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Filtration efficiency 99.9% Membrane FGH200 to 300 0.2 m EB ES X40 0.4 m Port size Element classification Note) 03 04 06 10 Rc3/8 Rc1/2 Rc3/4 Rc1 Element HEPO 2 Membrane Symbol J D Note) Refer to pages 70 to 73 for details about specifications, models, dimensions, etc. regarding the elements.

G Stainless steel Body material Applicable tubing O.D. 04 06 08 10 12 4 6 8 10 12 Body size 2 Elbow Type 2 3 4 5 6 M5 1/8 1/4 3/8 1/2 Control type Port size 0 1 Meter-out Meter-in M5 01 02 03 04 M5 x 0.8 R1/8 R1/4 R3/8 R1/2 With one-touch fitting 1

Mounting hole Label EJECTOR MULTISTAGE 59.5 59 56 8.5 30 Section A/ With Digital Vacuum Pressure Switch 4.5 166 175 36 ZL112-E (ZSE4) ZL112-EB (ZSE4B) ZL112-EE (ZSE4E) 28 (2) (1.6) 4-M4 x 0.7 Thread depth 8 (Mounting hole) 59 85 13-7-8 9 Multistage Ejector Series ZL Dimensions: Series ZL112 (With Valve) With supply valve and release valve ZL112-K1L-E25(L)-M P 2-5.4 Mounting hole 13.5 50

[J27L PNP open collector SOmA ZSE5B-O-67L ISE5B-[]-26L None (Analog output) 1 ~5V(5%F.S.) 2 output NPN open collector 30V,80mA ISE5B-D-27L Standard Specifications PNP open collector SOmA ISE5B-D-67L ZSE5B ~I ZSE5B Item ZSE5B ISE5B ISE5B .jISE5B With unit change function for use all over the world.

1 8 ARM1000 57 1 8 1 8 IRV 1 4 1 8 ARM2000 136 1 8 1 8 VEX How to Order SRH ARM 1000 A1 5 01 G SRP Semi-standard Regulator for manifold Nil 1 0.7 MPa setting (Standard) 0.2 MPa setting SRF Number of stations Note 1) Pressure gauge for 1.0 MPa is used.

Fieldbus interface connector layout BUS OUT: RJ45 8-pin socket No. Designation Description 1 Tx+ Transmit Data + 2 TxTransmit Data 3 Rx+ Receive Data + 4 5 6 RxReceive Data 7 8 BUS IN: RJ45 8-pin socket No. Designation Description 1 Tx+ Transmit Data + 2 TxTransmit Data 3 Rx+ Receive Data + 4 5 6 RxReceive Data 7 8 Use only plugs conforming to FCC standards.

System error Brown DC(+) Internal data error 12 to 24VDC + Black OUT Load Internal data error Blue DC() 6 Series ZSE30/ISE30 Dimensions 20 0.1 2-M3 x 0.5 Thread depth 4 Lead wire with connector 9.5 25 8 30 3.6 M5 x 0.8 MPa PRESSURE 20 0.1 10 SMC OUT Width across flats 12 SET 1.5 01: R 1/8 T1: NPT 1/8 With bracket 42.5 10 15 4.2 3 22 30 20 25 20 SMC 45 30 1.8 35 35 Panel mount 8 17.8 7.2

3/8" 1/2" 1/2" 1/2" 1/2" 1/2" 1/2" 1/4" 1/4" 1/4" 3/8" 3/8" 3/8" 3/8" 1/2" 1/2" 1/2" Specifications 0.88 1.41 2.02 2.82 3.53 L/min CFM L/min CFM L/min CFM L/min CFM L/min CFM L/min CFM L/mim CFM L/min CFM L/min CFM 0.95 1.91 3 0.09 0.21 0.42 0.88 1.77 2.65 4.41 4.41 5.29 6.71 25 40 57 80 100 27 54 85 2.5 6 12 25 50 75 125 125 150 190 2.65 3.88 6 8.48 10.59 0.35 0.88 1.77 3.53 7.06 10.59

When making drain exhaust piping, use piping with bore size 8 or larger than 8. Length should be shorter than 5 m. Do NOT pipe upwards. AU200/300 Effective thread depth 6.5 4-M5 x 0.8 AU200, 300 Float type auto-drain Port size H G F E D C B A Model Port size 1 4 / 3 8 AU200 / 50 70 61 30 40.5 31.5 164 165 AU300 50 70 61 30 40.5 31.5 188.5 165 14-3-12

