LV50-OMQ0004

[L/min] Flow rate [L/min] Fl ow r at e[ L/ m i n] Fl ow r at e[ L/ m i n] LFE3 0.02 Pressure loss [MPa] 0.015 P r essur e l oss[ M P a] 0.01 0.005 0 0 50 100 150 200 Fl ow r at e[ L/ m i n] Flow rate [L/min] -25No.LV50***-OMQ0004-F IN side straight pipe length (reference value) Straight pipe length 5 Change of accuracy [%F.S.]

Digital Pressure Switch ( compatible)

IODD file 1 1 ISE20C-L(-M)SMC-ISE20C-L-ymmdd-IODD1.1 2 ISE20C-L-PSMC-ISE20C-L-P-ymmdd-IODD1.1 3 ZSE20C-L(-M)SMC-ZSE20C-L-ymmdd-IODD1.1 4 ZSE20C-L-PSMC-ZSE20C-L-P-ymmdd-IODD1.1 5 ZSE20CF-L(-M)SMC-ZSE20CF-L-ymmdd-IODD1.1 6 ZSE20CF-L-PSMC-ZSE20CF-L-P-ymmdd-IODD1.1 7 ISE20CH-L(-M)SMC-ISE20CH-L-ymmdd-IODD1.1 8 ISE20CH-L-PSMC-ISE20CH-L-P-ymmdd-IODD1.1 1: "ymmdd" indicates the file preparation date

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

Cable length (L) [m] A1 1 2 5 6 (17.7) (10.2) (14) (18) 1 3 5 8 A B C 1.5 3 5 8 A6 B1 B3 A1 A3 B6 (13.5) 1 2 (5.7) 15 16 Connector B Connector D (30.7) L (11) (14.7) (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) 10 15 Actuator side Controller side 20 (5.5) (6.3) (5.7) (14.2) Connector C (Terminal no.)

AFF

AFF37B AFF75B Port size N.C. auto-drain N.O. auto-drain Drain guide B 01 B 06 B 1 8 3 4 1B Accessory 02 03 10 14 B 1 4 B 3 8 04 B 1 2 1 4 1 B 1 2 20 2B Option IN-OUT reversal direction -T Element service indicator AFF75A to AFF220A AFF 75A 20 D Accessory (Option) Basic size (Applicable compressor rating) D Auto-drain G Pressure gauge F Companion flange L Anchor bolt 75A 75 kW 125A 110 to

q"s

0.1 o -1 2 4 6 a 1 0 0.0 0 25 50 75 lnputsignal (%F.S.) 1 . 0 1 0 25 50 75 Inputsignal (%F.S.) 500 1000 1500 Flow rale (l/min (ANR)) :':i ::l Relief flow characterjslics supp y pressure: 0.7 Mpa Flow characteristics suppty pressure: 0.7 Moa Pressufe chafaCtgristics set oressue: 0 2 MHa 0.8 0-7 t'. I { 0 s l I l 6 l ; D.0 t' 6 l 0.6 0.5 o.4 0.3 6 ' ) !

PF-OMN0009_C

min 11 cm ) IN OUT PF3W504 PF3W520 (16 L/min ) (16 L/min ) (4 L/min ) (8 L/min ) [cm] [cm] PF3W540 PF3W511() (100 L/min ) (100 L/min ) (50 L/min ) (40 L/min ) (40 L/min ) (50 L/min ) [cm] [cm] -36No.PF-OMN0009CN-F PF3W521() (250 L/min ) (250 L/min ) [cm] -37No.PF-OMN0009CN-F PVC 3F.S.11 cm IN OUT PF3W511/521(PVC ) (100 L/min ) (250 L/min ) [cm] -38No.PF-OMN0009CN-F PF3W504S PF3W520S

H/DL/L/LL

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

LEC-OM038xx

Start flag 0: no send Numerical data input 1 1: send Data writting RWwn Step data No 0 to 63 Operation Note) 1 1: Absolute 2: Relative H RWwn+1 L Speed 2 0 to 65500 mm/s 3 RWwn+2 2 Position 4 +/-2147483647 0.01mm 1 RWwn+3 0 H RWwn+4 L Acceleration 2 0 to 65500 mm/s2 ID1 Numerical data input H RWwn+5 L Deceleration 2 0 to 65500 mm/s2 Data writting Pushing force 1 0 to 30 10% RWwn+6 Trigger

