Environment

LEY -X5 LEFB/Belt Drive 11LEFS Horizontal 11LEJS 14 LEFB32 25A12 LEC 10 Work load: W [kg] LEC S 8 LEC SS-T LEFB25 6 LEC Y 4 Motorless LEFB16 2 0 LAT 0 500 1000 1500 2000 Speed: V [mm/s] LZ LC3F2 41 LEF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication SpeedWork Load Graph (Guide) Servo Motor (24 VDC) The following graph shows the values when moving force is 250%

Silencer Metal Case Type Series 25

1 Model 0.5 A B D Dimensions (mm) Recommended flow (m3/min (ANR)) 2.2 or less 3.0 or less 4.0 or less 8.0 or less 10.0 or less 1.5 or less 1.5 or less Model Port size R Effective area (mm2) Weight (g) 0.2 Inlet pressure (MPa) Noise level (dB (A)) 1 4 2504-002 33.9 111 62 30 24 106 64 30 24 113 68 30 24 0.1 2505-003 45.9 3 8 2506-004 50.0 1 2 310 88.5 48 35 2507-006 105.6 3 4 514 97.5 60 41

Vacuum Filter AFJ Series

(Port size) AMV ZH -X185 Related Products Clearance for maintenance G A AFJ30, AFJ40 N T J D M U Bracket (Option) S R C V Q IN OUT 2 x P (Port size) B Clearance for maintenance G A E Model Standard specifications Optional specifications Bracket mount P A B C D E G J M N Q R S T U V AFJ20 1/8, 1/4 40 79.2 9.8 20 25 20 30 27 22 5.4 8.4 40 2.3 28 AFJ30 1/4, 3/8 53 104.1 14 26.7 30 35 26.7 41

Micro-Mist Separator with Prefilter Series AMH

Filtration rating . 0.3 I' m 0.01 I'm 0.3+0.01 I'm Oil misl removal rate : O.8ppm (1.0mglm3(ANR)} O .08ppm (O.1 mg/m3(ANR)) 008ppm (O.1 mglm3(ANR)) Micro-Mist Separator with Prefilter Micro-Mist Separator SeriesAMH Available Models Model AMH150 AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 Air flow rate NOle) Q/min (ANR) 200 500 1000 2000 3500 6000 12000 1/4 3/8 1/2 3/8 1/2 3/4 1/2 3/4 1 3/41

Miniature Regulator

pressure: 0.7 MPa 0.6 IR-A Outlet pressure (MPa) 0.5 ARJ310-01 IR 0.4 IRV 0.3 ARJ210-M5 0.2 VEX 0.1 SRH 0.0 0 100 200 300 400 500 SRP Flow rate (L/min (ANR)) SRF ITV IC ITVH ITVX PVQ VY1 Allows smaller mounting pitch Compact and lightweight (Main body 65 g) VBA VBAT Accommodates two types of threads 18.8 mm 18.3 AP100 Inside: Female thread (M5 x 0.8) Outside: Male thread (1/8) 82.5 ARJ310-01G 41

Manifold Regulator Modular Type ARM2500/3000 Series

A C D E F G H B Composition of assembly Set nut (1349172) AP100 ARM2500 136314 30 34 70 5.4 15.4 55 2.3 M33 x 1.5 Bracket (B220) Inlet pressure (MPa) Set nut (131532) ARM3000 136414 75.5 8 41 40 6.5 53 2.3 M42 x 1.5 Bracket (B320) Note) Tighten the set nut securely and fix it.

AR Series Modular Type Regulator

W Y Z AR10-A M5 x 0.8 1/16 25 47.4 11 12.5 M18 x 1 12.5 26 26 25 28 30 4.5 6.5 40 2 18 18.5 AR20-A 1/8, 1/4 1/8 40 67.4 23.5 22 M36 x 1.5 22 37.5 58.5 37.5 59.5 30 34 43.9 5.4 15.4 55 2.3 27.3 36.5 17.5 6 AR25-A 1/4, 3/8 1/8 53 70.4 23.5 22 M36 x 1.5 22 37.5 58.5 37.5 59.5 30 34 44.3 5.4 15.4 55 2.3 30.3 36.5 17.5 6 AR30-A 1/4, 3/8 1/8 53 83.5 27 28.5 M45 x 1.5 28.5 37.5 65 37.5 66 41

