CNG

8 Nickel plated Lock nut Clip A 25, 32 only Rolled steel Stainless steel %5 !

VZ100/300/500

M plug connector (M) 1 8 24 VAC 50/60 Hz 48 VAC 50/60 Hz VFN 110 VAC 50/60 Hz Non-locking push type 220 VAC 50/60 Hz 6 VDC 12 VDC 48 VDC Locking type (Slotted) VZ300 DIN terminal (D) Locking type (Manual) 1.2 2 3 (A R) 1 8 VZ500 2.7 2 3 (A R) 1 8, 1 4 4-6-1 2 Series VZ100/300/500 Manifold Variations A port size One-touch fitting P/R port size Applicable tubing O.D.

HRX-OM-R016

Control, Inspection and Cleaning . 8-1 8.1 Control of Circulating Fluid Quality . 8-1 8.2 Inspection and Cleaning . 8-2 8.2.1 Daily check . 8-2 8.2.2 Monthly check . 8-3 8.2.3 Inspection every 3 months . 8-4 8.2.4 Inspection every 6 months . 8-5 8.2.5 Inspection for winter season . 8-6 8.3 Consumables . 8-6 8.4 Stop for a Long Time . 8-7 8.4.1 Discharge of the circulating fluid and facility

7

Port size P a b d e f 1/4, 3/8 1/2 48.5 47 55 53.5 67 52 28 27 VXD2 3 A ( ): Denotes the Normally Open (N.O.) dimensions.

RSQ

QA F Q QB QU QW DBore size (mm) QW QU 29 32 40 50 38 42 50 13 13 16 6 6 8 60.5 68 82 7.5 8 9.5 20 24.5 26 -X 20Z 32 to 50 20 F 6 8 7.5 8 8 H 18 22 20 28 28 A 59.5 67 68 80.5 82 B 41.5 45 48 52.5 54 D 10 12 20 25 25 E 29 36 45 52 64 I 60 69 86 J 4.5 5 7 M 28 36 34 40 50 N 3.5 5.5 5.5 5.5 6.6 O counterbore 6.5 depth 4 9 depth 7 9 depth 7 9 depth 7 11 depth 8 P M5 x 0.8 Rc 1/8 Rc 1/8 Rc

CXWM/CXWL

8 !

HRX-OM-X037

HRL100-A-40 . 9-6 9.2.2 HRL200-A-40 . 9-7 9.2.3 HRL300-A-40 . 9-8 9.2.4 HRL100/200-W-40 . 9-9 9.3 Flow Diagram . 9-10 9.3.1 HRL-A-40. 9-10 9.3.1 HRL-W-40. 9-11 9.4 Cooling Capacity . 9-12 9.4.1 HRL100A40 CH1 . 9-12 9.4.2 HRL200A40 CH1 . 9-12 9.4.3 HRL300-A-40 CH1 . 9-13 9.4.4 HRL100/200/300-A-40 CH2 . 9-13 9.4.5 HRL100-A-40-T2 CH1 . 9-14 9.4.6 HRL200-A-40-T2 CH2 . 9-14 9.4.7 HRL300-A-40-

7ND9071en

[6 mm or 1/4" (x)] 1.2* 2.1* 2C 1.08 66 3/8 10 mm or 3/8" 2.4 3.0 3C 2.18 133 3/8 10 mm or 3/8" 4.8 5.2 4C 4.34 265 3/8 10 mm or 3/8" 3.2 3.7 5C 8.7 531 3/8 10 mm or 3/8" 7.5 11.0 6C 17.5 1068 3/4 10 mm or 3/8" 12.0 20.0 Air supply piping 10 mm or 3/8" for all actuators.

CXS

Although a zener diode for surge protection is connected at the output side of a solid state auto switch, damage may still occur if a surge is applied repeatedly. When directly driving a load that generates surge, such as a relay or solenoid valve, use a switch with a built-in surge absorbing element. 8.

VQZ1000/2000/3000

A A 2-Rc 1/8, 1/4, C6, C8 C6: One-touch fitting assembly for 6 B B B 4 2-Rc 1/8, 1/4, C6, C8 C6: One-touch fitting assembly for 6 C8: One-touch fitting assembly for 8 VQD 2 A C8: One-touch fitting assembly for 8 B 23 P = 22 L1 L2 L3 (For C6, C8) ( 9.5) DIN rail clamp screw 80 ( 9.5) 2-M4 mounting hole (For C6, C8) (For C6, C8) 4.5 2-M6 mounting hole IN IN IN IN 5.5 80 6.5 (40) 69.5 58 37.5

