End Lock Cylinder Series CBJ2

6 15 8 0 -0.3 18.3 9.5 21 28 55.5 + Stroke 83.5 + Stroke With rear end lock / CBJ2B16-HN 0 h8-0.022 10 6 2-M10 x 1 Piping port 2-M5 x 0.8 8 M5 x 0.8 20 19.8 5 0 -0.3 18.3 12.5 15 8 12.5 50 + Stroke 8 28 86 + Stroke 3 Series CBJ2 Dimensions Flange With front end lock / CBJ2F16-RN 14.5 M10 x 1 Cover side (rear side) Piping port 2-M5 x 0.8 5 6 20 M5 x 0.8 20.3 19 20 2-5.5 Mounting hole 2.3

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

01 M5 x 0.8 Rc(PT) 1/8 (port A) VKF332 (with bracket) Body ported (single type) 5 G M5 Body ported (for manifold) 5 G M5 VKF333 5 G 01 VKF334 Base mounted Light/Surge voltage suppressor Valve option Port size For vacuum For low power consumption For vacuum/low power consumption For long loading time 01 Nil V Y Rc(PT) 1/8 (with sub plate) Without sub plate None With surge voltage suppressor

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

M5 x 0.8 Prepared hole diameter 4.2 20 W 0.50.05 D B Vacuum port M5 x 0.8 Piping port 2 x M5 x 0.8 33 32 10 J depth 1.5 3 5.5 5 12 9.5 +0.030 0 4 Section AA B D Mounting base side +0.030 0 depth 1.5 3 Q QL 11-/22-MXP12-25 Without magnet and switch rail 2 x M2 x 0.4 depth 3 8 5.7 3.5 L 20 20 6 x M4 x 0.7 depth 4.5 2 x M3 x 0.5 depth 3.5 (mm) G H J K L M Q QL S V W Z Model 11-/22-MXP12-15

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

size Model 11-/22-CXS6 6 11-/22-CXS10 11-/22-CXS15 11-/22-CXS20 11-/22-CXS25 11-/22-CXS32 10 15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8

PAB-OM-C006-B

Replacement parts PAB-OM-C006-B P2 FLUID IN FLUID OUT P1 IN FLUID PT F E diaphragm set K T PA 3 3 1 S w itching valve assembly set K T PA 3 3 6 FLUID OUT P2 P1 4 . Maintenance 3 . How to use C aution Quality of supply air Place filter w ith filtration 5 m.

PAB-OM-C007-B

Replacement parts PAB-OM-C007-B P2 FLUID FLUID OUT IN P1 PT F E diaphragm set K T PA 5 3 1 S w itching valve assembly set K T PA 5 3 6 FLUID IN FLUID OUT P2 P1 4 . Maintenance 3 . How to use E xternal leakage of transported fluid F luid might leak externally due to life of diaphragm, and this could result in human injury or equipment damage. T ake measures against leakage.

Space Saving Vacuum Ejector Vacuum Pump System

ZQ-OM00801-D Circuit Diagram Specifications of a Single Unit Ejector System L a L a L a t t t c h c h c h i i i L a L a L a n g n g n g 32 t t t t t t c c c y y y h h h Doc. no. ZQ-OM00801-D Pump system 33 - Doc. no. ZQ-OM00801-D Manifold Specifications Ejector System ZZQ1-BSB ZZQ1-BSC Pump system ZZQ1-OB ZZQ1-OC 34 - Doc. no. ZQ-OM00801-D Mass Ejector System Pump system 35 - Doc. no.

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

t Gasket V#6500 O.D.268 X I.D.225 X T3 O.D.218 X I.D.175 X T3 y AL-62S AL-63S AL-31S NBR JIS B2401G35 1 pc. JIS B2401G35 1 pc. JIS B2401G35 3 pcs. JIS B2401G35 3 pcs. JIS B2401G35 5 pcs. u O ring 4.6-10 Series AMD Dimensions: AMD150 to AMD650 Accessories D: With auto drain (N.O.) C: With auto drain (N.C.) N.C. auto drain not available for AM650.

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

Electrical entry SC (T only) Type SU Type SC Type SC Type SU Type SC Type SU AXT622-5A AXT336-4AStations AXT336-5Stations Assembly part no.

VXF

Start-up speed = PM x 0.9 t MPa/ms 17-3-74 5 The VX series will be revised shortly.

