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ZQ-OM01301-A Vacuum Pump System Manifold ZZQ108A-S O C-A (1) (2) (3) (4) (3) Vacuum release pressure supply port (PD port) (1) Number of stations B None (Release pressure is 01 1 stations supplied from the P port.) 02 2 stations C Note 2) Provided (Breaking pressure: Supplied : from D port) 08 8 stations Note 2) Select S for the Option Symbol (10). (4) Shipping condition (2) Vacuum pressure

B-1 A-1 B-2 A-2 B-3 A-3 Connector C terminal no. Signal Cable color S Standard cable Brown Red Orange Yellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

2 (A) 2 3 (R) VlA VH300 / 400 5 6 VM/VR 4 3 VH 1 8 7 4 (B) 3 (R) 1 (P) 2 (A) 2 VH600 6 5 4 1 7 1 (P) 2 (A) 4 (B) 2 3 (R) Component Parts Material VH200/300/400 Zinc die cast Aluminium die cast VH600 Cast iron Description No.

QW PW GP W 2 x P (Piping port) 2 x UU (Bumper bolt) HP HA HG 2 x For holding switch rail GA G A L A G R GA 5.3 (6.9) 2 x 2 x Counterbore diameter B 14 Square nut 2 x 2 x Counterbore depth C K 18.5 Q + Stroke GB (NA) GB 2 x NN (Adjustment bolt) (NF) (NC) (NB) (NC) (NE) 2 x Shock absorber Amount of stroke adjustment Y2 Y1 Adjustment bolt Shock absorber Bumper bolt CY3B CY3R R1 R1 With shock

H 4 S y m b o l Initial power/ Power consumption (W) 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

(Normally open) 1 2 Note) B Option Note) Latching manual override: push-locking type only.

(Normally open) 1 2 Note) B Option Note) Latching manual override: push-locking type only.

Quick exhaust Normal operation High speed supply B 1/2 PP PA C D PA PP 1(P) 2 2(A) 1 1/2 PP = approx.

4 0.1 [MPa] 2 1 2 0 0 0 0 3 2.5 2 1.5 1 0.5 Distance from the workpiece [mm] 0 3 2.5 2 1.5 1 0.5 Distance from the workpiece [mm] 0 1 1.5 0.5 2 2.5 3 Distance from the workpiece [mm] ZNC60m ZNC80m 30 70 0.5 [MPa] 0.5 [MPa] 60 25 0.4 [MPa] 0.4 [MPa] 50 Lifting force [N] Lifting force [N] 20 0.3 [MPa] 0.3 [MPa] 40 15 0.2 [MPa] 0.2 [MPa] 30 0.1 [MPa] 0.1 [MPa] 10 20 5 10 0 0 0 3 2.5 2 1.5 1

AF-OMX0054-B PRODUCT NAME Micro Mist Separator MODEL / Series / Product Number AFD20-(F,N)01(F,N)02(B,C)(-2,6,C,J,L,R,Z)-D AFD30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,L,R,W,Z)-D AFD40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,L,R,W,Z)-D AFD40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-D Contents Page 1. Safety Instructions 2-7 2. Application 8 3. Standard Specifications 8 4. How to Order 9 5.

AF-OMX0053-B PRODUCT NAME Mist Separator MODEL / Series / Product Number AFM20-(F,N)01(F,N)02(B,C)(-2,6,C,J,L,R,Z)-D AFM30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,L,R,W,Z)-D AFM40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,L,R,W,Z)-D AFM40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-D Contents Page 1. Safety Instructions 2-7 2. Application 8 3. Standard Specifications 8 4. How to Order 9 5.

Set pressure range 0.1 to 0.83 MPa (2) Terminal block -5 to 60 (No freezing) (3) Ambient and fluid temperature marking Model A B + B Port size fo connection of pressure gauge Rc 1/8 VFR5100 A side COM Weight (kg) 0.83 Effective area at supply side (mm 2) PA 44 38 32 VFR5200 A side COM B side VFR5400 3 5 A side COM B side S at P 1=0.7 MPa/P 2=0.5 MPa PB 38 40 31 Effective area at exhaust side

/2 63.5 ( 20 Stroke)/2 61 ( 25 Stroke)/2 63.5 ( 30 Stroke)/2 63.5 ( 40 Stroke)/2 66 ( 50 Stroke)/2 66 ( 65 Stroke)/2 71 ( 75 Stroke)/2 68.5 ( 90 Stroke)/2 73.5 ( 100 Stroke)/2 68 ( 5 Stroke)/2 68 ( 10 Stroke)/2 70.5 ( 15 Stroke)/2 68 ( 20 Stroke)/2 70.5 ( 25 Stroke)/2 68 ( 30 Stroke)/2 70.5 ( 40 Stroke)/2 75.5 ( 50 Stroke)/2 75.5 ( 65 Stroke)/2 80.5 (

(Normally open) 1 2 Note) B Option Note) Latching manual override: push-locking type only.

14, 2 (PA, B) 4, 25, 3 (A, BEA, EB) Model 4, 2 (A/B) 1, 5, 3 (P/EA/EB) C[dm3/(sbar)] C[dm3/(sbar)] Cv Cv b b C6 SS5V1-16 C8 0.89 0.22 0.23 0.22 0.21 0.98 C8 SS5V2-16 C10 2.3 0.50 0.56 0.28 0.18 2.7 Note) Value is for manifold base with 5 stations and individually operated 2 position type.

Refer to page 2. 11 3.5 2-M3 x 0.5 (port size) M3 x 0.5 (Relief port: 10 See above) (Vacuum port: 11 See above) 3.5 3 C + Stroke B + Stroke A + Stroke (mm) Without auto switch With auto switch A B C A B C Bore size (mm) 24 18 29 23 11.5 16.5 6, 8, 10 4 Series CUJ Construction Double acting !3 w e q !1 r y o e t !2 For 4 Built-in magnet Without magnet Single acting u i r y o e w i e u !

0.8 22.5 2.5 Finger opening port 4.5 11.5 23 11 2 18 25 15.5 41.5 5 33 Angle adjustment bolt 63 11 2 x 4.5 through 2 depth 4 +0.025 0 3 x 3H9 (one each on three sides) 2 x 8 depth of counter bore 2.5 10 long groove depth 3 +0.025 0 3 x 3H9 (one each on three sides) 0 -0.062 37h9 M5 x 0.8 M5 x 0.8 Port A Port B 4 x M4 x 0.7 depth 6 N J I E A D P A A M N 2 C M S R R E O P T 6 P A R I R Y G

Note 2) The figure shows an extended piston rod. 10-9-10 10 Heavy Duty Stopper Cylinder Series RSH/RS1H Proper Auto Switch Mounting Position Auto switch B A RE A B REC CX CY Proper Auto Switch Mounting Position D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W Auto switch models MQQ M D-Y69 D-Y7PV D-Y7WV D-Y7BAL RHC Bore size (mm) A B A B A B MK(2) 20 8(6.5) 18 18 9.5 18 2 32 10.5(9) 13.5 13.5 12 13.5 4.5 RS

(650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC Bore size (mm) A B A B A B MK(2) 20 8(6.5) 18 18 9.5 18 2 32 10.5(9) 13.5 13.5 12 13.5 4.5 RS Q G 50 12(10.5) 22 22 13.5 22 6 63 15.5(14) 24.5 24.5 17 24.5 9.5 RS H A 80 22(20.5) 37 37 23.5 37 16 The values inside ( ) are for D-Z73.