SMC Corporation of America
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Model number Serial number Type and quantity of refrigerant How to read the serial number A R 001 April 2022 A R 001 Year Symbol Remarks Month Symbol Remarks Serial no. 4 R Repeated from O to Z in alphabetical order, with O for January and Z for December 2022 A 2023 B 5 S Repeat ed from A to Zin alphab etical order 2024 C 6 T Fig 1-1 Position of product label HRR Series 1.4 Product Label

Remote Mount (option R) is only available for ND91_ (standard enclosure) variants.

B r 2. I is converted to the rotation of the shaft (A). B 2 r I = m2 2 b a I I = A B Number of teeth =b 5. Solid sphere Position of rotational axis: Through the center of diameter r 2 2 r I = m5 27 - Kinetic energy Table 9 shows the allowable kinetic energy of the rotary table.

B r 2. I is converted to the rotation of the shaft (A). B 2 r I = m2 2 b a I I = A B Number of teethb 5. Solid sphere Position of rotational axis: Through the center of diameter r 2 2 r I = m5 29 - Kinetic energy Table 10 shows the allowable kinetic energy of the rotary table. Here, the angular speed can be found from the formula below.

CL CL1 MLGC CNG MNB Proper tightening torque (Nm) 7 to 9 12 to 14 22 to 24 Connection thread size R 1/8 R 1/4 R 3/8 CNA Caution CNS 1. Be sure to connect the load to the plate section with the lock in an unlocked condition. If this is done in the locked state, it may cause damage to the lock mechanism.

I = m + mL kgm 2 r Find the actual moment of inertia I.

2 y r i q !9 !8 @2 @0 @3 @5 @8 @7 o u !7 t CY3R15, 20 CY3R15 Parts list No. Description No.

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel 304 M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel plated

2 r w e i !0 !5 t u y MDHR2 q !4 !3 o @0 !2 !1 !9 w !8 i !6 i !7 e r !5 !0 t y u Component Parts Component Parts Description Material Description Material Note No. q w e r t y No. !1 !2 !3 !4 !5 !6 !7 !8 !

2 y r i q !9 !8 @2 @0 @3 @5 @8 @7 o u !7 t CY3R15, 20 CY3R15 Parts list No. Description No.

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

B 2 PE R 3 3 R 3 R 3 1 P 1 P P 1 P 1 X A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 4-One-touch fitting [1(P), 3(R) port] Applicable tube O.D.: 8 2-One-touch fitting (X, PE port) Applicable tube O.D.: 6 2n-One-touch fitting [4(A), 2(B) port] Applicable tube O.D.: 4, 6 (L4) Applicable connector: 20 pin MIL type with strain relief L3 U side D side Connector entry direction switch 6.6 (3.2) 101.2

controller PP+B7 1k PPB8 Current limit resistor R NP+B9 1 k NPB10 Current limit resistor R (b) Upper level equipment is PNP type Power supply for pulse train signal Positioning Unit side Inside the controller PP+B7 1k PP-B8 Current limit resistor R NP+B9 1k NP-B10 Current limit resistor R 27 - ii.

R 12 12.1 12.2 1 AC100V AC200V INOUT IDF15E1-10-R IDF15E1-20-R (A) 10 (mA) 30 12.3 M5 9.5mm 1.25mm 2 L ,N N L () () 12 1 12.R AC100V M4 () AC200V (M3) 12.4 () () ONOFF 12 2 12.R 12.5 IDF15E1-10-R IDF15E1-20-R N L N L GFCI GFCI PE TB ILS ILS OLR PTC OLR PTC CM CM C02 C01 C11 C11 FM FM PRS PRS P P CM PTC PTC C01 FM PRS C02 OLR PC C11 ILS TB GFCI 12 3 13.S S 13

-2VEX-OMV0001 / *3) 1 1.5 *3)1 1 () [] -3VEX-OMV0001 VEX1 Series / / C-R ( )C-R SDS DC VEX1101, VEX1201, VEX1301 2% () VEX1501, VEX1701, VEX1901 3% AC VEX1101, VEX1201, VEX1301 20% VEX1501, VEX1701, VEX1901 15% (SSR)AC 1) (C-R ) OFF () 2)() P2 N.O.() ZNR 1V 0C () 4 VEX-OMV0001 VEX1 Series / () DC 1(P)2(A) 1 ()ISO VG32 1) 2 ( )ISO VG32 (SDS) M5 1/61/4 11.5Nm ) 2)R,

1 upward, the pressure at the top surface of piston e decreases, causes piston e to move upward, opens poppet valve (exhaust) y via shaft u, and is discharged through port R to the atmosphere.

Leakage voltage Take special precautions if a resistor is used in parallel with the switching element or a C-R element (for surge voltage protection) is used for protection of the switching element. The valve may fail to turn off due to leakage current flowing through the resistor or C-R element. PF2 IF Data Switching element OFF Caution R C Leakage voltage Power supply 1.