A

K E O F F TA K EO F F T Y P E 1 "T" Type 4 "X" Type T H R E A D T Y P E Nil Rc(PT) N NPT P O R T S I Z E M5 M5 x 0.8 01 1/8 02 1/4 03 3/8 04 1/2 mm mm Model Port Size A B C Model Port Size A B C D Y11-M5 M5X0.8 8 12 8 Y14-M5 M5 23 16 14 25 Y21-01 1/8 10 29 19 Y24-01 1/8 40 40 22 40 Y21-02 1/4 10 29 19 Y24-02 1/4 40 40 22 40 Y31-01 1/8 11 33 19 Y34-02 1/8 49 43 28 48 Y31-02 1/4 11 33 19 Y44

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

VFS Y 5 3 37 25 22 14 1 VS4 25 25 3/8-2 port 3, 5 port 1/4, 3/8 1 port 9 1/4, 3/8-2 port 2, 4 port 1/8 12 port 1/8 14 port VQ7 VV71-(M Connector type) EVS VFN 100 80 100 80 37 23 U-side 9 2n-1/4, 3/8 14 9 U-side 15 PE port Indicator light Manual override R 4.5 R 4.5 53.5 53.5 9 9 38 9 B B 20 14 12 P = 43 A P = 43 PA 23 A A B B 14 12 A PA PA L1 L2 L2 L1 B B B 14 12 A A A A B 14 A A PA B B

CRQ2

In addition to Rc 1/ 8, G 1/ 8, NPT 1/ 8, NPTF 1/ 8 are also available. S: Upper space 90, Lower space 180 11-8-7 8 Series CRQ2 Rotation Range When pressurized from the port indicated by the arrow, the shaft will rotate in a clockwise direction.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

8 !5 w !9 !0 !7 u !7 w @1 !9 !3 @3 !2 !0 o @0 i A A MX MTS MY CY !4 !3 y e !2 q r t o !6 @0 !4 !1 q !6 i t y e !5 r u !

Cylinder with Lock Series CNG

WH BZ I E 0 0.05 H1 TA 4-TC TB AL A K F H C0. 1 C0. 1 NA BC 8-J BN S + Stroke F ZZ + Stroke e 8 f l ZZ + l + Stroke h + l With rod boot (mm) Stroke range with rod boot Bore size (mm) Stroke range without rod boot Standard Long stroke 20 25 32 40 A AL B1 BC BN BP BZ C D E F GA GB GC GK GL GR GQ H1 I Standard Long stroke 5.5 6 20 to 200 18 15.5 13 38 93 1/8 14 8 12 2 87 10 (12) 18 4 5 26 to

EXxx-OMZ0016

RWr5 When the Registration of Remote 8 registration (Wireless channel 8) data is "1", Registration of Remote a Remote has 9 (Wireless channel 9) been registered.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

tubing O.D.: 6 24 13.3 16.2 34 B 2 B 2 B 2 B 2 PE R 3 B 2 A 4 A 4 A 4 A 4 X P 1 A 4 One-touch fitting [4(A), 2(B) port] 13.3 (Pitch) P = 10.5 Applicable tubing O.D.: 4 6 24 16.2 34 17 36.7 B 2 B 2 B 2 B 2 B 2 R 3 A A 4 A 4 A 4 A 4 A 4 P 1 One-touch fitting [1(P), 3(R) port] Applicable tubing O.D.: 8 M5 x 0.8 [4(A), 2(B) port] (L4) L3 SI unit (3.2) 101.2 8 3.1 18 28.8 36.3 58.2 3.5 5.5 35

2 Phase Stepper Motor/Without Motor Brake Series LXS

T-slot A dimension T-slotBdimension Work piece mounting reference plane 6.5 27.5 T-slot B Cross Section C-C (mm) D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model Refer to page 301 for mounting.

Vacuum System Peripherals:

Connection 3.2, 4 6, 8, 10, 12, 16 KQ2 Nylon, Soft nylon, Polyurethane M5, M6, R 1/8 to 1/2 From 100 kPa One-touch fittings One-touch fittings/Manifold Series KM Applicable tubing: Nylon, Soft nylon, Polyurethane Tubing O.D.: 4, 6, 8, 10, 12 Port A piping port Port B port size No. of port A Piping specifications Port A Port B Model Model 4 6 8 8 10 12 Rc Rc 6 8 10 6, R 6, R 6, R 8, R 8, R

Modular Type Filter Regulator Series AW

251 255 B 234 272 275 B 208 246 249 B 209 247 250 AW20K AW30K AW40K AW40K-06 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 66 Mist Separator Regulator AWM20/30/40 Series AWM is a component made up of a regulator and a mist separator that are integrated to provide optimum results in applications such as clean-air blow operations.

HRX-OM-R005

Control, Inspection and Cleaning . 8-1 8.1 Control of Circulating Fluid Quality . 8-1 8.2 Inspection and Cleaning . 8-2 8.2.1 Daily check . 8-2 8.2.2 Monthly check . 8-3 8.2.3 Inspection every 3 months . 8-4 8.2.4 Inspection every 6 months . 8-5 8.2.5 Inspection for winter season . 8-6 8.3 Consumables . 8-6 8.4 Stop for a Long Time . 8-7 8.4.1 Discharge of the circulating fluid and facility

HRX-OM-O021

Control, Inspection and Cleaning . 8-1 8.1 Control of Circulating Fluid Quality . 8-1 8.2 Inspection and Cleaning . 8-2 8.2.1 Daily check . 8-2 8.2.2 Monthly check . 8-3 8.2.3 Inspection every 3 months . 8-4 8.2.4 Inspection every 6 months . 8-5 8.2.5 Inspection for winter season . 8-6 8.3 Consumables . 8-6 8.4 Stop for a Long Time . 8-7 8.4.1 Discharge of the circulating fluid and facility