M Element Replacement Procedure Body Model A B C D E F G H I J K L M N Size ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 12.8 4 6 53 54 8.5 14.4 15.5 50 15 17.5 24 12.5 26 22.5 48 Metric size Inch size 15.2 6 8 9.5 16.6 17.5 61 16 19.5 27 13.5 28 65 24.5 52 Collar part arrow 57 8 10 69.5 70 18.5 11 18 21.5 65 17 21 29.5 14.5 30 27 Transparent cover 3 16 1 4 " 1 4 " 3 8 " 1

.: 15 to 145 psi [0.1 to 1.0 MPa] L Port size 1/4, 3/8, 1/2 Drain port size 3/8 Bowl material Polycarbonate Bowl guard material Polycarbonate Weight 0.46 kg Appearance color White 1 Discharged flow rate of the air compressor should be 14 scfm [400 L/min (ANR)] or more. How to Order AD402 04 A D Semi-standard symbol: When plural options are required, indicate them in alphanumeric order.

Rod seal ( Fig.8 ) Pay attention to the mounting direction of the seal. Apply grease to the scraper and the inner circumference of the rod seal as shown in Fig. 8. 2. Piston seal ( Fig. 9 ) Mount with care not to twist the piston seal.

When making drain exhaust piping, use piping with bore size 8 or larger than 8. Length should be shorter than 5 m. Do NOT pipe upwards. AU200/300 Effective thread depth 6.5 4-M5 x 0.8 AU200, 300 Float type auto-drain Port size H G F E D C B A Model Port size 1 4 / 3 8 AU200 / 50 70 61 30 40.5 31.5 164 165 AU300 50 70 61 30 40.5 31.5 188.5 165 14-3-12

Solenoid on side A 0 2 4 6 8 16 28 30 Side D After maintenance is complete, perform appropriate functional inspections. Stop operation if the equipment does not function properly. Safety cannot be assured in the case of unexpected malfunction.

Individual grounding should be provided close to the product with a short cable. 0 2 4 6 8 16 28 30 Solenoid on side A Output No. Valve manifold Accessories Side D NOTE (SI unit side) Replacement of the SI unit Remove the M3 hexagon screws from the SI unit and release the SI unit from the valve manifold. Replace the SI unit.

Nil S MHW -X Tool stand MA210 Y59A S1 MRHQ MA Tool stand DAuto switch type Lead wire length Without auto switch Nil Nil L Grommet With 0.5 m lead wire With 3 m lead wire D-Y59A (3-wire) Y59A Solid state auto switch Lead wire: Axial direction entry D-Y59B (2-wire) Y59B 741

Connector type Connector type SMC Corporation 1-16-4 Shimbashi, Minato-ku, Tokyo 105-8659, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2001 SMC CORPORATION All Rights Reserved 1st printing December, 2001 D-Export dept. P-100(D) Printed in Japan. This pamphlet is printed on recycled paper with concern for the global environment.

VBAT-V1 OUT 3/8 1/2 1/4 VBA1 VBA1/VBA2 TSG R0003-2007 2 () IN (I) :VBA1 4VBA2 8 6 : OUT VBA2 (J) Rc3/8 VBA1 OUT IN Rc1/2 Rc3/8 () OUT VBA1 12~14Nm(R1/4) VBA2 22~24Nm(R3/8) OUT O Rc1/4 O A B C D E F G H I J K L M O VBAT05A1 VBA10A VBA11A 150 374 370 307 163 160 100 200 Rc3/8 257 60 Rc1/4 20 VBA10A VBA11A 391 328 VBAT10A1 VBA20A VBA22A 170 522 454 417 367 170 180 120 312

1/2 TSG R0003-2007 1.5MPa SUS304 0~75 oC 1/4 IN 3/8 O VBA1 1 SMC VBAT-V1 1 VBA11A 150 337 370 307 163 160 100 200 Rc3/8 257 60 A B C D E F G H I J K L M 278 130 39 Rc1/4 20 IN Rc3/8 Rc1/2 Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer Rc3/8 OUT (J) 170 180 120 312 411 IN (I) 4-14-1 , Sotokanda, Chiyoda-ku, Tokyo