AR20-B to AR60-B

125.2 43 43.3 M62 x 1.5 43.3 3.2 28 44.3 27.8 54.8 42.5 80.8 42.5 80.8 AR60(K)-B 1 1/8 95 129.6 46 43.3 M62 x 1.5 43.3 3.2 28 44.3 27.8 54.8 42.5 80.8 42.5 80.8 Optional specifications Model Bracket mount Panel mount M N Q R S T U V W Y Z AR10-A 25 28 30 4.5 6.5 40 2 18 18.5 AR20(K)-B 30 34 43.9 5.4 15.4 55 2.3 24.7 28.5 14 6 AR25(K)-B 30 34 43.9 5.4 15.4 55 2.3 25.7 32.5 16 6 AR30(K)-B 41

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Valve Spring Seal NBR, Stainless steel 9 10 11 14143 14144 14147 Stainless steel NBR 528 Series AS Speed Controller: Standard Type In-line Type Dimensions: AS1000-M3 Dimensions: AS1000-M5 2 x 3.1 35 (Max. 41) 19 (Max. 21) AS 2 x 2.1 TMH ASD 27.5 Note 1) Male M5 x 0.8 Female M5 x 0.8 M3 x 0.5 M3 x 0.5 AS AS Reference dimensions AS-FE KE Reference dimensions Note 1) Dimension for AS1000-M5

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ7000 valves, Supply and exhaust ports common, Valves individually wired, Maximum 20 stations available as standard (types 21, 40, 41, 42); maximum 15 stations available as standard (type 20), 11 port sizes available 4/5 PORT SOLENOID VALVE. SYJ 5 port valve manifold. 195.00000 lb. VVD.

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ5000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 10 port sizes available 4/5 PORT SOLENOID VALVE. SYJ 5 port valve manifold. 155.00000 lb. VVD.

Model: 40 (Standard), Bar Length: 154 (1540mm), Emmiter Cartridge, Material: M (High Energy Saving De-ionizing Cartridge, Silicon), High-voltage Cable Length: 3 (3m), One-touch Fitting: 7H (ø1/4" Straight), Plug Position: w/o Plug, Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 3 (3m), Bar Bracket: w/o Bracket, DIN Rail Bracket for Controller &
High-voltage

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available 4/5 PORT SOLENOID VALVE. SYJ 5 port valve manifold. 169.00000 lb. VVD.

Model: 41 (AC), Bar Length: 22 (220mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 2 (2m), One-touch Fitting: 6L (ø6 Elbow), Plug Position: R (Opposite Side of High-voltage Cable), Input, Output Specification: P (PNP), Power Supply Cable Length: 3 (3m), Bar Bracket: B (w/Bracket 1), DIN Rail Bracket for Controller &
High-voltage

Model: 41 (AC), Bar Length: 22 (220mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 2 (2m), One-touch Fitting: 6L (ø6 Elbow), Plug Position: R (Opposite Side of High-voltage Cable), Input, Output Specification: P (PNP), Power Supply Cable Length: 3 (3m), Bar Bracket: B (w/Bracket 1), DIN Rail Bracket for Controller &
High-voltage

Thomas Liquid Diaphragm Pump Flow Rate: 400 ml / min , 400 ml / min, Max Pressure: 10 m H20 , 10 m H20, Max Suction: 5 m H20 , 5 m H20, Voltage (DC): 12, DC Motor Type: Standard, Net Weight: .41 lbs. / .19 Kg Series Configured Datasheet.

Thomas Liquid Diaphragm Pump Flow Rate: 400 ml / min , 400 ml / min, Max Pressure: 10 m H20 , 10 m H20, Max Suction: 5 m H20 , 5 m H20, Voltage (DC): 24, DC Motor Type: Standard, Net Weight: .41 lbs. / .19 Kg Series Configured Datasheet.

Size: 31 (3/8), Model Combination: B (AF+AR), Port Size: 03 (3/8, Size 31), Accessory: None, All Sizes, Pressure Relief Valve: w/o Valve, Option: 8 (Metal Bowl w/Sight Glass, Size 31 & 41), Handle Orientation: A (Upward Handle)

Thomas Liquid Diaphragm Pump Flow Rate: 400 ml / min , 400 ml / min, Max Pressure: 15 m H20 , 15 m H20, Max Suction: 6 m H20 , 6 m H20, Voltage (DC): 12, DC Motor Type: Standard, Net Weight: .41 lbs. / .19 Kg Series Configured Datasheet.

Thomas Liquid Diaphragm Pump Flow Rate: 400 ml / min , 400 ml / min, Max Pressure: 15 m H20 , 15 m H20, Max Suction: 6 m H20 , 6 m H20, Voltage (DC): 24, DC Motor Type: Standard, Net Weight: .41 lbs. / .19 Kg Series Configured Datasheet.