Brake mechanism added

B A B A B A B A B A B A B A B A B 40 50 63 80 100 6 4 3.5 1.5 0 0.5 6.5 2 4 11.5 10 0 0 4.5 0 2 9.5 8 ML2B 3.5 1.5 0 0.5 6.5 2 4 11.5 10 0 0 4.5 0 2 9.5 8 8.5 7.5 6 5 2.5 3 9 4.5 6.5 14 12.5 1.5 2 8 3.5 5.5 13 11.5 12 10 9.5 7.5 6 6.5 4.5 8 10 17.5 16 4 4.5 12.5 6 8 15.5 14 13.5 12.5 11 10 7.5 8 14 9.5 11.5 19 17.5 6.5 7 13 8.5 10.5 18 16.5 D-A9 and D-A9V cannot be mounted on 50.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Q R 50 60 63 66 70 Q 40 R Q 58 R S 46 Q 95 R S 62 T U 46 56 56 W X 11 13 13 Y Normally closed Normally open VX212 VX222 VX232 VX210 VX220 VX220 VX230 VX230 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 1/4, 3/8 1/4, 3/8, 1/2 18 22 30 22 30 (76) (86) (93) 2, 3, 4.5 3, 4.5, 6 8, 10 3, 4.5, 6 8, 10 40 45 50 45 50 68 78 85 85 92 30 9 19.5 27 6 8 8 8 8 12.8 19.5 42.5 42.5 42.5 85 36 46 46 15 10.5

MXS

Model H G A B C J* K E D F 16.5 MXS-AT6 5 MXS 6 7 21 19 8 5 10.5 2.5 M2.5 X 8 M5 X 0.8 * MXS6, MXS8 26.5 MXS-AT6-X11 15 D 16.5 MXS-AT8 5 E E H MXS 8 M3 X 10 M6 X 1 8 25 9 6 12.5 3 22.5 26.5 MXS-AT8-X11 15 36.5 MXS-AT8-X12 25 5 G 20 MXS-AT12 MXS12 12 32 13 8 18.5 4 31 M4 X 8 M8 X 1 30 MXS-AT12-X11 15 B C 40 MXS-AT12-X12 25 24.5 MXS-AT16 5 F K K F A J MXS16 M5 X 10 M10 X 1 14 40 15 10 23 5

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

end adjuster) 14 14 J I 13 Vacuum suction port Rc1/8 (NPT1/8, G1/8) 7.5 Max. 14 (Retraction end adjuster) 5H9 ( ) depth 5 +0.030 0 12 48 36 Operating port 2 x Rc1/8 (NPT1/8, G1/8) GA HA 5H9 ( ) depth 5 +0.030 0 6 NN x M6 x 1 thread depth 12 A B 1.5 29 11 11 5.1 5.1 9.5 A B 26 10.5 26 10.5 H G (NN 1) x H B-B A-A (mm) Model F 45 40 48 58 42 55 50 55 62 N 4 4 4 4 6 6 8 8 8 G 22 22 22 22 17

Series KP/KPQ/KPG

21.5 19.5 22 20.5 28.5 24.5 32 27 28 27 25.4 25.4 25.9 26.4 32.3 30.3 37.5 33 34 34.5 12 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 4 18 4 4 14 6 19.5 10 10 L A M H 17 8 21.5 26 18 Connection threads 19 10 24 41 29 22 12 25 58 46 Reference dimension for R threads after installation Male Elbow: KPL Effective area mm Note 1) D1 Model L1 TPH TPS A H (width across flats) Applicable tubing O.D.

Series KP/KPQ/KPG

21.5 19.5 22 20.5 28.5 24.5 32 27 28 27 25.4 25.4 25.9 26.4 32.3 30.3 37.5 33 34 34.5 12 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 4 18 4 4 14 6 19.5 10 10 L A M H 17 8 21.5 26 18 Connection threads 19 10 24 41 29 22 12 25 58 46 Reference dimension for R threads after installation Male Elbow: KPL Effective area mm Note 1) D1 Model L1 TPH TPS A H (width across flats) Applicable tubing O.D.

KP/KPQ/KPG

-04 KPGY04-M5 KPGY04-01 KPGY04-02 KPGY06-M5 KPGY06-01 KPGY06-02 KPGY08-01 KPGY08-02 KPGY10-02 KPGY10-03 KPGY12-03 KPGY12-04 M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 10 14 8 10 14 12 14 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 6 13 19 7 14 20 14 22 29 39 41 68 4 4 4 18 20.7 10.4 D1 10 M M L1 8 L2 A D1 6 10 10 19.5 22.8

Air Fittings Fitting Series For Special Environment

O e b u t ) h c n I ( . n i M e l o h . a i d d a e r h T T P N . o N t r a P H ) . x e H ( D L A * M . t W ) f g ( 6 9 . 0 ) 5 . 4 2 ( 1 8 . 0 ) 5 . 0 2 ( 5 7 . 0 ) 9 1 ( 8 1 . 0 ) 6 . 4 ( 8 / 1 S 4 3 7 0 H R K 9/ 6 1 ) 9 2 . 4 1 ( 3 6 . 0 ) 6 1 ( 1 1 5 7 . 0 ) 9 1 ( 6 1 4 / 1 S 5 3 7 0 H R K 8 9 . 0 ) 5 2 ( 4 / 1 8 / 3 S 6 3 7 0 H R K 1 1 / 6 1 ) 6 4 . 7 1 ( 3 7 . 0 ) 5 . 8 1 ( 8 2 0 4