VXZ

Fluid Table (1) Rated Voltage-Electrical Entry-Electrical Option Standard specifications Option (1) Made to Order (2) Water (standard) Turbine oil High temperature water (D, E) Air X500B Vacuum (up to 1.3 x 10 2 Pa) X500B For pure water X500 G C Class B D, T Class H G, C T S Note) S L, Z L, Z S Note) Surge voltage suppressor is attached in the middle of lead wire.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Back cover 8 2-Color Display Digital Flow Switch RoHS PF2M7 Series How to Order PF2M7 10 C6 A M Integrated display q r t y u i w e q Rated flow range e Port size Piping variations 01 0.01 to 1 L/min 02 0.02 to 2 L/min 05 0.05 to 5 L/min 10 0.1 to 10 L/min 25 0.2 to 25 L/min 50 0.5 to 50 L/min 11 1 to 100 L/min 21 2 to 200 L/min With One-touch fitting Female thread C4*2, C6, C8, N7 01, 02,

Vacuum Unit Series ZK2

Note 16) Select C, L, L1, Y when the pressure sensor (P, T) is selected for t Pressure Sensor/Digital Pressure Switch for Vacuum Specifications. Since only grommet type is available for the pressure sensor, sensor without lead wire cannot be selected.

PSxx-PSV0007

ISE20B-T 0x0013 (19) 0 R Product ID e.g.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

1 q t i PF2D540 o !0 u !0 !2ywr e !

Vane Type Rotary Actuator Series CRB1 New 63mm Bore Size

Key Position and Rotation Range Single vane type Double vane type 90 180 270 90 n o r a a ti r n n g n a o e g n o t ti r a ti o n a a 2 e g t r t o 7 e o 1 r y 0 r 9 8 y e 0 y +4 0 e 0 Key K e K +4 0 +4 0 K +4 0 Key Key 0 (45) 9 Key e Standard Optional g n a r n o ti a t o r (90) y e K (45) (45) A port B port A port A port A port B port B port B port 100 190 280 100 a r n n n r o a g

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

dimensions XAH7 depth XL 4-YY depth YL XB XAH7 a b X0.02 c d e XAH7 XC XL X Section XX detail Bore size (mm) a b c d e 40 6.5 4 11 5.5 10.5 WB Z WA Section XX 8.5 50 4.5 13.5 7.5 13.5 11 7 18.5 63 10 17.8 Bottom view L 4-OA through 4-OB counter bore depth OL Section XX WA Z Section XX IA 4-NN through IC 4-MM depth ML R X0.02 HA T-slot for hexagon bolt X0.02 DA DB mIB ID X U VB VA H T PW

LG1H

for each symbol only and cannot be used for actual model selection. 2 0 147 2 Series LG1H20 Standard Motor High Rigidity Direct Acting Guide Motor Output Ground Ball Screw 100W 15mm /10mm lead Horizontal Mount Without Coupling How to Order 1 F 2 PA Stroke LG1 H202 Power voltage Cable length 1 2 100/110VAC (50/60Hz) 200/220VAC (50/60Hz) 2 3 4 5 2m 3m 4m 5m Frame material Nil Aluminum alloy T

S Couplers

T T 26 13 H L1 L1 H L3 (mm) (mm) H Width across flats 18 28 38 73 18 28 38 73 H Width across flats 90 92 91 117 90 92 91 117 When connected T Connection male thread T Connection male thread Min. hole size Min. hole size Weight g Model Weight g Model L1 L2 L1 Full length L3 KK130S(L)-01F -02F -03F -04F KK130P-01F -02F -03F -04F 53.0 62.5 66.5 76.0 53.0 62.5 66.5 76.0 Rc1/8 Rc1/4 Rc3/8 Rc1/

99

Dimensions A B 70 53 Element Dimensions A B Model EJ701S-T EJ801S-T EJ901S-T Applicable container 157 117 FGH100 286 246 FGH200 538 498 FGH300 71 Membrane Element for FGH Series ED Series RoHS Specifications Model EDS-X20 EDS-X40 Filtration accuracy (Filtration efficiency 99.9%) Note 1) 0.2 0.4 Length 247 mm 4,000 6,200 Filtration area (cm2) 495 mm 8,000 12,400 Heat resistant temperature