Servo Motor Controller (24 VDC)

The basic parameter is not correct for the following condition:(Assignable value range) (1) Stroke (-) < Stroke (+) (2) W-Area 1 < W-Area2 (* If both W-Area1 and W-Area2 is 0, the alarm will not be activated.) (3) Maximum pushing force < Maximum pushing force of actuator Parameter ALM (1-049) B RESET input Modify the basic parameter setting.

Pressure Sensor for General Fluids

Remarks Lead wire and M12 connector (3 m) Straight ZS-37-A 1 pc. Lead wire and M12 connector (3 m) Right angle ZS-37-B 1 pc. Connector for pressure sensor controller ZS-28-CA-4 1 pc. Adapter with throttle Rc1/4 ZS-31-X175 1 pc.

Pressure Sensor

(Example: If the Pressure switch with output impedance of 1k is connected to the A/D converter to detect the analog output of 5 V, the detected voltage by the A/D converter becomes 5(V) 1(M)/(1(k) + 1(M)) 4.995(V), and there is an error of approximate 0.005 V.) Output impedance R The pressure range in which the Pressure switch satisfies the specifications.

Electrostatic Sensor Monitor

Do not use a cable longer than 10 m. Consult with SMC for the use with a cable longer than 10 m.

Precision Regulator

Recommended tightening torque [N-m] Thread 1/8 Torque 7 to 9 Do not apply any additional twisting, or bending moments except for the weight of the filter regulator itself. Provide separate support for external piping, as damage may otherwise occur.

Fine Lock Cylinder with Guide Series MLGC ø20, ø25, ø32, ø40 2

Nil (Example) C73C 3 m L (Example) H73CL 5 m Z (Example) C73CZ None N (Example) C73CN Since there are other applicable auto switches than listed, refer to page 9-4-10 for details.

PF2A

How to Order Integrated Display Type M PF2A7 10 01 27 Flow rate range 1 to 10 l/min 5 to 50 l/min 10 to 100 l/min 20 to 200 l/min 50 to 500 l/min 10 50 11 21 51 Thread type Unit specification Nil M With unit switching function Fixed SI unit Note) Nil N F Lead wire (Refer to page 35.)

VQ4000

Plug-in sub-plate (With terminal block) V Remove junction cover q of sub-plate where terminal block box w is mounted. Non-locking push style Bore 5 Push down on the manual override button with a small screwdriver until it stops.

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

2 w y r !0 e 1 New PFA Body 2 New PFA Sensor 3 Super PFA Tube 4 PPS Housing A 5 PPS Housing B 6 PPS Housing C 7 POM Bushing 8 PPS Cap 9 FKM Gasket 10 FKM O-ring 11 SUS304 Thread 12 PVC Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

Digital Pressure Sensor

M5, R(PT) 1/8, R(PT) 1/4 Mounting bracket .M5 style only 3.6-1 Digital Pressure Sensor GS40 How to Order GS40 X202 Digital Pressure Sensor PSE ZSE4 ISE4 Port size Optional M5 (Female) R(PT)1/8 R(PT)1/4 5m-long lead wire X202 M5 01 02 ZSE5 ISE5 ZSE6 ISE6 Accessories B None Bracket (M5 style only) ZSE3 ISE3 GS PS Specifications ISA Model GS40-M5 GS40-01 GS40-02 ZSE1 ISE1 Air or inert gas Fluid

ZSE3/ISE3

Wiring specifications Grommet type (Lead wire: 0.6 m) Nil Grommet type (Lead wire: 3 m) L Connector type (Lead wire: 0.6 m) C Connector type (Lead wire: 3 m) CL Without connector CN Analog output is only available in a grommet type.

Body Size: 20, Backflow: K (w/Backflow Function), Thread: Rc, IN Port Size: 01 (1/8), OUT Port Size: 01 (1/8), Options: BG (w/Bracket + Round Pressure Gauge w/Limit Indicator), Set Pressure: 1 (0.02 to 0.2 MPa Setting, Exhaust Mechanism: Relieving Type, Knob: Downward, Pressure Unit: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Body Size: 20, Backflow: K (w/Backflow Function), Thread: Rc, IN Port Size: 01 (1/8), OUT Port Size: 01 (1/8), Options: BG (w/Bracket + Round Pressure Gauge w/Limit Indicator), Set Pressure: 0.05 TO 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Knob: Downward, Pressure Unit: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Filter Regulator AW30, 40

1.0MPa Note 3) GC3-10AS Note 2) GC3-10AS GC3-10AS 1 4 1 8 1 4 Note 1) Pressure gauge G46-2-02 G36-2-01 G46-2-02 Set pressure + 0.05MPa (at relief flow rate of 0.1l/min(ANR)) 5 to 60C (With no condensation) 5m 0.2MPa Note 3) GC3-2AS GC3-2AS GC3-2AS Note 4) AD48 N.O.

T (w/o Operation Manual, Calibration Certificate)

Size: 16, Bearing Type: M (Sliding Bearing), Motor Mounting Position: D1 (In-line; Motor Cover Direction: Left), Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 200mm, Motor Option: W (w/Lock/Motor Cover), Guide Option: w/o Option, Actuator Cable Type, Length: R5 (5m), Controller: CM1 (CC-Link Ver. 1. 10), Mounting: 7 (Screw Mounting), I/O Cable: w/o Cable, Communication

ZM

Electrical entry G H L LN LO Nil Grommet type, with 0.3 m lead wire (applicable to DC) Grommet type, with 0.6 m lead wire (applicable to DC) L plug connector, with 0.3 m lead wire L plug connector, without lead wire (applicable to DC) L plug connector, without connector (applicable to DC) Air operated/Without valve Pilot valve DC: 1 W (With indicator light: 1.05 W) DC: 0.45 W (With indicator

LFE-OMZ0011

Do not use a cable longer than 10 m. Wire the DC (-) line (blue) as close as possible to the power supply.

ZSE80/ISE80

For positive pressure 80 ISE 02 N M For vacuum/ compound pressure M 80 ZSE 02 N Option 3 Rated pressure range Operating Note) manual (Booklet) (CD-ROM) Operating Note) manual 80 80F Calibration certificate Calibration certificate 0 to 101 kPa 100 to 100 kPa Symbol Symbol (Booklet) (CD-ROM) K T R Nil Piping Y W R1/4 (M5 female threaded) Rear ported 02 Note) All texts in both English

Brake mechanism added

Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ DSince there are other applicable auto switches than listed, refer to page 697 for details. For details about auto switches with pre-wired connector, refer to pages 1014 and 1015. D-A9/M9/M9W/M9A(V) auto switches are shipped together (not assembled).