High Vacuum Angle Valve

Construction/Operation Auto switch (Option) Heater (Option) Pilot port (Pressurize to close) P-2 q Bonnet assembly (Maintenance parts)1 (Including w, e, y, u, i, o) Magnet (Option) Pilot port (Pressurize to open) P-1 r Exterior seal (Maintenance part)1 i Bellows holder (Material: Stainless steel 304) u Bellows assembly (Maintenance parts)1 (Including y, i) Bellows (Material: Stainless steel

Thermo-chiller

/Japanese 1 pc.), Y-strainer 20A 1 pc., Barrel nipple 20A 1 pc., Drain pan for the pump 1 pc.

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

WA WB View E NN F GB GC GA Mounting nut Mounting nut Relief port M5 x 0.8 Rod end nut MM NN F Piping port 2 x M5 x 0.8 Cover surface D LY LB LH LT LZ LX LT S + Stroke H NA A NB Y X Y X 4 x LC Mounting hole LS + Stroke Z + Stroke WW C B 0 0.3 B 0 0.3 Drawing of view (E) (mm) Z S WW WB WA NB NA NN MM H GB GA F D C B A Y X 91.5 92.5 LS LZ 42 42 25 25 LY LX 33 33 2.3 2.3 LT 14 14 LH 5.5 5.5 LC

HRS100/150

Description Size 1 Valve Rc1/2 2 Valve Rc3/4 3 Y-strainer (#40) (Accessory) Rc3/4 4 Flow meter Prepare a flow meter with an appropriate flow range. 5 Valve (Part of thermo-chiller) Rc1/4 6 Y-strainer (#40) Rc1/2 7 Pressure gauge 0 to 1 MPa 8 Y-strainer (#40) or filter Rc3/4 Cable Specifications Power supply and signal cable should be prepared by user.

HRX-OM-X084

Description Qty Applicable model Anti-quake bracket A Anti-quake bracket B 2 2 4 4 HRR010-A/W-10/20-Y HRR012/018-A/W-10/20-Y HRR-TK001 Nut (M8) HRR024/030-A/W-20-Y Bolt (M8) HRR050-A/W-20-Y Mounting of anti-quake bracket 1. Remove the cap from M8 stud bolt. (4pcs) 2. Mount the anti-quake bracket A. (Recommended torque : 12.5Nm) 3. Mount the anti-quake bracket B.

C76

9 @0 q w e r t y u i o !

C76

9 @0 q w e r t y u i o !

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

A A1 E1 L1 M10 x 1.25 +0.058 0 0.2 0.4 Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 16 25 30 30 40 50 55 M8 x 1.25 16 20 36 44 56 64 11.5 14 14 20 27 31 21 25.6 41.6 50.6 64 72 8 10 10 14 18 22 8.5 10.5 16 20 23 24 8 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 M14 x 1.5 34 41 42 56 71 79 20 25, 32 40 50, 63 80 100 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

1 Data (Piston part) @3 y i e w y @3 i @3 y y i CXSWL1015 CXSW6 CXSW10 CXSW25, 32 Component Parts Note Nickel plated Note Hard anodized Hard chrome plated Hard chrome plated Description Material Special steel Synthetic resin Synthetic resin Polyurethane Chromium steel Aluminum alloy NBR NBR NBR NBR No. q w e r t y u i o !

10

03MNote 1) 32 20 30 M10 x 1.25 10 16 10 +0.058 0 14 +0.30 +0.10 28 0.10 0.30 Y-04MNote 1) 40 22 40 M14 x 1.5 11 19 10 +0.058 0 14 +0.30 +0.10 28 0.10 0.30 Y-05MNote 1) 50, 63 28 50 M18 x 1.5 14 24 14 +0.070 0 20 +0.30 +0.10 40 0.10 0.30 Y-08MNote 1) 80 40 65 M22 x 1.5 20 34 22 +0.084 0 30 +0.30 +0.10 60 0.10 0.30 Y-10MNote 1) 100 40 65 M26 x 1.5 20 34 22 +0.084 0 30 +0.30 +0.10 60 0.10 0.30

MQQ

Y 4-LD X X LG LT 28 10 to 50, 75, 100 104 123.2 12 6.6 4 33 LS + Stroke LX LZ RE A B A + Stroke B + Stroke L REC 25, 28 Bore size (mm) LS LT LX LY LZ X Y CX 10 49.5 2 38 33.5 48 8 5 M LY 16 58.5 3.2 48 42 62 9.2 5.8 LH CY 20 64 3.2 52 46 66 10.7 5.8 25 68.5 3.2 57 57 71 11.2 5.8 X X LG Y Y 4-LD LT MQQ M 28 88 3.2 64 64 78 11.2 7 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San

Multi-Axis Step Motor Controller

4 r t y u i !5 !6 No.

energy saving effect

Description Size 1 Valve Rc1/2 2 Valve Rc1 3 Y-strainer (#40) (Accessory) Rc1 4 Flow meter Prepare a flow meter with an appropriate flow range. 5 Valve (Part of thermo-chiller) Rc3/4 6 Y-strainer (#40) Rc1/2 7 Pressure gauge 0 to 1.0 MPa 8 Y-strainer (#40) Rc1 Cable Specifications Power supply and signal cable should be prepared by user.

MQQ

2 u y i o MQQ M RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

CL

Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

110 140 76 56 3.5 110 170.5 I-16 Y-16 120 155 83 63 3.5 125 193.5 I-18, I-20 Y-18, Y-20 135 160 88 71 3.5 160 245.5 I-25 Y-25 160 195 106 80 3.5 175 266.5 I-30 Y-30 175 210 115 6-9-19 20 Series CDS1 Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height D-A3/G3/K3 D-A5/A6 Applicable cable O.D. 6.8 to 9.6 ~ = Auto

Mechanically Jointed Rodless Cylinder Series MY1

x g X Z Y m x g x X x m x g Vertical mounting Mounting orientation Ceiling m Wall m Vertical m Note) Static load m Horizontal m M M m x g x X m x g x X m x g x Z M Static moment z y Y m x g x Y m x g x Y m x g x Z M Z m x g x X m x g x Y m x g M Note) m is a mass movable by thrust.

OMU0023

Write data to a single holding 06h Note 3) and data Note 4) register address (D) Y contact wiring is not available. Communication test using 08h Diagnostics Broadcast is not available. echo back Broadcast is available. Write to (force) multiple output Writing of multiple Y contacts 0Fh signals (Y) Note 1) (No response is made.) Broadcast is available.

T

(mm) W White R Red H Black (B) White (W) BU Blue Tubing model Y Yellow Blue (BU) Red (R) D G Green C Clear Yellow (Y) Green (G) Clear (C) Orange (YR) MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com YR Orange T Length per roll VMG 20 20 m roll Fluid Air/Water Max

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

1 y q w e !0 o q y !1 t Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !