (2-color indication) With diagnostic output (2-color indication) 5 V, 12 V IC circuit 4-wire (NPN

Z73 Y59A Y7P Y59B Y7NW Y7PW Y7BW 3-wire (NPN) 2-wire Y69A Y7PV Y69B Y7NWV Y7PWV Y7BWV 100 V or less IC circuit 5 V, 12 V 3-wire (PNP) IC circuit 2-wire 12 V Relay, PLC 24 V Grommet 3-wire (NPN) 3-wire (PNP) 5 V, 12 V Diagnostic indication (2-color indication) 2-wire 12 V Lead wire length symbols: 0.5 m Nil (Example) Y59A 3 m L (Example) Y59AL 5 m Z (Example) Y59AZ Since there are

to 2.5 A (240 V) 9 A (100 V) to 4 A (240 V) 10 A (100 V) to 4 A (240 V) 8 A (200 V) Power consumption 440 W*1 850 W*1 900 W*2 1500 W*2 Alarm Refer to Alarm.

(Ex. : 25.0 C Function : Sets target temperature P V 2 3 . 0 C # 1 S V < 2 5 . 0 C M O D E 3. Control Operation Setting range : 0,1,2,3,4 Indicated content : Number and description of control operation mode.