S Couplers

flats Min. bore size Model T Connection port size Weight g Effective area mm2 L D KKA3S-01F-1 Rc 1/8 44.5 37.6 T 17 -02F-1 1/8 Rc 1/4 18.5 6.1 23.4 44.8 41.2 -03F-1 Rc 3/8 49.9 43.1 19 D KKA4S-02F-1 Rc 1/4 46.1 92.2 22 -03F-1 1/4 Rc 3/8 24.2 8.1 41.2 46.9 86.2 -04F-1 Rc 1/2 52.3 99.4 24 H KKA6S-03F-1 Rc 3/8 178.8 50.5 L -04F-1 1/2 Rc 1/2 30.7 11.4 81.6 56.2 191.2 30 -06F-1 Rc 3/4 169.8 57.9

Switches

D-F9N D-F9P D-F9B D-F9G D-F9H N.C. (B contact) N.O. (A contact) Contact Electrical entry In-line Wiring type 3 wire 3 wire 2 wire Output type PNP NPN NPN PNP 24VDC relay, PLC IC circuit, Relay, PLC IC circuit, Relay, PLC Applicable load Auto switch internal circuits Lead wire colors inside [ ] are those prior to conformity with IEC standards.

OML0002-C

Use a bolt with a max. screw-in depth of 10 mm or less Body tap Through hole 2) L-bracket The L-bracket can be mounted in 4 different ways as shown below. Outward mounting Inward mounting Swing mounting Fixed mounting 10 - Outward mounting of L-bracket 1. Prepare hexagon socket head bolts (M3 X 6) and washers attached to the product and mount the L-bracket. 2.

IDX-OM-W037

Operation/ Shutdown 3.10.6 PID manual setting CH1 PID (control parameter) P Proportion band (050) i Integral time (051) d Derivative time (052) PID(proportion band / integral time / derivative time) is manually set. [ Setting range] P: 0.1 to 999.9 I: 0 to 3200 sec. D: 0.0 to 999.9 sec. PID values are automatically set by auto tuning.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

AS2000E AS3000E AS4000E Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Inlet pressure: 0.5 MPa AS-F Flow rate (L/min (ANR)) TMH ASD AS Number of needle rotations Number of needle rotations AS-FE AS-FE Number of needle rotations KE AS-FG AS-FP Construction AS-FM AS2000E/3000E AS4000E AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ Component Parts Component

AMX-OM-L024_e

H exagon socket Fol l ow i ng condi ti ons Cause el em ent breakage O ri ng ( U sed) G asket ( U sed) I nst al l vert i cal l y. Fl ush i nsi de of pi pi ngs w i t h ai r. Ensure no l eakage. Keep si ght gl ass i n f ront . N ever f ai l t o i nst al l one of AM , AM D , AM H as a pref i l t er. N ever f ai l t o use dry ai r.

•

ISE6B Z$E6B ZSE6BIZSE6BISE6B.1 'SE6B Item D -27L I El-67L D -26L D -27L ~67L 8-26L Multiple display units Free selection of display units and ease of Unit conversion make these switches adaptable for any global user.

Compact End Lock Cylinder Series CBQ2

C 32 H L CBQ2 Standard A93 S B 50 D C CDBQ2 With Auto Switch 32 H L Number of auto switches With auto switch (built-in magnet) 2 pcs. 1 pc.

Multi-Axis Step Motor Controller

LE CP 1 B A1 1 2 5 6 (17.7) (10.2) (14) (18) A6 B1 B3 A1 A3 B6 (13.5) 1 2 Cable length (L) [m] 15 16 Connector B Connector D (14.7) (30.7) L (11) 1 1.5 3 3 5 5 8 8*1 (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m (*1 Produced upon receipt of order) Controller side (5.5) (6.3) (5.7) (14.2) Connector C A 10*1 Actuator side (Terminal no.)

MHx-OMY0001

(Nm) L(mm) MHM-16D M3x0.5 0.63 6 MHM-25D M4x0.7 1.5 8 MHM-32D M5x0.8 3 10 MHM-50D M6x1 5.2 12 (N) MHM-16D 100 MHM-25D 200 MHM-32D 300 MHM-50D 500 -7- 2-3. 40 2-4. () 5 5 P-01-11 -8- 2-5. 1.52 2-6. 1 ()ISO VG320 (SDS) -9- 2-7. 1) 1) 2) 3) 12mm -10- 2 C3 C1 C2: C3 D-M9V D-M9WV D-M9AV D-M9 D-M9W D-M9A D-P3DWA A B E G A B E G L A B E G L D F H MHM-16D 9.1 9.1 5.6 4.6 8.1 12.8 11

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

(M)(L)(Z) D-M9N(M)(L)(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) H0 5 to 150C H4 With 100C heater H5 With 120C heater Hightemperature type * Size 16 is not applicable to H4, H5.

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) Nil XL H0 Solid state auto switch y Number of auto switches/Detecting position XLQ Quantity Without auto switch 2 pcs. 1 pc. 1 pc.