EXxx-OMN0027CN

Byte0 1 Byte1 2 Byte2 3 Byte3 PROFIBUS DP Byte4 ID(14h) Byte5 ID(11h) Byte6 Header Byte7 System diag.1 Byte8 System diag.2 Byte9 System diag.3 Byte10 System diag.4 Byte11 Reserved : : Byte18 Reserved Byte19 Header Byte20 0~7 Byte21 8~9 Byte22 Reserved : : Byte27 Reserved Byte28 A Byte29 A Byte30 A Byte31 B Byte32 B Byte33 B : : Byte61 L Byte62 L Byte63 L -71No.EX-OMN0027CN-D 1 7 6 5

EX260-SMJ_eng

L ERR L RUN PWR(V) PWR Outline Dimensions Precautions for maintenance Be sure to switch off the power. Check there is no foreign matter inside the SI unit. Check there is no damage and no foreign matter being stuck to the gasket. Be sure to tighten the screws with the specified torque.

min)Flow setting range Note 7) (l/min)Main tank capacity Note 8) ( l )Sub-tank capacity Note 9) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 10) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunications( C)(MPa)(A)(kg)HRZ010-WSWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35 C, Humidity: 30 to 70%RH?

min)Flow setting range Note 7) (l/min)Main tank capacity Note 8) ( l )Sub-tank capacity Note 9) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 10) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunications( C)(MPa)(A)(kg)HRZ010-WSWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35 C, Humidity: 30 to 70%RH?

min)Flow setting range Note 7) (l/min)Main tank capacity Note 8) ( l )Sub-tank capacity Note 9) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 10) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunications( C)(MPa)(A)(kg)HRZ010-W2SWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35 C, Humidity: 30 to 70%RHClear water

) +/-0.03 (Type L); Non-rotating accuracy 80 & 100mm bore: +/-0.03° (Type M) +/-0.03 (Type L); Rubber bumpers as standard; Auto switch capable; Material restriction: Copper and Zinc free

(Type L); Non-rotating accuracy 80 & 100mm bore: +/-0.03° (Type M) +/-0.03 (Type L); Air cushions standard; Auto switch capable; Material restriction: Copper and Zinc free

) +/-0.03 (Type L); Non-rotating accuracy 80 & 100mm bore: +/-0.03° (Type M) +/-0.03 (Type L); Rubber bumpers as standard; Auto switch capable; Material restriction: Copper and Zinc free

(Type L); Non-rotating accuracy 80 & 100mm bore: +/-0.03° (Type M) +/-0.03 (Type L); Air cushions standard; Auto switch capable; Material restriction: Copper and Zinc free

IO-Link: L/min; Accumulated Flow: L; Temp.: °C)

min; Accumulated Flow: L; Temp.: °C)

min; Accumulated Flow: L; Temp.: °C)

The S type is a high-vacuum type, and the L type is a large flow rate type.
Refer to the ZH10 models and “Flow Rate Characteristics” graphs below. Symbol “S” (-90 kPa) and “L” (-48 kpa or -66 kPa) are available for the vacuum pressure reached, but they are not related to the nozzle diameter.

20 to 350 L/min2 L/min2 L/pulse30A340 g425 g

min)Flow setting range Note 7) (l/min)Main tank capacity Note 8) ( l )Sub-tank capacity Note 9) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 10) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunications(C)(MPa)(A)(kg)HRZ010-W1SWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHAqueous solution

min)Flow setting range Note 7) (l/min)Main tank capacity Note 8) ( l )Sub-tank capacity Note 9) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 10) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunications(C)(MPa)(A)(kg)HRZ010-W1SWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHAqueous solution

min)Flow setting range Note 7) (l/min)Main tank capacity Note 8) ( l )Sub-tank capacity Note 9) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 10) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunications(C)(MPa)(A)(kg)HRZ010-W1SWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHAqueous solution

min)Flow setting range Note 7) (l/min)Main tank capacity Note 8) ( l )Sub-tank capacity Note 9) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 10) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunications(C)(MPa)(A)(kg)HRZ010-W1SWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHAqueous solution

min)Flow setting range Note 7) (l/min)Main tank capacity Note 8) ( l )Sub-tank capacity Note 9) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 10) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunications(C)(MPa)(A)(kg)HRZ010-W1SWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHAqueous solution

min)Flow setting range Note 7) (l/min)Main tank capacity Note 8) ( l )Sub-tank capacity Note 9) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 10) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunications(C)(MPa)(A)(kg)HRZ010-W1SWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHAqueous solution