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

1.42 1.32 1.76 B 0.58 0.62 0.83 0.82 0.87 1.14 B 1.01 0.89 1.07 1.15 1.06 1.51 A 1.16 1.09 1.31 1.54 1.44 1.88 A 1.16 1.09 1.31 1.54 1.44 1.88 B 0.35 0.38 0.59 0.59 0.63 0.90 B 0.78 0.66 0.83 0.92 0.83 1.27 A 0.92 0.85 1.07 1.30 1.20 1.65 A 0.92 0.85 1.07 1.30 1.20 1.65 Bore Bore 075 (3/4") 088 (7/8") 106 (1 1/16") 125 (1 1/4") 150 (1 1/2") 200 (2") 075 (3/4") 088 (7/8") 106 (1 1/16") 125

MNB

8 @0!7 !9i @2 q r @8#9 $0 $2 w $3 #8 @9 A C B !3 !4 #4 $1 e$8 o $7 !1@1 !6 @5 u !0 $6#6#5 $4 y#8 @6 #3 Section B Section C Section A !2 !2 #1 #0 !2 32 100 80 63 50 40 80, 100 80, 100 Parts list Parts list No. No.

Electric Actuator with Integrated Guide

Allowable Moment (Nm) Allowable dynamic moment LTF8 Model Mounting orientation Load movement direction 300 200 L1 (mm) L3 (mm) a=1000 a=2000 a=3000 Pitching Rolling Vertical Vertical m a 100 L1 Mep 0 2 10 8 6 4 Transfer load m (kg) 300 200 a=1000 a=2000 a=3000 100 a L3 Mey 0 2 10 8 6 4 Transfer load m (kg) m : Transfer load (kg) a : Work piece acceleration (mm/s2) Me: Allowable dynamic moment

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

A 2 A Power supply (Output) 24 VDC +10/-5%, 24 VDC +10/-5%, 8 A DC24 V +10/-5%, 4 A 2 A Enclosure IP67 (With manifold assembled) 1 Environment Operating temperature range -10 to 50 oC Storage temperature range -20 to 60 oC Operating humidity range 35 to 85%R.H.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Nickel plated Spring washer Steel wire @3 Felt Felt @4 Holder Stainless steel @5 8-21-19 19 Series MGG Construction 63 to 100/MGGB #3 !5 #6 q t #8 !4 !7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @0 @1 !9 #2 !

3 Port Air Operated Valve Series SYJA300 1

2(A) 2(A) 47.5 VHS 13.5 (A port) Rc 3/8 Individual exhaust: VV3PA5-42Station 3-03 28.5 3(R) 3(R) (R port) Rc 3/8 PA NO NC 87 (PA port) Rc 1/8 (Mounting hole) 2-7.2 30 PA 41.5 91.4 84.4 91.4 60 16.5 1(P) 41.5 PA (P port) Rc 3/8 (Pitch) 88 31 33 7.5 L2 L1 (PA port) Rc 1/8 PA 61.5 66 2(A) 2(A) 47.5 13.5 (A port) Rc 3/8 n: Station n L L1 L2 Formula L1 = 33 x n + 29 L2 = 33 x n + 14 6 227 212

Aluminum High Vacuum Angle Valve

With Bypass Valve (Flange size: 80) (40) 148.5 3 117 (40) I G H H V A C 117 A U U M E V V A L Lead wire length: 500 mm (L type: 3000 mm) (40) XLA-16-X65 e u t w y Pilot port: Rc1/8 Bypass valve adjustment nut (Initial exhaust) Adjustment pitch: 1 mm/rotation Shaft seal (FKM) r Scraper (FKM) Pilot port: M5 0.2 Lock nut Width across flats 13 96 90 235 (Max. 13) 7.5 8-2 112 114 83 8-1 i !

Possible to transfer a workpiece at low-speed.

Thread type Size 10, 15 Port type Nil Nil TF TN TT Combination 4 Types Combination of Applicable Chart How to order model with auto switches M5 Rc 1/8 G 1/8 NPT 1/8 NPTF 1/8 C 8 -X 6 -X 6 C 7 C10 C11 A 2 A24 C 7 A 1 A 2 A14 Chart 1, 2, 5 Chart 1, 2 Chart 2, 5 Rotating angle Refer to page 308 for How to Orderproducts with auto switch. 20, 30, 40 90 180 80 to 100 170 to 190 Combination is

LVQ

Size 1 2 1 2 3 1 2 1 2 A B C A B A B A B 2 2 3 3 3 4 4 5 5 2 2 2 3 3 4 4 5 5 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 SMC SMC P U Panel mount union Union SMC SMC With reducer Basic size Note) Select the fittings of the same size as the one at the valve side

MGP

When a load, such as a relay or solenoid which generates surge is directly driven, use a type of switch with a built-in surge absorbing element. 8.